Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A Ball bushing bearing #5 @5 #0 @6 @8 !7 !3 #8 !2 @1 !

Smooth Cylinder

Dimensions/12 to 25 Standard (Through-hole/Both ends tapped)/CQSYB, CDQSYB 12 2-M5 x 0.8 Auto switch Lead wire min. bending radius 10 H thread effective depth C 2 x 4-OB counter bore depth RB 2 x 4-OA effective depth RA Note 1) Q F 16 I 4-N through D M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod end male thread Bore size (mm

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Basic Style (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 C D E F H I K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5

Smooth Vent Valve

6, and also to confirm that the main air supply adjustment nut t is rotating freely. Keep rotating the main air supply adjustment nut t to the right, and the point at which it stops is the initial air supply adjustment amount. After confirming the position of the main air supply adjustment nut t and the angle alignment scale of the main air supply scale plate !

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

D M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod End Male Thread Bore size (mm) 12 16 20 25 (mm) C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Basic Style (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 C D E F H I K L M N OA OB Q

TABLE OF CONTENTS

.T .

CATALOG VC10

(41.7) 1.00 .30 1/8-27 N.P .T .

Compact Slide Series MXH

50 60 98 25 6 25 60 108 60 30 6 30 D-X Individual -X 27 Series MXH Dimensions: 20 LT 31 20 J x M5 x 0.8 Depth 9.5 LA LB 14 3 x M6 x 1.0 through Bottom hole dia 5.1 6 x 9.3 counterbore depth 8 Plug for port (Hexagon socket head set screw) 4 x M5 x 0.8 x 4 l 4 x M5 x 0.8 Depth 11 4 x M5 x 0.8 depth 8 Guide rail width 12 2 x M5 x 0.8 9.5 34 6 24.5 63.5 64.5 34 32 7 34 32 7 6 20 20 11 6 15 NS

Guide Cylinder Series MGG

T 2 x P (Rc, NPT, G) Q B S W U K L E R I AA AL AP X A AB J V Y + Stroke Z + Stroke 8 x AF AC AD AE (mm) Bore size (mm) 20 25 32 40 50 Stroke range (mm) A AA AB AC AD AE AF AL AP B C D E F G H I J K L M N 90 11 11 7.5 75 30 6 25 108 15 60 92 5.5 30 55 60 80 25 45 M5 x 0.8 depth 10 M8 x 1.25 depth 14 75, 100, 125, 150, 200 9.5 depth 6 100 14 13 7.5 85 30 6 30 130 17.5 65 113 6.6 35 65 70 100

CRQ2

(mm) P = Operating pressure [MPa] T 0425 T 0604 TU 0805 T 0806 1/8B T 1075 TU 1208 T 1209 1/4B TS 1612 3/8B T 1613 1/2B 3/4B 1B 4.9 4 2.5 l = Length of piping [mm] 12.6 6 4 a = Internal cross section of piping [mm ] 19.6 8 5 QC = Air consumption required for one reciprocation of rotary actuator [l (ANR)] 28.3 8 6 33.2 6.5 44.2 10 7.5 50.3 12 8 63.6 12 9 66.5 9.2 113 12 16 127 12.7 133

ARM10/11

Material Description Description q w e r t y u i o !0 !

2/3 Port Solenoid Valve for Chemicals

1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No. Material Part list/LVM13R, 14R, 16R, 115 !2 !0 Plate 1 PEEK/PFA !1 Diaphragm assembly 2 EPDM/FKM/Kalrez Body 3 PBT Slide bush assembly 4 POM/Stainless steel y Armature assembly 5 Stainless steel/PBT Coil assembly 6 t Sleeve 7 Iron u Spacer 8 i !

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

(mm) P = Operating pressure [MPa] T 0425 T 0604 TU 0805 T 0806 1/8B T 1075 TU 1208 T 1209 1/4B TS 1612 3/8B T 1613 1/2B 3/4B 1B 4.9 4 2.5 l = Length of piping [mm] 12.6 6 4 a = Internal cross section of piping [mm ] 19.6 8 5 QC = Air consumption required for one reciprocation of rotary actuator [l (ANR)] 28.3 8 6 33.2 6.5 44.2 10 7.5 50.3 12 8 63.6 12 9 66.5 9.2 113 12 16 127 12.7 133

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Rc NPTF G NPT F N T, F, N are order made specifications.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Rc NPTF G NPT F N T, F, N are order made specifications.

Short Stroke Electric Actuator Series LX

Stroke + 126 3.3 24 1 5 3 5.8 8 3 21 59 F 5H9 +0.030 0 depth 5 T-slot dimensions (2/1) 29.5 5H9 +0.030 0 depth 5 6 T-slot 4-M5 x 0.8 (for body mounting) thread depth 8 (11.5) 38 E Refer to page 299 for mounting.

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No. Material Part list/LVM13R, 14R, 16R, 115 !2 !0 Plate 1 PEEK/PFA !1 Diaphragm assembly 2 EPDM/FKM/Kalrez Body 3 PBT Slide bush assembly 4 POM/Stainless steel y Armature assembly 5 Stainless steel/PBT Coil assembly 6 t Sleeve 7 Iron u Spacer 8 i !

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

2 Meter-out type Meter-in type 638 Speed Controller with Indicator/Elbow Type Uni Thread Type AS-FS Series Dimensions: Elbow Type Seal method: Gasket seal For Uni thread Indicator window direction: 0 Indicator window direction: 180 W1 X W2 Y D3 AS-F AS-F Applicable tubing O.D. d TMH ASD AS L3 A L4 D1 AS-FE KE AS-FG L2 L1 M1 AS-FP H (Width across flats) T AS-FM Metric Size [mm] Model d T H

ARM10/11

Material Description Description q w e r t y u i o !0 !

E-MY2_E_D

Front view Mounting holes on the top Bottom view T slots on the bottom T slots on the bottom Mounting holes on the top Model Nominal of actuator Thread size Model Nominal of actuator Thread size Effective length 16 M3 16 M3 4 to 5mm E-MY2C E-MY2H E-MY2C E-MY2H 25 M5 25 M5 6 to 8mm 16 M5 16 M4 6 to 7mm E-MY2HT E-MY2HT 25 M8 25 M6 8 to 10mm If T slots on the bottom is used for installation,