XM, XY

150 H J K M XYC-50 XYC-63 XYC-80 178 209 268 29 36 44 10.5 9 9 78 99 116 487 Stainless steel High Vacuum Angle/In-line Valve 2 Stage Control, Single Acting/Bellows, O-ring Seal XMD, XYD Series PAT.

Stability of suction position,

ZP3EA-S2 [Weight: 7.6 g] 24 47 15 29 4 20 36 Applicable pad part no. ZP3E-63UM ZP3E-80UM ZP3E-100UM ZP3E-125UM ZP3E-63BM ZP3E-80BM ZP3E-100BM ZP3E-125BM Applicable pad part no.

MQQ

12 10 28 22 18 36 12 10 10-5-15 15 Series MQQ Accessory Bracket Dimensions Rod end thread adapter Rod end nut d NN rod MM D C C B H E F A B H Applicable bore (mm) Applicable bore (mm) Part no.

MVGQ

x 0.8 M5 x 0.8 Series SYJ3000 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 20 30 M5 x 0.8 M5 x 0.8 M5 x 0.8 10 36 64 17 26 74 47 30 72 2 4 46 52 18 8 13 37 10 60 19 13 MVGQ Note 1) It is possible to manufacture the intermediate strokes other than the standard strokes by means of installing a spacer.

SI unit ( device)

Device Status parameter (index 36) For Device status, the following Device conditions are specified.

EXxx-OMY0006CN

EX245-DY1 EX245-DY1 36 No.EX##-OMY0006CN 8.2.2.4.

PFxx-OMU0002

Hysteresis mode is selected: Refer to page 35 Window comparator mode is selected: Refer to page 36 Accumulated output mode is selected: Refer to page 37 Accumulated pulse output mode is selected: Refer to page 39 Move on to select display colour.

Digital Flow Switch (Integrated display type)

Nominal thread size Required torque Rc(NPT)1 36 to 38 Nm Rc(NPT)11/2 Rc(NPT)2 48 to 50 Nm Model Width across flats of attachment PF2A703H 55 mm PF2A706H 65 mm PF2A712H 75 mm -15No.PF-OMG0010-H Wiring Connections should only be made with the power supply turned off. Use separate routes for the product wiring and any power or high voltage wiring.

Digital Flow Switch (Remote type monitor unit)

Setting of switch operation 2_P/2_N (Page 36) 3. Input of set values P2dH P2AH n2AH P2AL n2AL Setting of P2L/n2L P2H/n2H Setting of tnL/tPL Setting of P_2/n_2 Setting of tn/tP n2dH P2dL n2dL tnH/tPH H_2 H_t H2 Ht (Page 37) (Page 39) (Page 37) (Page 39) (Page 38) 4. Completed [F 2] Setting of OUT2 is completed. -35No.PF-OMN0012-H 1.

LV50-OMQ0002

Nominal thread size Appropriate tightening torque Rc(NPT)3/8 22 to 24 Nm Rc(NPT)1/2 28 to 30 Nm Rc(NPT)3/4 28 to 30 Nm Rc(NPT)1 36 to 38 Nm If the tightening torque is exceeded, the product can be damaged. If the tightening torque is insufficient, the mounting screws and brackets may become loose. The product body is made of resin.

LFE-OMY0008

[F 2] OUT2 36 No.LFE*-OMY0008 1. 1. 1. 1. [F 2] [oUt2] OUT2 [-] 2. 2. 2. 2. (ON-OFF ) 37 No.LFE*-OMY0008 3. 3. 3. 3. a. ([n_2]) 4. 4. 4. 4. [F 2] OUT2 b. ([n2L]) [P2H] or [n2H] ([n2H]) 4. 4. 4. 4. [F 2] OUT2 38 No.LFE*-OMY0008 c. / Add/dEC OUT1 (31 ) ( [n2AH]) ( [n2dH]) c.(32 ) 4. 4. 4. 4.

