25

Frequency (Hz), Remote controller IZS40 IZS41 IZS42 Remote controller Remote controller 0 1 2 3 4 5 6 7 8 9 1 3 1 0.1 5 3 0.5 8 5 1 10 10 3 15 15 5 20 20 10 30 30 15 DC+ DC+ 20 DC DC 30 Set when remote controller is used. 429 IZS40/41/42 Series Wiring Circuit/IZS41, 42 NPN specification Shield Ionizer (IZS41, 42) Green F.G. Ground with a ground resistance of 100 or less.

Bernoulli Gripper

ZNC20 Aluminum 1 to 1.5 ZNC20P Resin 0.5 to 1 3.7 ZNC20S Stainless steel 1 to 1.5 ZNC(30, 40, 60) Aluminum M5 x 0.8 1 to 1.5 ZNC(30, 40, 60)P Resin 0.5 to 1 ZNC(30, 40, 60)S Stainless steel 1 to 1.5 ZNC80 Aluminum 4 7 ZNC80P Resin 3 ZNC80S Stainless steel 7 R1/8 Workpiece size Bernoulli gripper size Workpiece size Bernoulli gripper size 15 ZNC Series Specific Product Precautions 2 Be sure

Rotary Table

190 39 68 43 10 or less 43 72 29 5 or less 50 190 49 83 33 10 or less 53 87 22 5 or less 70 190 54 95 30 10 or less 58 99 21 5 or less 100 190 61 108 27 10 or less 65 112 18 5 or less 200 190 81 139 21 10 or less 85 143 15 5 or less Operating range m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

RLQ

For detailed specifications, refer to page 9-15-1.

Series CQ2

There may be large variations depending on the surrounding environment (variations as much as 30%).

Digital Flow Switches

50 20 40 Pressure loss (kPa) Pressure loss (kPa) 15 30 10 20 5 10 Flow rate (l/min) 0 200 0 50 100 150200250 300 400 350 450 500 20 50 100 150 Flow rate (l/min) Sensor Unit Construction PF2A710/750 PF2A510/550 Parts list No. 1 2 3 4 5 Description Attachment Seal Mesh Body Sensor Material ADC NBR Stainless steel PBT PBT Flow direction PF2A711/721/751 PF2A511/521/551 Parts list Material ADC

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Nominal size Item 15, 20, 30 10 0.2 to 0.6 MPa 0 to 60C 0.15 to 0.6 MPa Operating pressure Ambient and fluid temperature Size Suction flow rate L/min (ANR) 10/15 20/30 0.01 mm 180 c.p.m. 1 2 Repeatability Maximum operating frequency 11-: Fluorine grease 22-: Lithium soap based grease 11-/22-: Class 3 Grease Cleanliness

Safety Instructions

Connecting Female Thread: G Approx. spanner tightening angle after tightened by hand deg Standard torque (Nm) Nominal size of uni thread 1 8 1 4 3 8 1 2 30 to 45 15 to 30 15 to 30 15 to 30 3 to 4 4 to 5 8 to 9 14 to 15 2. Gasket can be recycled 6 to 10 times. It can be replaced easily when it has sustained damage.

MGF

Example) In case an MGF63-15 specification is required, a spacer of 15mm is installed in the MGF63-30. Therefore, the total length is same as that of 30mm stroke. MGF 40 MGF 63 30, 50, 75, 100 MGF100 Minimum Strokes for Mounting Auto Switches (mm) Switch type D-Z7, D-Z8 D-Y5, D-Y6, D-Y7 Number of pcs. 10 5 1 pc. 15 10 2 pcs.

MHC2

MHZ MHC2/MHCA2/MHCM2 MHF MHL F MHR L MHK MHS F MHC MHC2-6D/MHCA2-6D MHC2-6S/MHCA2-6S MHCM2-7S MHT Pressure 0.6MPa 4 4 2 MHY Pressure 0.6MPa 0.5 Pressure 0.6MPa MHW Gripping force N Gripping force N Gripping force N 3 3 0.4 MRHQ 0.5 0.5 Misc. 2 2 1 0.3 0.4 0.4 D0.2 1 1 0.3 200 30 20 10 0 30 20 10 0 30 20 10 Gripping point L mm Gripping point L mm Gripping point L mm 12-8-11 12 Series MHC2/

MHC2

20 10 0 30 20 10 0 30 20 10 Gripping point L mm Gripping point L mm Gripping point L mm 12-8-11 12 Series MHC2/MHCA2/MHCM2 Confirmation of Inertial Moment of Attachment Step 2 Confirm the inertial moment of one of the two attachments.

Pin Clamp Cylinder Series CKQ/CLKQ

For more information, refer to page 15.

CEx-OMQ0011

P1 No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 59 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

Series KP/KPQ/KPG

Refer to "Installation and Removal of Tubing" on page 15.)

Series KP/KPQ/KPG

Refer to "Installation and Removal of Tubing" on page 15.)

KP/KPQ/KPG

Refer to "Installation and Removal of Tubing" on page 15.)

Process Pump

Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

BP1000

40 V15 V3 L 1 H V2 2 4 10 30 40 -30 in.Hg to 15 psig -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig -30 in.Hg to 200 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 3000 psig 0 to 4000 psig -0.1 to 0.1 MPa -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa -0.1 to 1.4 MPa 0 to 1.5 MPa 0 to 3 MPa 0 to 7 MPa 0 to 21 MPa 0 to 28 MPa 00

Precision Cylinder Series MTS

N Backlash Manual unlocking Theoretical Output 12 16 20 40 Rear end only 125 211 29 53 82 329 1mm Non-locking type only Standard Strokes (N) Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm) Bore size (mm) Standard stroke (mm) 0.2 10 8 23 17 40 30 63 47 98 72 161 121 251 188 0.4 20 15 45 34 80 60 126 94 196 143 322 241 502 377 0.3 15 11 34 25 60 45 94 71 147 107

MLGC

(22.5) 17.5 (25.5) 19.5 (27.5) 20 6 9 3 8 10 6.5 4.5 24.5 27 27.5 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 18 (26) 16 (24) 25 6 9 3 8 10 6.5 4.5 27 29.5 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 19 (27) 17 (25) 32 7 10 4 9 11 7.5 5.5 30.5 33 33.5 25 (34) 24 (33) 20 (27) 21 (30) 23 (32) 21.5 (30.5) 19.5 (28.5) 40 35 37.5 38 8.5 12 10 15.5 14.5 11.5 13.5