Rotary Actuator/Vane Type

Weight [g] Vane type Single vane Double vane Size 10 15 20 30 40 10 15 20 30 40 Rotating angle 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 100 90 100 Rotary actuator body 42 42 42 64 63 62 130 129 127 248 243 238 465 454 443 58 59 71 74 145 168 268 288 478 524 Auto switch unit 15 20 28 38 43 15 20 28 38 43 Angle adjuster unit 30 47 90 150 203 30 47 90 150

CNA

70 27 1/4 37 to 39.5 51 153 37.5 9 8 27 13 24 244 M14 x 1.5 9 45 222 3.2 50 80 30 3/8 42 to 44.5 58 168 44 11 0 27 13 31 266 M18 x 1.5 11.5 50 250 3.2 59 93 31 3/8 50 to 51.5 58 182 52.5 12 0 34 16 24 290 M18 x 1.5 13.5 65 306 4.5 76 116 37 1/2 59.5 to 62.5 71 218 59.5 15 0 44 16 27 349 M22 x 1.5 13.5 75 332 6.0 92 133 40 1/2 66.5 to 69.5 72 246 69.5 15 0 43 17 29 378 M26 x 1.5 With Rod

KJ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Note) Weight (g) D L M1 M2 Model 5 32 KQ2H01-03 KQ2H01-07 KQ2H03-05 KQ2H03-07 KQ2H05-07 KQ2H07-09 KQ2H07-11 KQ2H09-11 KQ2H09-13 KQ2H11-13 10.4 13.2 11.4 13.2 13.2 15.2 17.9 17.9 21.7 21.7 32.5 34.5 34 34.5 34.5 38.5 42 42 44 44 16 17 16.5 17 17 18.5 21

LEC-OM069xx

Even when not using the safety function, use DRIVERs with the Safe Jumper Connector connected. 3-42 3 Wiring and Connection (1) I/O Signals kit (CN1) 1) I/O Connector (Non cable) (LE-CYNA) Use the following connector and cable to assemble the cable. The CN1 connector kit includes one case and one connector.

CV/MVGQ

48 42 85.5 91 93.5 CE2 80 107 49.5 48.5 59 51 93.5 48.5 101.5 55.5 50 54 50 94 107 102 100 ML2B 104 121 58.5 56 69.5 59 56 112 63 57.5 62 57.5 104 121 112 Operating Range C J G5-S CV Auto switch model Bore size (mm) 40 50 63 80 100 8 7 9 9.5 10.5 Other than the models listed in How to Order, the following auto switches are applicable.

7

104.5 73.5 52.5 9 G VXD2 50A 28 77.5 40 180 24.5 59 155 14 120 52 104.5 73.5 52.5 ( ): Denotes the Normally Open (N.O.) dimensions. 147 VXD Series For Heated water/High temperature oil 3 A Dimensions/VXD2 Body Material: C37, Stainless Steel (1/4, 3/8, 1/2) Grommet U E 300 C (42) 40 2 For Heated water/ High temperature oil Full-wave rectifier T A b a IN OUT 3 A VXD2 Port size 04 (1/2) (

CV/MVGQ

48 42 85.5 91 93.5 CE2 80 107 49.5 48.5 51 48.5 59 93.5 101.5 55.5 50 54 50 94 107 102 100 ML2B 104 121 58.5 56 59 56 69.5 112 63 57.5 62 57.5 104 121 112 Operating Range C J G5-S CV Auto switch model Bore size (mm) 40 50 63 80 100 8 7 9 9.5 10.5 Other than the models listed in How to Order, the following auto switches are applicable.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

) 3 5 1 38 (53) 23 (30) 32 (42) 1 23 (30) 1/8 14 port 3/8, 1/2, 3/4-2 port 3, 5 port 30 (42) 30 (42) 1/8 14 port 3/8, 1/2, 3/4-2 port 3, 5 port 30 (42) 30 (42) 3/8, 1/2, 3/4 1 port 3/8, 1/2, 3/4 1 port Dimension inside is for rubber seal.

One-touch Fittings Series KQ2

L D A M Nylon Urethane 3.2 KQ2R23-04 KQ2R04-06 4 6 2 2.1 9.6 33.5 34.5 3.4 2.9 18.5 17.5 15.5 10.4 4 KQ2R04-08 36.5 5.6 5.6 2.3 8 18 16 KQ2R04-10 12.8 39.5 3.6 10 18.5 KQ2R06-04 4 3 12.8 37 4 4 21 6 KQ2R06-08 37 3 8 18.5 17 KQ2R06-10 12.8 39.5 13.1 13.1 3.5 10 18.5 KQ2R06-12 42 15.2 5.2 12 20 8 KQ2R08-10 15.2 41 26.1 18.0 4.5 10 20 18.5 KQ2R08-12 42 5.1 12 12 KQ2R10-12 17 42 41.5 32.8 33

Gun Type Ionizer

Gun Type Ionizer IZG10 Series IZS40/41/42 IZT40/41(-L)/ 42(-L)/43(-L) IZN10E IZF IZG10 ZVB IZD10/IZE11 IZH10 Antistatic Equipment *1 Lightweight 200 g Only *1 Body weight Lighting LED Reduced operating force Easy to hold grip Blow setting function p. 179 Select from continuous blow or pulse blow.

