ASR

MIN. 1 2 Note 1) d Note 2) L3 Note 3) L4 ASR430F-02-06S,-F20 ASR430F-02-08S,-F20 ASR430F-02-10S,-F20 ASR530F-02-06S,-F20 ASR530F-02-08S,-F20 ASR530F-02-10S,-F20 ASR530F-02-12S,-F20 ASR530F-03-06S,-F20 ASR530F-03-08S,-F20 ASR530F-03-10S,-F20 ASR530F-03-12S,-F20 ASR630F-03-10S,-F20 ASR630F-03-12S,-F20 ASR630F-04-10S,-F20 ASR630F-04-12S,-F20 89 111 17 34.9 57.7 6 63.7 21.5 20 17 R1/4 93 114

3 Port Air Operated Valve Series SYJA300 1

Note Symbol 1P Common Common 3R Common Individual 1 Type 41 Type 42 VHS 3 VV3PA3-42-053-02 Stations 02 2 stations ... ... 20 20 stations To order valves and blank plate assembly mounted onto the manifold, list valves and blanking plate assembly with manifold base part number.

4-channel Flow Monitor ( compatible)

16 Hex number) 10 11 12 13 14 15 16 17 18 19 1A 1B 1C 1D 1E 1F 7seg Display letter 11seg Value (16 Hex number) 20 21 22 23 24 25 26 27 28 29 2A 2B 2C 2D 2E 2F 7seg Display letter 11seg Supplementary information : Do not work [Toggle output command] Value Item Remarks CH1 0 1 CH2 Measurement value 2 CH3 3 CH4 CH1_OUT1 16 17 CH1_OUT2 18 CH2_OUT1 19 CH2_OUT2 OUT output Connected with hardware

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

stations 20 Port A: Rc(PT) 1/8 4 3 Port Direct Operated Poppet Series VKF300 Dimensions/Manifolds Body Ported Type Common SUP, Common EXH/Top Ported Type 20 Manifold Grommet: G DIN terminal: D 4-Rc(PT) 1/8 (ports P, R) Manual override (non-locking) Applicable cord O.D. 4 to 6.5 Max .10 71.5 78.5 71 Light (DZ type only) 2-4.5 (mounting holes) 67.5 59 19 17 2 R P P R 34 2.3 7 20 Pg.7 4-Rc

Electric Slide Table / High Precision Type 《 AC servo motor 》

Electric actuators / Common precautions . 10 2.1 Wiring/Cables . 10 2.2 Design/Selection . 11 2.3 Mounting . 12 2.4 Handling . 13 2.5 Operating Environment . 15 2.6 Maintenance . 16 2.7 Actuator with Lock . 16 2.8 Design/Selection . 17 2.9 Handling . 17 2.10 Mounting . 18 2.11 Power Supply . 19 2.12 Grounding . 19 2.13 Wiring . 19 2.14 Maintenance . 20 3.

Direct Solenoid

D ENSIONS A B c D E F 2.66 (67.5) 2.42 (61.5) (14) 0.28 17', 0.16 (4) 1.42 (36) ,ltrF-l rD C Solsnoid DIN "Electricrl Connector" 'AC" Vottage only ml--l l "*---l-l I .f;T.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Manifold Specifications for 20 Type Manifold Specifications for 20 Type Port size Flow characteristics SS5Y5-20 52-SY520 SS5Y7-20 Model 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) 1,5,3 Model 52-SY720 4,2 Applicable valve (A,B) c[dm3/(sbar)] c[dm3/(sbar)] Cv b b Cv (P,EA,EB) Single base / B mounting Manifold style SS5Y5-20 1/4 C8 1.90 0.28 0.53 0.20 0.48 2.20 1 (SUP) / 3/5 (EXH) Common SUP / Common

Aluminum High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

VXA21/22

Series VXA31/32 Dimensions P port Bracket Pilot port Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com J (Spanner flat) Port size P Port size Rc With bracket K 6 7.5 Symbol Model A B C D E F G H J M 14.5 17 L 29 32 1 8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5

Digital Gap Checker

(Bracket when control unit fitted) ISA-20 (Bracket for centralized lead wire) 28 46 14 16 16 20 19 8 (1.6) 5.5 6 12 22 60 48 2 x 3 6.5 2 x 3.4 4 19.2 2 x 5.5 2 20 ISA3 Series Error Indication Main screen Name Description Measures Supply rated pressure (100 kPa to 200 kPa).

