/03/04w 2-1/4,3/8, 1/2 A,B PORTS L L 2-1/8 PILOT EXH PORTS 15 33.5 A A B B 29.5 29.5 5-1/4 PORTS M12 CONNECTOR (OPTIONAL) 2-7 MOUNTING HOLES 43.5 23 23 11.5 14 14 4 2 12 12 25 17 18 25 5 1 3 46.5 12 12 2-3/8 EA,EB PORTS 22.5 22.5 L = 1/4 23.5 15 30.5 45 3/8 27 EA EB P 1/2 30.5 49.5 1/4, 3/8,1/2 P PORT 152.5 165.5 ALL DIMENSIONS ARE IN MILLIMETERS 11 Series VS R8b S ISO SIZE 2-3 SUB-BASE VS8w
rate (l/min (ANR)) 1.5 3 6 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 07, 08, 09, 10, 11 Effective area (mm2) Effective area (mm2) Effective area (mm2) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 14 Flow rate (l/min (ANR)) 20 Flow rate (l/min (ANR)) 10,11 12
Clean Air Filter SFD Series RoHS HAA HAW AT How to Order IDF IDU 1 0 SFD 0 C08 IDF FS Clean air filter IDFA Size Max. flow rate 100 L/min (ANR) 500 L/min (ANR) IDFB Option Option None Bracket (SFD100 only) Symbol 1 2 Symbol IDH Nil B The brackets are provided with the SFD200 series as a standard product.
Discharge Q B ZM Drain guide (-J) ZH ZU Maintenance space 40 R ZL P Rc 1/8 Drain 1/4 female thread without valve function ZY Hexagon width across flats 24 ZQ AMJ5000 L A F ZF Bracket (Option) G K M ZP D J C E ZCU OUT IN AMJ Misc. 2port size Q B Maintenance space 20 Rc 1/8 Drain (mm) A B Note) C D With drain guide R Note) Bracket mounting dimensions Model Port size Q E F G H J K L M 169 (
Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi
U C S O H L 1 Series IRV Dimensions IRV1000 IRV2000 53 55 41 30 50 SMC 35 P K U C SMC S O H L P K U C S O H L 40 34 8 x 6.5 15.4 x 5.4 Approx. 106 Approx. 50.6 18 Approx. 79 Atmosphere Atmosphere 45.5 13 SET VAC SET G SET G 30 SET VAC 43 Pad side Vacuum pump side Pad side Vacuum pump side Approx. 43 35 2-Rc 1/8 Connection port 2-Rc 1/8 Vacuum gauge port 2-Rc 1/4 Connection port Approx. 60
Stations: 02 (2 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: F (G), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: P (w/o Flow Adj.
: L/min; Accumulated Flow: L; Temp.: °C)
Valve; w/Stop Valve), Supply/Return Port Size: 06 (3/4), Return Unit Flow Switch Output Specifications: B (Out 1: PNP; Out 2: Flow Rate: PNP; Temp.: None; Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min; Accumulated Flow: L
Stations: 02 (2 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 20 (2 to 16 L/min), Return Unit Components: S (w/Flow Adj.
Stations: 02 (2 Stations), Piping: U (U Side: Open; D Side: Closed), Thread Type: N (NPT), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 20 (2 to 16 L/min), Return Unit Components: S (w/Flow Adj.
Stations: 02 (2 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: F (G), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.
Stations: 02 (2 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: F (G), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: P (w/o Flow Adj.