Industrial Filters

Note) For a comparison with the nominal filtration accuracy according to the element category, refer to pages 41 and 42.

Intrinsically Safe Valve

Type 42/External Pilot Capable Add the valve and option part number under the manifold base part number.

7ND9071en

When ordering spare parts, always include the following information: Valve controller type designation and serial number from the ID plate The code of this manual, the part number, the part name and quantity required 42 7 ND90 71 en 12 DRAWINGS AND PARTS LISTS 12.1 Exploded view ND9100, ND9400, ND7100 100 107 110 109 228 39 223 217 219 42 218 215 220 210 44 19 43 18 139 11 120 47 49 222

MQQ

Dimensions Foot style: MQMLL 6 25 14 33 42 18.5 2.3 6 9 2-5.5 66 + Stroke 75 + Stroke 93.5 + Stroke RE A B REC 10, 16, 20, 25 CX CY LY LH MQQ M X X Y Y LX LZ Z 4-LC S + Stroke LS + Stroke ZZ + Stroke LT RHC MK(2) RS Q G RS H A Bore size (mm) LC LH LS LT LX LY Z ZZ X S LZ Y RZQ 10 5.5 14 83 2.3 33 25 19 108 6 65 42 9 16 5.5 18 92 2.3 42 30 21 119 6 74 54 9 MI W S 20 6.8 25 137.5 3.2 40 40

CY1

Large variations may occur depending on the surrounding environment (variation on the order of 30%). 6 to 20 Auto switch model Bore size (mm) D-A9 A D-F9 B C D D-A9 D-F9 D-A9 D-F9 D-A9 D-F9 30 6 26 46 42 46 42 26 30 10 28 32 48 44 48 44 28 32 15 17.5 21.5 76.5 72.5 56.5 60.5 20 19.5 23.5 87.5 83.5 39.5 35.5 67.5 71.5 Note) Auto switches cannot be installed in Area C in the case of 15. 25

MQQ

Dimensions Foot type/MQMLL 6 25 14 33 42 18.5 6 9 2.3 2-5.5 66 + Stroke 75 + Stroke 93.5 + Stroke 10, 16, 20, 25 LY LH X X Y Y 4-LC S + Stroke LS + Stroke ZZ + Stroke LX LZ Z LT (mm) Bore size (mm) LS LC LT LH LX LY S Z LZ ZZ Y X 5.5 83 2.3 14 33 25 65 19 42 108 9 6 10 5.5 92 2.3 18 42 30 74 21 54 119 9 6 16 6.8 137.5 3.2 25 40 40 97.5 20.5 55 166 20 8 20 6.8 142.5 3.2 28 40 47 102.5 24.5

Proposals for Energy Saving

42 52 10 14 14 18 18 18 4 5 5 12 15 15 M6 x 1.0 M8 x 1.25 M8 x 1.25 to 1000 to 1000 to 1000 39 42 52 208 228 254 10 &RXUWHV\RI6WHYHQ(QJLQHHULQJ,QF5\DQ:D\6RXWK6DQ)UDQFLVFR&$ *HQHUDO Non-rotating Double Power Cylinder Series MGZ Dimensions with Mounting Brackets Transaxial foot type (L) 4LD through LT LH LY Actuators X/2 X X Y ZZ + Stroke LS + Stroke LZ LX (mm) Stroke range Bore size (mm)

KR

(mm) (1) L D Applicable tubing Nylon Urethane KGR04-08 KGR04-06 1.8 2.0 3.3 3 2.5 3 4.7 4 6 8 10 4 8 10 12 10 12 12 16 16 17.5 18 18.5 21 34.5 36.5 39.5 37 37 39.5 42 41 42 44.5 50.5 50.5 10.4 16 5.6 4 KGR04-10 12.8 KGR06-04 KGR06-08 KGR06-10 KGR06-12 KGR08-10 KGR08-12 KGR10-12 KGR10-16 KGR12-16 4 4 12.8 17 6 18.5 Applicable fitting size d 13.1 10.4 15.2 20 4.0 4.6 33 8 15.2 20 18.5 26.1

Table of Contents

Note 6) Refer to SMC catalog CAT.ES100-42 for detailed specifications and instructions of digital pressure switch.

LEC-OM02704CN

3.7.1 .42 3.7.2 .45 3.7.3 .46 3.7.4 .47 3.7.5 .50 3.7.6 .53 3.8 .56 3.8.1 1 .56 3.8.2 1 .57 3.8.3 2 .59 3.8.4 2 .60 3 1 3CC-Link 3 CC-Link 3.1 CC-Link DC5V CC-Link Ver.1.10 10M/5M/2.5M/625K/156Kbps NRZI CC-Link BUS(EIA RS-485) CRC(X16X12X51) CC-Link Ver.1.10() HDLC 164 156kbps 625kbps 2.5Mbps 5Mbps 10Mbps () 1200m 900m 400m 160m 100m 0.2m 42(1/)(2/32) .