Vacuum Unit Ejector / Vacuum Pump System

Light/surge voltage suppressor circuit is equipped for the valve type J, K and R.

Electric Actuator Miniature Rod Type Miniature Slide table Type

Confirm the position where the pushing operation starts. a b c d e f g h i j k No.

10

G G 2 x Rc P Width across flats KA E Width across flats KA TX D E E D B C MM MM H1 MB K Width across flats B1 TT ZZ + 2 x Stroke H S + Stroke H + Stroke N F A MA AL H1 Width across flats B1 C B N F A AL 2 x 4 x J K TY e d 10.2 10.2 f h l When the stroke is 1001 mm or longer, a tie-rod reinforcement ring is attached.

Electric Actuator with Integrated Guide

LTF8F-K Symbol 2H 3H 2V 3V Motor capacity 100W 200W 100W 200W 1) 1) 2) 2) Note 2) Be sure to use a regenerative absorption unit (LC7R-K1A) with this controller (with brake).

Thermo-chiller

(Fluid can be supplied manually for models without option -K if the side panel is removed.)

VCC

Model K VCKL0604-02F H KFN-06-X2 K VCKL0806-02F H KFN-08-X2 K VCKL1075-02F H L Union nut C3604BD + Ni plated 1 1 set unit KFN-10-X2 K VCKL1008-02F H K VCKL1209-02F H KFN-12-X2 K VCKL-02F H K VCKL0604-02F H KFS-06 K VCKL0806-02F H KFS-08 K VCKL1075-02F H M Sleeve Nylon 1 1 set unit KFS-10 K VCKL1008-02F H VNA VNB K VCKL1209-02F H KFS-12 SGC SGH N Gasket VCKK-4-1 Nylon 1 10 set unit VNC VNH

AC Servo Motor Driver (Network card type ）

SIGNALS AND WIRING 3.8 Interfaces 3.8.1 Internal connection diagram POINT Refer to section 13.3.1 for the CN8 connector. driver Servo amplifier (Note 1) 24 V DC CN3 CN3 Forced stop 2 Approximately 6.2 k EM2 20 3 DOCOM LSP 2 13 MBR RA (Note 3) (Note 2) LSN 12 9 INP Approximately 6.2 k 15 ALM DOG 19 RA (Note 3) Approximately 4.3 k TPR1 10 Approximately 4.3 k 1 TPR2 Isolated 5 DICOM CN3 (Note

CL

CLQ Lock operation MLGP Spring locking (Exhaust locking) Pneumatic locking (Pressure locking) Spring and pneumatic locking E P D RLQ Bore size MLU With rod boot 20 25 32 40 20 mm 25 mm 32 mm 40 mm Nil J K None Nylon tarpaulin Heat resistant tarpaulin ML1C Cylinder stroke (mm) Refer to Standard Stroke on page 9-2-18.

Secondary Batteries

Note 2) Assembly of a bracket and set nuts (90-AR30 and 90-AR40, 90-AR25(K) to 90-AR40(K)) Including 2 mounting screws for the 90-AR50(K) and 90-AR60(K). Note 3) The only difference from the standard specifications is the adjusting spring for the regulator. It does not restrict the setting of 0.2 MPa or more. Note 4) : For thread type: NPT.

CM2

J 70C Nylon tarpaulin K 110C* Neoprene cloth * Maximum ambient temperature for the rod boot only. Mounting Bracket Part No.

MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

MGP

MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW 42 29 11 7.5 8 8.5 9 M4 x 0.7 10 12 13 15 M4 x 0.7 4.3 4.3 5.6 5.6 M5 x 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 8 8 10 10 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 5 5 6 6 13 15 18 21 18 26 30 36 42 13 15 18 21 18 22 24 30 12 16 20 25 10, 20, 30, 40, 50, 75, 100 125, 150

MGP

PA+stroke GB Q (Plug) MG FB C+stroke FA G S B+stroke A+stroke E MGP MGPM, MGPL Common Dimensions MGQ Standard stroke (mm) Bore (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW MGG 42 29 11 7.5 8 8.5 9 M4 X 0.7 10 12 13 15 M4 X 0.7 4.3 4.3 5.6 5.6 M5 X 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 8 8 10 10 13 15 18 21 18 13 15 18 21 5 5 6 6 18 22

AC Servo Motor Driver

K to 10 For 5 m/PLS, set constant K to 50 The additional program is not required for the unit setting is PLS.

15

Sysmac G5 R88M-K OMRON Corporation MINAS-A4 MSMD Panasonic Corporation MINAS-A5 MSMD/MHMD is FANUC CORPORATION S-FLAG MA/MH/MM NIDEC SANKYO CORPORATION SV SV-M/SV-B KEYENCE CORPORATION ALPHA5 GYS/GYB FUJI ELECTRIC CO., LTD. FALDICGYS AR AR ORIENTAL MOTOR Co., Ltd. AZ AZ Ezi-SERVO EzM FASTECH Co., Ltd. MP-/VPMP/VP Rockwell Automation, Inc.

HRS100/150

(Fluid can be supplied manually for models without option -K if the side panel is removed.)

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

C76 Option Compatibility C85 NCM Standard C95 NCM-K NCM-J NCMW NCDM NCMK XB6 XB7 XB9 XC6 Description Note C S T CP95 NCM NCM NCDM NCMW NCMK NCM-J NCM-K S T C XB6 XB7 XB9 XC6 B C E R O O O O O O O O O O O O O O O O Standard Auto switch capable Double rod Non-rotating Nylon rod boot Neoprone rod boot Spring return Spring extend Rubber bumper Heat resistant Cold resistant Low speed Stainless

MG

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com WA Z Bottom view Section XX Z WA L 4-MM depth ML Section XX HA: T-slot for hexagon bolt 4-NN through 4-OA through 4-OB counterbore depth OL X 0.02 X 0.02 DA VB VA R U T X H PW DB XA depth 6 H7 XA depth 6 H7 2-P (Rc, NPT, G) GA 2-P PB (Rc, NPT, G) J K

EXxx-OMN0035CN

2.7 k DC24 V DC24 V 3 0 V 3 0 V 4 4 1 1 2.7 k 2.7 k 5 5 FE FE FE FE IP67 -20No.EX-OMN0035CN-A (2)EX600-DXC 1 24 V() 3 0 V() 4 EX600-DXPC EX600-DXNC 1 24 V 1 24 V *1 DC24 V 3 0 V DC24 V 3 *2 0 V 4 4 2.7 k 2.7 k 1EX600-DXPC1 2EX600-DXNC1 IP67 2 OFF 0.5 mA () OFF 0.5 mA 3 0.5 mA SI -21No.EX-OMN0035CN-A (3)EX600-DXE 1 0 2 2 3 4 4 6 5 8 6 10 7 12 8 14 9 NC 10 24 V()

LEY-OM007

-10 (INC) c 10[mm] 0 10 20 30 40 50 [mm] -27- 4 a b c d e f g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 ABS 100 20.00 3000 3000 80 40 30 100 10.00 20.00 20.00 No.00[mm] 20[mm]20[mm] 1 10 W [mm] c [mm] k 20 0 10 20 30 40 50 [mm] INP 2 k INPON g 30 W [mm] c [mm] k 20 0 10 20 30 40 50 [mm] INP INPOFF () k g BUSYONOFF -28- 5 a b c d e f g h i j k No. 1 2 mm/