CQ2

6 Piston w Piston rod e Replacement Parts: Seal Kits Collar Snap ring Bushing Return spring Bronze element Snap ring Plug with fixed orifice Rod end nut Guide boss ring One-touch fitting r t y u i o !0 !1 !2 !3 Series Bore size Kit No. Contents CQ2B12-S-PS 12 CQ2B16-S-PS 16 Kits include items !4, CQ2B20-S-PS 20 Pneumatic !5 and !6 from the CQ2B25-S-PS 25 table above.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Flange bracket material: Carbon steel 7-6-19 20 Series CQ2 Accessory Bracket Double Knuckle Joint Single Knuckle Joint For I-G012, I-Z015A I-G02, I-G03 For I-G04, I-G05 I-G08, I-G10 For Y-G012, Y-Z015A Y-G02, Y-G03 For Y-G04, Y-G05 Y-G08, Y-G10 ND hole H10 Axis d9 ND hole H10 Axis d9 Material: Carbon steel Material: Cast iron Material: Carbon steel Material: Cast iron Courtesy of Steven

Aluminum High Vacuum Angle Valve

steel 304) Body y (Material: A6063) w Valve seal (Maintenance part) r S Valve seat assembly (Maintenance parts) S Valve i (Material: Stainless steel 304) (Material: Stainless steel 304 + Sealant) Plate Valve side exhaust Port 3(R) (Exhaust port) Refer to the back of page 465 for Maintenance Parts.

Slider Type Ball Screw Drive/11-LEFS Series

How to Order 25 100 B 2 S A1 S2 w e r t u y i o !0 !

Compact

LER Application Examples LEH LEY -X5 11LEFS 11LEJS 25ALEC LEC S LEC SS-T LEC Y Motorless Variations Belt Drive Note) Cannot be used for vertical transfer.

CRQ2

8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

ISO Cylinder

C85NT08A-S C85NT10A-S C85NT10A-S C85NT20A-S C85NT25A-S Mounting nut C85NT08B-S C85NT08B-S C85NT10B-S C85NT10B-S C85NT20B-S C85NT20B-S C75 Standard C75 Double acting, Single rod C75W Double acting, Double rod C75 Single acting (Spring return/extend) Direct mount C75R Double acting, Single rod XC6A only Description Bore size [mm] 32 40 Rod end nut C76NT32A-S C76NT40A-S Mounting nut C76NT32B-S

Electro-Pneumatic Positioner Series IP8000/8100

Cable connector (option) 63 (S type: 39) L1=101 (S type: 77) Part name Part number Suited cable outer diameter Resin-made cable clamp unit (A) P368010-26 7 to 9 M8 x 1.25 Resin-made cable clamp unit (B) P368010-27 9 to 11 M8 x 1.25 Actuator main shaft Actuator main shaft Side mounting with the fork lever assembly M Side mounting with the fork lever assembly S Cable connector G1/2 Exploded

ZP

A J K B Y C D Misc.

Pressure Gauge Guide

VE 3 Bleed port Model (Made to Order) Pressure range Note) Indication unit Connection thread VY1 Note Model MPa G43-2-01 to 02-X2 G43-4-01 to 02-X2 G43-6-01-X2 G43-7-01 to 02-X2 G43-10-01 to 02-X2 G43-2-01 to 02-X3 G43-4-01 to 02-X3 G43-6-01-X3 G43-7-01 to 02-X3 G43-10-01 to 02-X3 G43-2-01 to 02-X4 G43-4-01 to 02-X4 G43-6-01-X4 G43-7-01 to 02-X4 G43-10-01 to 02-X4 0 to 0.2 0 to 0.4 0 to 0.6

CV/MVGQ

Nut Mounting hole 16 [17] S + Stroke Z + Stroke H1 B1 Bore size (mm) 10 16 Mounting hole 7 3.2 8 4 [ ]: Denotes the values of AC. 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) LA H F D LY NN C LX Y B LC LT MM X A LB LH LZ NA NB S Z Z S Z S Z S 96.5 [97.5] 104 [105] 96.5 [97.5] 105 [106] 116 [117] 117 [118] 128 [129] 129 [130] 10 16 28 8 4 M8 x 1 14 24 7 84 12 1.6 5 72 15

CV/MVGQ

Z + 2 x Stroke 7 3.2 8 4 C J G5-S [ ]: Denotes the values of AC. 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) CV LA H F D LY NN C LX Y B LC LT MM X A LB LH LZ NA NB S Z Z S Z S Z S 128 [129] 129 [130] 116 [117] 117 [118] 96.5 [97.5] 104 [105] 96.5 [97.5] 105 [106] 10 16 28 8 4 M8 x 1 84 14 24 7 72 12 1.6 5 60 15 15 9 32 9.5 37.5 4.5 16.5 M4 x 0.7 12.5 52.5 MVGQ 28 8 5 M10

C85

1 y q r e i !2 o !

CA2

7 i q r e y @2 t !8 !9 !6 !1 !2 !4 !5 !0 !

Vacuum Pad

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Weight [g] Note LE-CP-1-S 190 Standard cable LE-CP-3-S 280 LE-CP-5-S 460 LE-CP-1 140 Cable color Connector D terminal no.

15

+ A = 100 y, z + A 100 10 y, z + A = 200 y, z + A = 200 y, z + A = 300 y, z + A = 300 1 1 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 700 800 Stroke [mm] Stroke [mm] [Graph 6] Allowable load mass by stroke 32 [Graph 5] Allowable load mass by stroke 25 100 100 y, z + A = 0 y, z + A = 0 y, z + A = 50 y, z + A = 50 10 Load mass [kg] Load mass [kg] 10 y, z + A = 100 y, z + A = 100

CJ2

Component Parts No. q w e r t y No. u i o !0 !

CJ2

Component Parts No. q w e r t y u No. i o !0 !1 !2 !3 !

ITV_D-E

An appl i cat i on w hi ch has t he possi bi l i t y of havi ng negat i ve ef f ect s on peopl e, propert y, or ani m al s requi ri ng speci al saf et y anal ysi s. 2 H andl i ng precaut i ons CAU TI O N I f pow er t o t hi s product i s cut of f due t o a pow er f ai l ure, et c. w hen i t i s i n a cont rol l ed st at e, resi dual pressure w i l l be ret ai ned t em porari l y.