Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 07 (One-touch Fitting ø1/4"), VAC: 07 (One-touch Fitting ø1/4"), EXH: 09 (One-touch Fitting ø5/16")

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: S (-90 kPa), SUP: 07 (One-touch Fitting ø1/4"), VAC: 07 (One-touch Fitting ø1/4"), EXH: 09 (One-touch Fitting ø5/16"), Accessories: S (w/Standard Bracket, w/Silencer)

Nozzle Diameter: 07 (0.7mm), Vacuum Pressure: S (-85 kPa For ZU03 /-87 kPa for ZU04; -90 kPa:For ZU05/07)

Nozzle Diameter: 07 (0.7mm), Vacuum Pressure: S (-85 kPa For ZU03 /-87 kPa for ZU04; -90 kPa:For ZU05/07), Port Size: 01 (Rc1/8, Female Thread)

Size: 3 (1/8 Basis), Tube Size: 07 (Ø1/4"), Exhaust Port: 07 (Ø1/4")

Size: 2 (M5 Basis), Tube Size: 07 (Ø1/4"), Exhaust Port: 07 (Ø1/4")

Air Preparation Equipment

Number of arranged elements 4 7 9 18 22 Symbol Number of arranged elements 29 34 37 53 83 04 07 09 18 22 29 34 37 53 83 Symbol Nominal filtration accuracy (m) Note) Nominal filtration accuracy (m) 0.5 1 2 5 10 20 40 Symbol Nominal filtration accuracy (m) 50 70 74 75 100 105 120 X50 001 002 005 010 020 040 050 070 074 075 100 105 120 Symbol Element length Element length L250 L500 (L250 x 2

Miniature Regulator Series ARJ310

One-touch fitting ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 Note) M5 x 0.8 female thread is cut inside the pipe.

Clean Room Regulator/Fluoro Resin Type Series SRF30

(inch size) 11 3/8 SRF30T 11 Tubing SRF30S 07 Integral fittings Pilot port thread type Applicable tube size Inch size (Tubing size regulator port) Metric size (Tubing size regulator port) Nil N Rc1/8 NPT1/8 07 11 1/4 x 5/32 (with plug-in reducer) 3/8 x 1/4 (standard size) 6 x 4 (with plug-in reducer) 8 x 6 (with plug-in reducer) 10 x 8 (standard size) 06 08 10 Note)The reducer method allows

Ejector Valve Unit, Series ZYY/ZYX

5V, 3VDC/100V, 110V, 200V, 220VAC Nil 1 None With silencer Lead wire length 300mm Lead wire length 600mm With lead wires (length 300mm) Without lead wires Without connector With lead wires (length 300mm) Without lead wires Without connector G H L LN LO M MN MO Grommet L type plug connector Max. vacuum pressure -84kPa {-630mmHg} -53kPa {-400mmHg} S L M type plug connector Nozzle diameter 07

OML0002-C

How to Order IZN10 01 P 06 Z B1 IZN10 High frequency AC nozzle type Series name Nozzle shape NIL 01 02 11 Piping female Note 1) Rc1/8 Type Energy saving charge elimination nozzle Large flow nozzle Output specification NIL NPN P PNP Piping diameter 06 f6: metric 07 f6.351/4"): inch 16 f6: metric (elbow) 17 f6.351/4"): inch (elbow) Power supply cable NIL 3m Z 10m N Not provided Bracket NIL

S Couplers

/O.D. mm Symbol Symbol Symbol 01 02 03 04 N01 N02 N03 N04 07 09 11 13 06 08 10 12 07 09 11 13 6 8 10 12 1/4" 5/16" 3/8" 1/2" R, Rc1/8 R, Rc1/4 R, Rc3/8 R, Rc1/2 NPT1/8 NPT1/4 NPT3/8 NPT1/2 50 60 65 80 85 110 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Metric size The figures in ( ) indicate the internal diameter of the applicable hose.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 3.2 4 6 8 16 16 18 20.5 31.5 32 35 39 1/8" 5/32" 1/4" 5/16" 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 5 6 8.5 10 Port plug VVQ0-58A The plug is used to block the cylinder port.

Miniature Regulator

operating pressure Regulating pressure range Rc 1/8, NPT 1/8 (Female thread) Air 1.2 MPa 0.8 MPa Standard: 0.2 to 0.7 MPa, Low pressure use (0.2 MPa setting): 0.05 to 0.2 MPa 5 to 60C (No freezing) Relieving type 0.065 Ambient and operating temperature range Construction Weight (kg) Model Port size IN Model OUT ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 3.2 4 6 8 16 16 18 20.5 31.5 32 35 39 1/8" 5/32" 1/4" 5/16" 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 5 6 8.5 10 Port plug VVQ0-58A The plug is used to block the cylinder port.

0.4

KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 3.2 4 6 8 16 16 18 20.5 31.5 32 35 39 1/8" 5/32" 1/4" 5/16" 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 5 6 8.5 10 Port plug VVQ0-58A The plug is used to block the cylinder port.

0.4

VF KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 16 18 20.5 22 16 18 20.5 22 32 35 39 43 32 35 39 43 6 8 10 12 6 8.5 10 11.5 VP4 VQ 1/2 VQ 4/5 Port plug VVQ1000-58A VQC 1/2 VQC 1/2 The plug is used to block the cylinder port.

Ejector Valve Unit Series ZYY/ZYX

Note 1) Note 2) Max. vacuum pressure Manual override S L 84 kPa 53 kPa Nil D E Non-locking push type Push-turn locking slotted type Push-turn locking lever type Nozzle diameter 07 10 0.7 mm 1.0 mm 1082 Ejector Valve Unit Series ZYY/ZYX How to Order Ejector Valves for ZYX3000 ZA Lead wire/ Voltage suppressor specifications ZX Plug-in type Serial transmission type LOZ ZR LOZ 10 X3 ZY 5 M Z

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

30.1 45.0 072.5 5.0 67.3 36.3 12 0.9 39.0 128 RB1412 83.5 36.1 70.5 108.0 6.0 73.2 36.2 15 0.9 43.0 178 RB2015 Shock absorber for high load + Adjusting bolt MY3B Bore size Stroke H (Shock absorber stroke) T S EY EC SD E W FC TU Stroke adjusting unit h TT (mm) E EC FC h S SD T TT TU W Shock absorber model EY Applicable cylinder MY3B16 MY3B25 MY3B40 MY3B63 29.5 14.1 23.0 034.5 2.4 46.7 07

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Actuator replacements for VM100, VM200, VM400 and VM800, Roller levers, plungers, toggle levers, rod levers, push buttons and twist selectors, 2/3 PORT MECHANICAL VALVE, MECHANICAL VALVE, I98, 12 lb