DOC1020530

PA02] 0 0 Select a regenerative option. 00: Regenerative option is not used. 00: 100 W 0.2 kW 7 kW 11 kW 22 kW 01: FR-BU2FR-RC FR-CV 02: MR-RB032 03: MR-RB12 04: MR-RB32 05: MR-RB30 06: MR-RB50 () 08: MR-RB31 09: MR-RB51 () 0B: MR-RB3N 0C: MR-RB5N ( ) FA: 11 kW 22 kW UP For drivers of LECSN-T5, do not use a regenerative resistor.

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

Example) ARP30K-03BE-1RY Symbol 20 30 40 Body size Description Nil K Without backflow function With backflow function With backflow function + Nil N F Rc NPT G Thread type + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) a Without mounting option With bracket With set nut (For panel mount) Mounting H + Note 1) Nil E G E1 Note 3) Without pressure gauge Square embedded type pressure

Plate Cylinder with Lock Series MLU

. +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 9 11 13 16 142.5 150.5 8 10 10 14 9 11 13 16 0.2 0.4 0.2 0.4 0.2 0.4 0.2 0.4 159 169 CD-MU03 171 181 CD-MU04 205.5 221.5 CD-MU05 Single clevis (Double clevis bracket) Double clevis (Single clevis bracket) DX -01 -03 CX -02 -04 DY+0.4 +0.2 R (CJ) R (DJ) CDH10 DDH10 2-DT 2-CT 2-DR DZ 2-CR CZ DH CH DI CI DE

Modular Type Lubricator Series AL

02 03 04 06 10 Accessory When more than one specification is required, indicate in alphanumeric order.

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

Port size Body size Thread size Port thread Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

AR20-B to AR60-B

Nq Body size 20 25 30 40 50 60 Symbol Description Nw With backflow function Nil Without backflow function K*1 With backflow function + Ne Pipe thread type Nil Rc N NPT F G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Nr Port size a Mounting Nil Without mounting option B*3 With bracket H With set nut (for panel mount) + Nil Without pressure gauge E Square embedded type pressure gauge (with

Vacuum Pad with Ejector

This phenomenon occurs earlier if pushing or the high vacuum pressure is used. 27 - Revision history Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2016 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 28 -

Compact 5-Port Solenoid Valve

Serial transmission 07 7 stations 02 2 stations Specified layout2 03 3 stations 02 2 stations Specified layout2 Refer to the pages shown in the table above for details. (Up to 14 solenoids available) (Up to 6 solenoids available) 14 14 stations 06 6 stations 1 Double wiring: 2-position single, double, 3-position, and 4-position valves can be used on all manifold stations.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

Cylinder

Tel :03-3502-2740 Fax:03-5251-7240 August 1996, 14(RP)

AME

size 01 B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.

AMF

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Made to Order Specifications (For details, refer to page 14-20-55.) 01 B 06 B 1 8 3 4 1B 02 03 10 14 B 1 4 B 3 8 04 B 1 2 Note) Refer to How to Order Bowl Assembly on page 14-20-59. 1 B 1 2 20 2B Caution Accessory/Option Combinations Available Not available Depends on model Be sure to read before handling.

AMH

available Depends on model Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Accessory Option specifications C C D -J -R D J T AMH150 R AMH250 AMH350 AMH450 Applicable model Accessory (Option) AMH550 AMH650 AMH850 Port size N.C. auto-drain N.O. auto-drain Drain guide 01

Auto Switch Guide

CDV3, CDVS CE2, CNA CDL1 CDS1 MDB, MDBB DBT -04 BT -04 BT -06 BT -08 BT -08 BT -12 BT -12 BT -16 -X BT -18A BT -20 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

Auto Switch Guide

CDV3, CDVS CE2, CNA CDL1 CDS1 MDB, MDBB BT -04 BT -04 BT -06 BT -08 BT -08 BT -12 BT -12 BT -16 BT -18A BT -20 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

Auto Switch Guide

CDV3, CDVS CE2, CNA CDL1 CDS1 MDB, MDBB BT -04 BT -04 BT -06 BT -08 BT -08 BT -12 BT -12 BT -16 BT -18A BT -20 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

Auto Switch Guide

CDV3, CDVS CE2, CNA CDL1 CDS1 MDB, MDBB BT -04 BT -04 BT -06 BT -08 BT -08 BT -12 BT -12 BT -16 BT -18A BT -20 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

MLU

. +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 9 11 13 16 0.2 0.4 0.2 0.4 0.2 0.4 0.2 0.4 142.5 150.5 8 10 10 14 9 11 13 16 159 169 CD-MU03 171 181 CD-MU04 205.5 221.5 CD-MU05 Single clevis (Double clevis bracket) Double clevis (Single clevis bracket) DX -01 -03 CX -02 -04 DY+0.4 +0.2 R (CJ) R (DJ) CDH10 DDH10 2-DT 2-CT DZ 2-DR CZ 2-CR DH CH DI CI DE

Auto Switch Guide

CDV3, CDVS CE2, CNA CDL1 CDS1 MDB, MDBB BT -04 BT -04 BT -06 BT -08 BT -08 BT -12 BT -12 BT -16 BT -18A BT -20 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.