High Power Cylinder:

0 i e r y !3 !4 @0 !9 t !8 @2 @4 !

High Vacuum L Type Valve

C E E (KF flange) (K flange) Fd Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMV0017 6.

SJ1000/2000/3000 Series

Note 1) To change the port size of the 1(P), 3/5(E) ports into the Fitting Replacement By replacing a valves fitting assembly, it is possible to change the port size of the 4(A), 2(B), 1(P), and 3/5(E) ports. When replacing it, pull out the fitting assembly after removing the clip with a flat blade screw driver, etc.

Digital Flow Switch (Remote type sensor unit)

Vinyl chloride piping tube (30 A) ZS-40-U30 30 A Vinyl chloride piping tube e 1 pc. 25 A Holding plate ZS-40-U25-A 1 pc., With two hexagon socket head cap screws of M5 x 80. 30 A Holding plate ZS-40-U30-A 1 pc., With two hexagon socket head cap screws of M5 x 65. : Accuracy may vary by 1 to 2%, if vinyl chloride piping tube is replaced. -13No.PF-OMN0010-J Summary of Product parts Body 1 DC

VFN2000N

A 24 VK M5 thread 8 deep, with or without insert depending on base material. VZ 32 VF A' VFR Coding stud.

IC

Note 2) Since the electro-pneumatic regulator connection cable w and the cable for external Sensor pressure port (M5 x 0.8 x 7) IC e e r sensor r are identical in shape, take precautions against erroneous connection. w VBA w Internal Circuit and Connection VE VY1 Brown SW1_OUT power supply(+) Red 12 to 24 VDC Load For the setting procedure and detailed cable connection specifications, please

Model Selection 1

M5, 1/8, 1/4 1, 1.6, 2.3, 3.2 2, 3, 4 0 to 0.9 (1) 17-2-68 VV2DW1/2/3 N.C. Manifold M5, 1/8, 1/4, (3/8) Solenoid valve 17-3-17 VX21/22/23 N.C./N.O. Single unit 2, 3, 4.5, 6, 8, 10 1/8 to 1/2 0 to 3 (1) 17-3-25 VVX21/22/23 N.C./N.O.

Platform Cylinder Series CXT

Grease pack part no.: GR-S-010 (10 g) Individual -X 527 Series CXT Dimensions: 12 to 25 S + Stroke X + Stroke H 4 x LD through, counterbore B depth C 4 x MM HP Depth M Back side 4 x J depth JK HG HA T PA T (N) d d NN RW RW PW QW PB GP E W Y Z 2 x M5 x 0.8 2 x RB G G HT U (NA) (Option) A L HN (Max.)

Clean Air Module

Bushing e Check that the connecting brackets B (at two positions) are attached, and insert the bushing projection of the pressure outlet port assembly into the indent of the air operated valve assembly. Similarly, insert the end plate assembly into the pressure outlet port assembly.

RSH

1 e @2 #7 #3 #1 !2 32 w 50, 63, 80 @3 Double acting (DL, DM) !3 !5 #6 o @5 i @1 @4 @6 !0 @7 @9 !6 t i !7 q !8 #8 $1 Single acting (TL, TM) Double acting built-in spring (BL, BM) $0 y r !1 #7 e #4 #7 !

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

AK ASS ASR ASF 15-9-25 3 Series AS Construction: AS1400-M3 Construction: AS1200-M3, AS120-M5, AS220/320/420 AS2200, 3200, 4200 Meter-out type AS1200-M3, M5, U10/32 Component Parts No.

CG5-S

(mm) Bore size (mm) Stroke range A P AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA S ZZ 20 to 350 1/8 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 83 118 25 to 400 1/8 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 83 123 32 to 450 1/8 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8

XLDV Series

Closing the valve for initial pumping and the valve for main pumping When the initial and main pumping solenoid valves are de-energized, the valve S and M will return and start sealing. 9 XL-OMM0005-A 5 Dimensions 57.6 XLDV-25 (For AC) 55.4 (For DC) 2.2 8.5 C E B 1(P) D (KF flange) Fn G M5 1(P) SUP A M5 3(R) EXE H A XLDV-40160 C C E B 8.5 8.5 5.5 D (KF flange) Fd (K flange) M5 G Fn 1(P) SUP

Rotary Table: High Precision Type

Please refer below for calculation of kinetic energy. 2 ) ( 2 1 O I I E E: Kinetic energy [ J ] I: Moment of inertia of load [ 2 m kg ] Io: Moment of inertia of load [ 2 m kg ] : Angular speed [ s rad ] The following table shows moment of inertia of table. Table 6.

        Series VKF300

01 M5 x 0.8 Rc 1/8 (A port) For the port size 01 only.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

9 @2 @0 @1 e w !5 !6 !3 !2 !1 !0 q t r i S u y o !4 !8 !

HRL

temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid flow rate: Rated flow, r Power supply: 200 VAC 4 q Ambient temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid temperature: CH1 20C/CH2 25C, r Load: Same as the cooling capacity, t Circulating fluid flow rate: Rated flow, y Power supply: 200 VAC, u Piping length: Shortest 5 With the pressure control

VZS

Applicable manifold base Plug-in type With attachment plug lead wire: Type 51G Description Component parts Manifold block u, Junction box i, Lead wire assembly o Tie-rod y, O-ring e, r, Seal A q VVZS2000-1A-1-Port size (1) Manifold block assembly Manifold block u, Tie-rod y, O ring e, r, Seal A q Non plug-in type: Type 51 VVZS2000-1A-2-Port size (1) Plug-in type With D-sub connector: Type

3

0 3-Color Display Digital Flow Monitor for Water PF3W3 w w y e u w Component Parts No.

Series AP3500

q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.