CXS

2 2 CXSM CXSL CXSM CXSL 1 1 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 20 20 0 0.03 0 0.02 20 40 60 80 100 20 40 60 80 100 Overhang l (mm) Overhang l (mm) Graph (12) V = Up to 1000 mm/s; Up to 100 st CXSM CXSL Weight m (kg) 32 0.1 25 20 0 0.02 20 40 60 80 100 Overhang l (mm) 8-28-17 17 Dual Rod Cylinder: Compact Type Series CXSJ 6, 10, 15, 20, 25, 32 How to Order Piping Standard piping

CXS

Weight m (kg) 32 32 0.1 0.1 25 25 20 20 0 0.03 0 0.02 20 40 60 80 100 20 40 60 80 100 Overhang l (mm) Overhang l (mm) Graph (12) V = Up to 1000 mm/s; Up to 100 st CXSM CXSL Weight m (kg) 32 0.1 25 20 0 0.02 20 40 60 80 100 Overhang l (mm) 8-28-17 17 Dual Rod Cylinder: Compact Type Series CXSJ 6, 10, 15, 20, 25, 32 How to Order Piping Standard piping (6 to 32) Axial piping (6, 10) Nil Nil

energy saving effect

W: 13 [kW] W Efficiency Power supply output VI: 20 [kVA] Q = P = Q = P = V x I x Power factor In this example, using an efficiency of 0.7: In this example, using a power factor of 0.85: 13 0.7 = = 18.6 [kW] = 20 [kVA] x 0.85 = 17 [kW] Cooling capacity = Considering a safety factor of 20%, Cooling capacity = Considering a safety factor of 20%, 18.6 [kW] x 1.2 = 22.3 [kW] 17 [kW] x 1.2 = 20.4

MQQ

B C D H NTJ-010A NTJ-015A NT-02 NT-03 SNKJ-016B SNLJ-016B SN-020B SN-032B M12 x 1 M4 x 0.7 6, 10 17 6, 10 7 19.6 4 8.1 3.2 M14 x 1 M5 x 0.8 16 19 16 8 21.9 5 9.2 4 M20 x 1.5 M8 x 1.25 20 26 20 13 30 8 15 5 M26 x 1.5 M10 x 1.25 25 32 25 17 37 8 19.6 6 T-bracket 4-TC TH 7 +0.2 0 TU -0.1 -0.3 TN TK TX TV 12 TD H10 TT TY TW Part no.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body Material Aluminum Body Material Brass A A 2 x J 4 x J A A 2 x J 4 x J B C F B B C F B 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 C F C D E D E F D E D E Body Material: Aluminum [mm] Body Material: Brass [mm] Size Port size A B C D E F J 20 1/8, 1/4 11 36 6 34 46 1.5 5.3 30 1/4, 3/8 13 46 7 40 56 1.5 Size Port size A B C D E F J 20 1/8 52 24 9 36 64 1.5 6 20, 30 1/4, 3/8

MXH Series Compact Slide

6 21 17 2 1 19 5 18 8 10 20 6 21 16 2 1 19 5 18 10 8 3 24 13 9 7 22 14 4 11 15 12 3 24 13 23 22 7 4 11 MXH16, 20 (16, 20) 20 6 21 17 2 1 19 5 18 18 8 10 4 7 22 23 13 24 3 12 11 Parts list Parts list Description Material Note Description Material No.

Compact Guide Cylinder

13.5 13.5 15 25.5 27 9.5 9.5 11 29.5 31 25 11.5 14 16.5 26 28.5 7.5 10 12.5 30 32.5 32 12 13 15.5 25 27.5 8 9 11.5 29 31.5 40 15 20 20 32 32 11 16 16 36 36 50 14.5 21 21 33 33 10.5 17 17 37 37 The value of W in the table means the amount of auto switch protrusion from the body end surface.

MY1

20 1.

IZN10_C

IZ*-OMS0001 : : IZN10 IZN10 IZN10 IZN10 0120-837-838 9:00~1700~ -1- 1. 1. 1. 1. 3 3 3 3 2. 2. 2. 2. 5 5 5 5 3. 3. 3. 3. 6 6 6 6 4. 4. 4. 4. 4 4 4 4-1. 1. 1. 1. 7 7 7 7 4 4 4 4-2. 2. 2. 2. 10 10 10 10 4 4 4 4-3. 3. 3. 3. 16 16 16 16 4 4 4 4-4. 4. 4. 4. 17 17 17 17 4 4 4 4-5. 5. 5. 5. 17 17 17 17 5. 5. 5. 5. 18 18 18 18 6. 6. 6. 6. 20 20 20 20 7. 7. 7. 7. 7 7 7 7-1. 1. 1. 1. 21 21 21 21 7

PSE530/200

Auto shift function (P. 16-3-17) Allows stable switch output even when supply pressure changes.