3 Port Solenoid Valve/

1 xed orice 15 1.5 xed orice 20 2 xed orice Nil Rc F G N NPT 5 VP500 7 VP700 Body 2 Body ported 4 Base mounted VP700 only Note) X536 only body ported (option2).

Smooth Cylinder Series CQSY

5.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note 1) Threaded through hole is used for the standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm stroke. 3

Electro-Pneumatic Positioner Series IP8000/8100

Size M Size N Unit number Pilot unit part number Part number Orifice size Stroke 10 to 85mm (Accessory Nil) Actuator Capacity 90cm3 P368010-20 125 150 P565010-18 P36801080 0.7 35 to 100mm (Accessory E) 180cm3 P368010-21 110 195 P565010-19 P36801081 1 50 to 140mm (Accessory F) P368010-22 110 275 Fork lever joints (IP8100 type) Two types of the fork lever joints are available dependent upon

CEx-OMQ0013

G C D () T J 50 50mm K 63 63mm 80 80mm N 100 100mm R H Z mm mm mm 40 25~850 25~700 1200 950 50 25~800 25~650 1150 900 63 25~800 25~650 1150 900 80 25~750 25~600 1100 900 100 25~750 25~600 1100 850 4-2 CEU2 NPN P PNP 15 4-3 CE1-R 5 5m 10 10m C 15 15m 20 20m A B CD E F G () 16 5. 5-1 17 18 5-2 19 5-3 20 6. 6-1 1 3 4 7 5 2 6 8 9 10 11 6-2 1 11 10 9 2 3 4 5 6 7 8

VQ

Wire color Black Brown Red Orange Yellow Pink Blue Violet Gray White White Yellow Orange Yellow Pink Blue Violet Gray Orange Red Dot marking VQ 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 4 1 5 10 VQZ 16 11 20 17 VZ Multi-connector pin arrangement DIN rail mounting bracket VS White Black Black Red Red Red Black Black White Pin No. 1 SOL. 1 station SOL. 2 stations 2 SOL. 3 stations

VCA

Valve type Thread type (for single unit only) Rc G NPT NPTF Nil F N T OUT(2) 1 IN(1) Port size Fluid Symbol 02 03 04 06 Class 3 Class 2 Port size 1/4 (8A) 3/8(10A) 1/2(15A) 3/4(20A) Class 4 General air Dry air Nil A Voltage 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Orifice size Orifice size (mm) 3 4 5 7 10 Class 3 Class 2 Class 4 Symbol 3 4 5 7 10 Please consult

Compact

400 400 400 m LEM LEM 200 200 200 200 LEY 0 0 0 5 10 15 20 0 0 5 10 15 20 0 0 2 4 6 8 10 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Horizontal/Bottom mounting LES 500 500 500 500 LEPY LEPS 400 400 400 400 L2 L2 [mm] L2 [mm] L2 [mm] L2 [mm] 300 300 300 300 LER m Y 200 200 200 200 LEH 100 100 100 100 0 0 5 10 15 20 0 0 2 4 6 8 10 0 0 5 10 15 20 0 0 2 4 6 8 10

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

)1/4, 1/8 3-Rc(PT)1/4, 1/8 (P, A, B port) 25.5 41 47.6 54 60 [66.5] 57.1 20 57.1 12 20 11.5 11.5 12 10 10 22 22 63 22 22 63 18 18 (R1, R2 port) 2-Rc(PT)1/4 (R1, R2 port) 2-Rc(PT)1/4 [ ] for AC Other dimensions are the same as the grommet style

AMF

R 88 S 3.2 Related poroducts 36 9 205 19 100 106 3 106 10 1 2 3 4 , AMF450 1 212 22 107 106 3 106 10 36 221 21 10 14 9 90 55 110 50 88 3.2 , , , 1 1 3 4 44 66 96 257 314 406 30 40 30 10 15 15 16 20 24 9 11 13 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 4.5 4.5 6 239 291 403 22 32 42 128 167 235 122 160 220 3 122 160 220 10 10 10 AMF550 AMF650 AMF850 1 2 1 2 1 2 1 AMF450SAME,

Process Pump

The result is approximately 10 L/min (ANR). Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

