C95

Description Material Note Qty. 10 1 Aluminum alloy Rod cover q 32 to 50 Carbon steel Steel ball B @0 1 Aluminum die-casted 9 Head cover w 63 to 100 Tooth ring 1 1 Aluminum alloy Cover e Stainless steel @1 Damper 1 1 Aluminum alloy Cylinder tube r Polyurethane rubber @2 Snap ring for release cam a 1 1 Carbon steel Piston rod t Carbon steel @3 Snap ring for taper ring 1 1 Aluminum alloy Piston

Speed Controller: Standard Type Series AS In-line Type

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT

Compact Manifold Regulator

A R 04 Z A q w e r u t y N Common Supply Type 1.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

1 and 2 L ranges.

KP/KPQ/KPG

-00 KPGU12-00 20.9 20.9 18.1 58 46 32 57.2 32.9 25 Q Note 1) D indicates the maximum diameter.

Series KP/KPQ/KPG

25 32 46 58 18.1 20.9 57.2 32.9 KPGU12-00 KPQU12-00 Q Note 1) D indicates the maximum diameter.

Series KP/KPQ/KPG

25 32 46 58 18.1 20.9 57.2 32.9 KPGU12-00 KPQU12-00 Q Note 1) D indicates the maximum diameter.

MHZ

0.5 1 MHZ2-25, MHZL2-25 0.5 0.4 0.5 1 0.5 1 MRHQ MHZ2-32 0.5 0.4 0.5 1 0.5 1 MHZ2-40 0.5 0.4 0.5 1 0.5 1 Misc.

MHZ

0.5 1 MHZ2-25, MHZL2-25 0.5 0.4 0.5 1 0.5 1 MRHQ MHZ2-32 0.5 0.4 0.5 1 0.5 1 MHZ2-40 0.5 0.4 0.5 1 0.5 1 Misc.

IDG

Port size: Rc 1/8, 1/4 (NPT, G threads are not available.)

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

20.9 18.1 58 46 32 57.2 32.9 25 KPQU12-00 KPGU12-00 Q Note 1) D indicates the maximum diameter.

VCA

36 44 53 55.5 Q 63 66 69 69 R 35 42 51 53.5 S 51 54 57 57 Q 27 30 32 32 R 40 48 56 58.5 41 50 60 68 64 76 86 91 18 24 30 35 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 VCA21 VCA31 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 4 Series VCA How to Order Manifolds (VCA20) VV2C A 2 02 02 How to Order Manifold Assemblies (Example) Enter the valve and option models to be mounted

Environment

0 i o e r t q u !1 !2 !3 !

Cylinder with Lock Series MNB

9i @2 q r y#0 $0 $2 w $3 #8 @9 A C B Section A !2 !2 #4 @6 #9 @8 $4 #2 #1 #6 #7 $6 !0 u @5 !6 @1 !1 $7 o $8 e $1 !2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.

VCL

Dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size B D E F H K L M N A C Model Note) Q V R Q R Q R S Q R S U 22 23 45 44 43 58 40.5 46.5 99 43 66 83 13.5 28 31 56.5 12.5 28 14 12.8 M4 4.5 64 1/8 VCL21 22 23 46 44 44 58 41.5 46.5 99 44 66 86 18 36 31 58.5 12.5 28 18 12.8 M4 6 67.5 1/4 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 99 22 40 36.5 11 15 32 20 19

Guide Cylinder Series MGG

5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

6 e (1 pc.) @4 10-11-10 10 Series MIW/MIS Escapements Construction: Single Finger Type (MIS) 8 12, 20 i e u q !3 y w o t RE A B !2 w r !0 !1 REC CX CY 25, 32 Option w @0 !1 !7 !8 !5 !9 MQQ M RHC !6 MK(2) (32 only) RS Q G Scraper Stroke adjuster RS H A No. Description Material Note Component Parts RZQ No. Description Material Note Hard anodized Piston seal NBR Aluminium alloy Body !

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

1, !

VM

Frequency Port size (Nominal size) Piston style 0.15 to 1.0MPa 5 to 60C (No freezing) VM/VR Red Green Orange Rc(PT) (6A) 40g VH 300 c.p.m or less R(PT) (6A) 1 8 1 8 Weight 6g Construction/Component Parts Construction/Component Parts w q Description Aluminum alloy Material Notes No. w q Description Brass Material Notes No.