Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction flow rate of vacuum suction type (Reference values) Bore size (mm) 10/15 20/25/32 6 Item 1.05MPa 0.7MPa Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid

Table of Contents - Tubing

L* N x 4 N x 8 N x 12 N x 6 N x 12 N x 18 N x 8 N x 16 N x 10 N x 20 N x 12 N x 24 D 18 28 28 24 37 37 31 42 52 52 67 67 TCU0425-1N-X6 TCU0425-2N-X6 TCU0425-3-N-X6 TCU0604-1-N-X6 TCU0604-2-N-X6 TCU0604-3-N-X6 TCU0805-1-N-X6 TCU0805-2-N-X6 TCU1065-1-N-X6 TCU1065-2-N-X6 TCU1208 -1-N-X6 TCU1208 -2-N-X6 LX5.9 + 200 LX4.4 + 200 LX2.9 + 200 LX5.3 + 200 LX3.8 + 200 LX2.5 + 200 LX5.2 + 200 LX3 +

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

OUT1 12 to 24 VDC 12 to 24 VDC Load Load Load White OUT2 White OUT2 Load Blue DC () Blue DC () -R: NPN (2 outputs) + Auto-shift input -S: NPN (2 outputs) + Auto-shift input -T: PNP (2 outputs) + Auto-shift input -V: PNP (2 outputs) + Auto-shift input Brown DC (+) Brown DC (+) Load Gray Auto-shift input Gray Auto-shift input Load + + Black OUT1 Black OUT1 12 to 24 VDC 12 to 24 VDC Load

Wedge Cam Operation Provides

Material MHK2-12 MHKL2-12 MHK2-16 MHKL2-16 MHK2-20 MHKL2-20 MHK2-25 MHKL2-25 !6 !7 !8 !

HRX-OM-X071

5.4.1 Screen configuration . 5-12 5.4.2 Main menu . 5-12 5.4.3 Alarm display menu . 5-14 5.4.4 Notice for maintenance Menu . 5-15 5.5 Advanced setting mode . 5-17 5.5.1 Switch to advanced setting mode . 5-17 5.5.2 Display contents of monitor menu . 5-17 5.5.3 Display contents of the standard setting menu . 5-19 5.5.4 Alarm setting menu . 5-33 5.5.5 Communication setting menu . 5-46 5.5.6

T

(mm) 6 8 10 12 2.5 I.D.

Speed Controller with

L4 Note) Weight (g) 3 5 5.5 6.5 8.5 9.5 19 22 36 38 42 44 76 82 Model D1 Applicable tube O.D. d AS1002F-02 AS1002F-23 AS1002F-04 AS1002F-06 AS2002F-04 AS2002F-06 AS2052F-06 AS2052F-08 AS3002F-06 AS3002F-08 AS3002F-10 AS3002F-12 AS4002F-10 AS4002F-12 D2 D3 D4 L1 L2 L3 L5 L6 L7 L8 M1 MIN. 18.4 21 21.7 22.7 25.4 26.5 28.2 29.5 33.6 34.4 36 37.1 44.1 45.1 6 8.4 9.3 11.6 9.3 11.6 12.8 15.2 13.2

MHL2

Refer to pages 12-15-3 to 12-15-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 12-1-4 to 12-1-6 for Precautions on every series. Warning If a workpiece is hooked onto the attachment, make sure that excessive impact will not be created at the start and the end of the movement.

NCQ8

Solid state switch Reed switch Yes 5 V A96V A96 Grommet A90V A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV A90 A93 M9N M9P M9B F9NW F9PW F9BW F9BA 100 V 5 V, 12 V 12 V IC circuit Relay, PLC No 2-wire 24 V Yes 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC circuit Grommet 12 V Relay, PLC Yes IC circuit Diagnostic indication (2-color display) 5 V, 12 V Grommet 12 V 2-wire

Smooth Cylinder Series CQSY

NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) Reed switch Solid state switch A96V A96 5 V IC Yes Yes Grommet A93 M9N M9P M9B F9N F9P F9B F9NW F9PW F9BW F9BA A93V F9NV F9PV F9BV F9NWV F9PWV F9BWV 100 V 24 V 12 V Relay, PLC 5 V, 12 V IC 12 V 5 V, 12 V IC Relay, PLC 24 V Grommet 12 V Diagnostic indication (2-color) 5 V, 12 V IC

Process Valve

(P1) 10 (P2) 12 (P1) Allowable voltage fluctuation SGC 50C or less (When rated voltage is applied.)