LFE-OMZ0011

Nominal thread size Appropriate tightening torque Rc(NPT)3/8 22 to 24 Nm Rc(NPT)1/2 28 to 30 Nm Rc(NPT)3/4 28 to 30 Nm Rc(NPT)1 36 to 38 Nm If the tightening torque is exceeded, the product can be damaged. If the tightening torque is insufficient, the piping may become loose. The product body is made of resin.

IP8001 Series

Explosion Protected Construction Rate The 52-IP8001 model is compliant with the ATEX Directive 2014/34/EU, Intrinsically Safe type of Construction, to1G Ex iaC T4-T6 Ga classification, T4/T5 -20Ta80 T6 -20Ta 60 according to EN 60079-0:2012+A11:2013,EN 60079-11:2012 AND EN ISO 80079-36:2016.

IP8101 Series

Explosion Protected Construction Rate The 52-IP8101 model is compliant with the ATEX Directive 2014/34/EU, Intrinsically Safe type of Construction, to1G Ex iaC T4-T6 Ga classification, T4/T5 -20Ta80 T6 -20Ta 60 according to EN 60079-0:2012+A11:2013,EN 60079-11:2012 AND EN ISO 80079-36:2016.

CEx-OMQ0011

OUTPUT 35 9-3-5. 36 10 3744 11 11-1. 11-1-1. 45 11-1-2. 4548 11-1-3. 48 11-2. 11-2-1. 4952 11-2-2. 53 11-3. 11-3-1. 53 12 12-1. 54 12-2. 54 13 13-1. 5557 13-2. () 5758 14 14-1. 5960 - 1 1 1 1 (ISO/IEC)(JIS) 1) 2) *1) ISO 4414:Pneumatic fluid powerGeneral rules relating to systems ISO 10218-1:2006Robots for industrial environments-Safety requirements-part1

Cylinder with lock

Removal of seals P.36 4-4-3. Grease P.37 4-4-4. Mounting of seals P.38 5. Troubleshooting P.39 6. Construction P.41 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Rotary Actuator Ｃ ( Ｄ ) ＲＡ１＊＊＊３０～１００－＊＊Ｚ

the cushion valve. 100 0.54 2.90 0.2 to 5 Table (3) Mass (Kg) Standard mass Additional mass Size With auto switches Foot bracket Flange 90 180 30 0.27 0.36 0.1 0.1 bracket 50 1.3 1.5 0.2 0.3 0.5 63 2.2 2.6 0.4 0.5 0.9 80 3.9 4.4 0.6 0.9 1.5 With 2 auto switches 100 7.3 8.3 0.9 1.2 2.0 16 - Table (4) Rotary actuator inner volume (cm3) Rotation angle Size 30 7.4 14 90 100 180 190 50 32 36

Compact Rotary Actuator

48.5 40 52.5 20 56 4 180 42 67.5 46 71.5 41 9 360 55.5 106 59.5 110 90 43 59 47 63 30 43 3 180 51 82 55 86 32 7 360 62 125.5 66 129.5 90 50 69 54 73 40 36 4 180 59.5 97.5 63.5 101.5 24 5 360 72.5 152 76.5 156 Operation angle The value in which the auto switch operating range Lm is converted to axis rotating value Hysteresis angle Value in which the auto switch hysteresis is converted to

Low-Speed Rotary Actuator

42 67.5 46 71.5 30 90 43 59 32 7 47 63 43 3 180 51 82 55 86 40 90 50 69 24 5 54 73 36 4 180 59.5 97.5 63.5 101.5 Operating range m: The value in which the auto switch operating range Lm is converted to axis rotating value.

DOC1023126

(see P.36 Fig.2-1 and Fig.2-2 for circuit example) If the C24V is shut off when stopped, the operation will start when IN0 or IN1 turns ON after the stop is released. For closed center mode It operates according to the state of the IN0 and IN1 signals. If you do not restart the operation after releasing the stop, release the stop while both IN0 and IN1 are OFF.