Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

1 !6 !

Stopper Cylinder Adjustable Mounting Height Type Series RSG

Caution 1. Do not tighten beyond the prescribed tightening torque. 2. Mount so that the band does not run at a diagonal when mounting is completed. Correct mounting Incorrect mounting Auto switch Auto switch mounting screw M3 x 0.5 x 14l Auto switch mounting band (with brackets) 1.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

0 mm Stroke length tolerance 11-: Fluorine grease Grease 22-: Lithium soap base grease Grade 1 Grade 1 Without adjuster Particle generation grade (Refer to front matter pages 13 to 22 for details.)

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

10.5 26.7 11 5 5.5 34 35 8.5 4 x M6 x 1 +0.030 0 ) depth 4 4H9 ( ) depth 4 4H9 ( Prepared hole diameter 5.1 A 6.5 19 320.05 +0.030 0 30 W 0.50.05 B D 2 x M5 x 0.8 Piping port M5 x 0.8 Vacuum port 47 46 13 ) depth 2 4H9 ( J 10.5 8 +0.030 0 +0.030 0 ) depth 2 4H9 ( 16.5 14.5 Section AA 5 B D Mounting base side Q QL 11-/22-MXP16-30 Without magnet and switch rail 8 2 x M2 x 0.4 depth 3 10.7

ZP

M6 x 1 M5 x 0.8 SNJ-006A 9.2 8 3 SNJ-010A 3 12 13.9 SNJ-015A 16.2 14 3 M10 x 1 M14 x 1 SN-015A 21.9 19 5 Pad diameter: 10 to 50 ZP10B to 50B Model Size B06 A 6 ZP06B B 7 C 2.5 D 7 E G 3.3 H 9.1 Y 4 F 13 B08 8 ZP08B 9 2.5 7 13 4.7 10.1 4 B10 10 ZP10B 12 4 13 11.7 16 5.5 13.8 5.5 B13 13 ZP13B 15 4 13 14.2 18.5 8.7 19 7.5 B16 16 ZP16B 18 4 13 15.7 20 9.9 21 8.5 B20 20 ZP20B 22 4 15 19 23.5

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Note 3) In case of 5 mm stroke (with 1 pc.) or 10 mm stroke (2 pcs.), the switch(es) may not go off or more than one switch may turn on simultaneously. Set them at 1 to 4 mm out of the values in the above table. Note 4) ( ): Dimensions for D-A93. Specific Product Precautions Be sure to read this before handling. Mounting Caution Appropriate tightening torque 1.

Switching from real-time flow rate to accumulated flow is possible.Digital flow switch for de-ionized water and chemicals , Remote type sensor unit , Flow rate range: 0.4 to 4 l/min ~ 4 to 40 l/min , Output for display unit with or w/o analog output , Port sizes: 3/8", 1/2", 3/4", DIGITAL FLOW SWITCH, INSTRUMENTATION, PFD DIGITAL FLOW SWITCH, 2X, PFD NO SIZE (MISC.

High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

LEC-OM005xx

Functions . 14 3.1 Easy mode . 14 (1)Functions in easy mode . 14 (2)Tree structure of easy mode . 15 3.2 Normal mode . 16 (1) Functions in normal mode . 16 (2)Tree structure of easy mode . 18 4. System Structure . 19 5.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

106 (1 1/16") 3.31 3.19 3.88 3.76 125 (1 1/4") 4.21 4.16 150 (1 1/2") 4.25 4.12 6-14-19 20 Series NCM Mounting Bracket Accessory E dia.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

5 IS ISG Air tube M5 x 0.8 ZSM Part-C The dimensions of part C are common to all PSE56 models. 24 PSE56-C01 PSE56-A2 A 24 B B PSE56-B2 (mm) Model A A 8.2 12 9.2 12.2 15.5 9.5 B R 1/8 R 1/4 NPT 1/8 NPT 1/4 Rc 1/8 URJ 1/4 TSJ 1/4 24 B PSE56-01 PSE56-02 PSE56-N01 PSE56-N02 PSE56-C01 PSE56-A2 PSE56-B2 ZS-31-X H D (mm) Model 1 E D 20 20 29 29 E 9 9 13 13 F R 1/8 NPT 1/8 R 1/4 NPT 1/4 G Rc 1/

VQ7-6/7-8

Wiring specification L side R side L R O-ring NBR 4 AXT502-19 Side Bottom A B O-ring NBR 2 AXT502-20 Cylinder port size Plate SPCC 1 AXT502-22-2 Rc1/4 Rc3/8 6 One-touch fitting 8 One-touch fitting 10 One-touch fitting 02 03 C6 Note 1) Gasket NBR 1 AXT502-31 Oval countersunk head screw SWRH3 2 M4 X 8 C8 Note 1) C10 Note 1) Note 1) Side ported only 31 Series VQ7-8 Manifold Exploded View D side