/8 1/4 H 41 45 45 50 H1 5 6 6 8 20 0 0.033 0 0.033 0 0.033 0 0.039 20 26 26 32 M10 X 1.25 25 M10 X 1.25 M14 X 1.5 32 40 Boss-cut Dimensions for Other Mounting Brackets Bore ZZ 106 110 112 141 Add 3mm to each ZZ dimension of the standard style (double acting/single rod) on p.1.4-10 to 1.4-18. 20 Auto Switch Position Basic Low friction 25 CM2QB20SCM220A, #1 CM2QB25SCM225A, #1 CM2QB32SCM232A

Compact Guide Cylinder

50 mm stroke, V = 200 mm/s or less 100 100 50 50 40 40 32 32 10 10 Load mass m [kg] Load mass m [kg] 25 25 20 20 16 16 12 1 1 12 0.1 0.1 10 100 10 100 Eccentric distance L [mm] Eccentric distance L [mm] 50 mm stroke or less, V = 400 mm/s Over 50 mm stroke, V = 400 mm/s 100 100 10 10 50 50 Load mass m [kg] Load mass m [kg] 40 40 32 32 25 25 1 1 20 20 16 16 12 12 0.1 10 100 0.1 10 100 Eccentric

Ozone Resistant

40 30 20 10 0 Initial value Measuring point 6 4.

Air preparation filter

Piping port size Applicable body size Symbol Port size 70 80 90 10 1 14 1 1/2 20 2 -14- Doc. no. AMX-OMU0058-C 5. Component name and spare parts list Component parts No.

KJ

17.5 2.5 24.5 25.5 13.7 14.29 7 18 2.7 8 9 18 5 10 19 3.2 10 20 32 12 20 28 16 23 33 59 28 36 62 10-32 UNF 12.7 2.3 15.4 23 9.3 15.6 Applicable tubing 1 16 22 11.11 5 32 16 10.4 10 18 3 1 8 1 4 25 26 20 22.5 26.5 15.1 23.5 27.5 29.5 24.5 28.5 30.5 26.5 29.5 31.5 35.5 31.5 33.5 37.5 14.29 10-32 UNF 10-32 UNF 22 2.3 11.11 24 11.4 10 19.5 1 8 1 4 16.5 3

Series 10-, 21- AF-A Air Filter

Clean series 10 AF 03 A 30 F J B 21 AF 03 A 30 F J B Copper, fluorine and silicone-free + Low particle generation q w e r t Air filter Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

Series LX Acceleration Time Guide

F A A Lr Lr = 150mm L X F 60 Table displacement (m) Table displacement (m) Table displacement (m) 10 40 LXFH-100 50 LXFH-100 8 LXFH-100 40 30 LXFH-75 LXFH-75 6 30 20 LXFH-50 LXFH-50 LXFH-75 4 20 LXFH-25 LXFH-25 10 LXFH-50 2 10 LXFH-25 0 Weight (kg) 0 Weight (kg) 0 Weight (kg) 0.5 1 1.5 2 2.5 3 0.5 1 1.5 2 2.5 3 0.5 1 1.5 2 2.5 3 Displacement at the section indicated by the arrow when a load

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

width across flats 24 SP 25 G Width across flats 37 45 45 ZCUK 4 x M4 x 0.7 4 x M4 x 0.7 E 10 10 AMJ G Width across flats 37 F F E AMV Y Y AEP 8 8 34 34 HEP C C A A Related B D B D Equipment Dimensions A Dimensions A B C D E F G Y Model B C D E F G Y Model ZPT63HB-A16 ZPT63HB-B 8 63 65 46 68 31.5 43 73 21.5 M8 x 1.25 ZPT80HB-A16 -B10 80 83 58 85 37 48.5 78.5 27.5 M10 x 1.5 63 65 46 68 31.5

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

x 3 x 60 = 2736g/h. 6 7 8 3 1 2 3 4 5 Dew point conversion chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric pressure dew point C 8

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

(F: Thrust of one finger) 50 50 Pressure 0.6MPa MHS Pressure 0.6MPa 40 40 Holding force (N) 0.5MPa 0.5MPa Holding force (N) 30 30 0.4MPa 0.4MPa MHC2 0.3MPa 0.3MPa 20 20 MHT2 0.2MPa 0.2MPa 10 10 MHY2 0 10 20 30 40 50 0 10 20 30 40 50 60 70 60 70 MHW2 Holding point L (mm) Holding point L (mm) MRHQ MHR2-30/MDHR2-30 MHR2-30/MDHR2-30 F F Auto switch 80 80 Pressure 0.6MPa 0.6MPa Pressure 70 70