Title not found

) 144 12 (6) 15 Regeneration option type 032 12 Allowable regenerative power 30 W Allowable regenerative power 100 W Confirm regeneration option to be used in Model Selection. 5 168 156 Dimensions [mm] LA 30 40 LB 119 169 LC 99 149 LD 1.6 2 Model LEC-MR-RB-032 LEC-MR-RB-12 LD LC 6 6 (20) LB 63 Incremental Type Series LECSA Absolute Type Series LECSB Servo Motor (24 VDC)/Step Motor (Servo/

HRX-OM-T004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

F

Japanese N ...North American No Of Needle Revolutions 10 Turns / 8 Turns (AS1001F) Applicable Tube Material Nylon, Soft Nylon, Polyurethane A P P L I C A B L E T U B E OD B O D Y S I Z E mm 23 32 04 4 06 6 08 8 10 10 12 12 Inch 01 1/8 03 5/32 05 3/16 07 1/4 09 5/16 11 3/8 13 1/2 100 ...M5 (04, 06) 200 ...1/8 (04, 06) 205 ...1/4 (06, 08) 300 ...3/8 (06, 08, 10, 12) 400 ...1/2 (10, 12) W I

Low Profile Guide Type

V CY1H 12 V Solid state auto switch Reed auto switch Yes IC circuit CY1F CY1F 5 V, 12 V Relay, PLC Diagnostic indication (2-color indicator) Grommet 24 V 12 V CYP IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V IC circuit 3-wire (NPN equivalent) A96V A96 5 V 12 V Yes 24 V Grommet Relay, PLC A93V2 A93 A90 100 V 2-wire A90V IC circuit No 100

High Vacuum Angle Valve, XL Series

XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve

IDX-OM-W011

R 12 R IDF4E/6E/8E/11E/15E1 12-1 12-2 1 AC100V AC200V INOUT IDF4E/6E/8E/11E/15E1-10-R IDF15E1-20-R IDF4E/6E/8E/11E-20-R (A) 10 5 (mA) 30 12-3 M5 9.5mm 2 1.25mm L ,N N L () () IDF Series 12-1 12 1 IDX-OM-W011 12 R AC100V M4 () AC200V (M3) 12-4 () () ONOFF 12-5 1-1 IDF Series 12-4 12 2 IDX-OM-W011 13.S 13 S 13-1 IDF1E15E1-10 IDF Series 13-1 13-1 IDX-OM-W011

VEX1

AMC Caution This valve is not a non-leak specification, and thus cannot be used for a long term intermediate stops or emergency stops. 5.1-12 VEX3 How to Order Electrical entry (Only solenoids) Body size Port size Symbol Body size Electrical entry Port size Port R port P, A port 01 02 02 03 04 04 06 10 10 12 14 20 Body size G Grommet, 300mm lead wire H Grommet, 600mm lead wire L plug connector

E-P HYREG

sub-plate ITVH 02 14 03 38 04 12 4 ITVX A M5 M5 (3) (3) 1 01 18 (3) (3) 02 14 PVQ 3 02 14 03 38 04 12 VY1 VY1 VBA VBAT Body ported 5 04 12 VY1B0-X39 (5) 06 34 10 1 AP100 7 10 1 1 14 12 1 14 9 14 1 12 2 20 2 Note 3) Only bracket or foot may be mounted.

HRX-OM-R028

PV SV 12. Select contact input signal 2 from the table below with [] key or [] key, and confirm by pressing SEL.