High Vacuum Angle Valve

None XLFV16-30-1-2 XLFV25-30-1-2 XLFV40-30-1-2 XLFV50-30-1-2 XLFV63-30-1-2 XLFV80-30-1-2 Yes XLFV16A-30-1-2 XLFV25A-30-1-2 XLFV40A-30-1-2 XLFV50A-30-1-2 XLFV63A-30-1-2 XLFV80A-30-1-2 XLG General use None XLG16-30-1-2 XLG25-30-1-2 XLG40-30-1-2 XLG50-30-1-2 XLG63-30-1-2 XLG80-30-1-2 High temperature None XLG16-30-1H-2 XLG25-30-1H-2 XLG40-30-1H-2 XLG50-30-1H-2 XLG63-30-1H-2 XLG80-30-1H-2 *

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

Dimensions inside are for rubber seal. 6-1/2, 3/4 1, 3, 5 port 32 (35) 32 (35) 35 35 3-11-9 10 Series EVS7Dimensions EVS7-10-FG-S-M0 1/2, 3/4-5 port 1, 4, 2, 5, 3 port 200 124 124 45 (14 port) 76 39 37 2-8.5 mouting hole 45 (12 port) 5 1 3 22 (4 port) 22 (2 port) 22 12 2 4 14 14 80 26 33 80 95 50 B A 4 2 19 19 5 1 3 1/8-2 port 12, 14 port 47 47 Manual override 8 71 65 2-8.5 mounting hole

PF2A/PF2W

size (Rc, NPT, G) 3/8 1/2 1/8, 1/4 Note 1) The system accuracy when combined with PF2A3.

Fieldbus system PROFINET compatible SI Unit

, 19 diagnostics 0: Short circuit, 1: No error 2 Valve 20, 21 diagnostics 0: Short circuit, 1: No error 3 Valve 22, 23 diagnostics 0: Short circuit, 1: No error 4 Valve 24, 25 diagnostics 0: Short circuit, 1: No error 5 Valve 26, 27 diagnostics 0: Short circuit, 1: No error 6 Valve 28, 29 diagnostics 0: Short circuit, 1: No error 7 Valve 30, 31 diagnostics 0: Short circuit, 1: No error 33

Fieldbus system EtherNet/IP TM compatible SI Unit

V output 50005 V output (3)The resolution from 1 to 5 V is 1/1000 based on the calculation. (5 V 1 V) / (5000 1000) = 1/1000 Scale set value (AD value) Input/Output signal range (a to b) Voltage [V] Current [mA] Decimal number 0 to 10 1 to 5 0 to 5 0 to 20 4 to 20 Scale upper limit -32766 to 32767 10 5 5 20 20 Scale lower limit -32767 to 32766 0 1 0 0 4 : If the data format is scaled data

EXxx-OMW0014CN

Diagnostics type 1 . 5-1 Diagnostics type 1 Byte 0 General diagnostics 1 1 General diagnostics 2 2 Valve diagnostics 1 3 Valve diagnostics 2 General diagnostics 1 . 5-2 General diagnostics 1 Bit 0 System fault 0Diagnostics type 1Diagnostics type 1 1 Valve-coil(s) short circuit 0() 1 1 2 Module error 0 1 1 3 Changed module layout 0 1 1 4 US1 Diagnostics 0US1 ON 1US1 (DC19.2 V )

PFxx-OMA1007

power supply voltage 1: The power supply voltage exceeds the specified value. 0: Other than the above case. 10 Alarm generation 1: Any one of bits 4 to 9 is "1". 0: Bit 4 to 9 of the Bit offset are "0". 11 Internal communication error 1: Error 0: No error 12 Built-in solenoid valve error 1: Error 0: No error 13 Internal system error 1: Error 0: No error 14 EEPROM error 1: EEPROM error 0:

VEX1

(600mm lead wire) DIN connector DIN connector(Without connector) 2 01 1 8 1 8 H D DO Base mounted 02 1 4 1 4 Model Operating style Air operated External pilot solenoid P,A port , Port size Rc(PT) R port Model , 1 8 1 4 , 1 8 1 4 , 1 4 3 8 1 2 , 1 1 2 3 4 11 4 2 1 VEX1100 VEX1101 1 8 1 4 , VEX1200 1 8 1 4 , , VEX1300 1 4 3 8 1 2 1 1 2 , 3 4 , VEX1500 1, 1 VEX1700 1 4 1, VEX1900 VEX1201 VEX1301