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rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -(1:) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 2 VFR6000-OMQ0001 / / / / 1 1 3) 3) 1 1 () 3 VFR6000-OMQ0001 VFR6000 Series 5 / 1 DC 3 () 0.1 2 C-R () C-R DC 3% AC 20%

-2VT317**-OMH0003-A / *3) 1 1.5 *3)1 1 () [] -3VT317**-OMH0003-A VT317 Series 3 / / () () () () C-R ( )C-R DC 2% AC 20% () (SSR)AC () 1) (C-R ) OFF 2) () 1 2 1V -10 1 DC N.O.() 3 4 VT317**-OMH0003-A VT317 Series 3 / () DC 30N 1) 1 2) 1 ()ISO VG32 2 ISO VG32 (SDS) R,NPT 23 RNPT Nm Rc 1/8 35 Rc 1/4 812 N.C.N.O. 5 VT317**-OMH0003-A VT317 Series 3 / () () 30 () , 1

Ambient temperature for operation: -10 to 50 oC Ambient temperature for storage: -20 to 60 oC Pollution degree 2: (UL508) PWR(V) PWR MNS PWR(V) PWR The following instructions must be followed during maintenance: Turn off the power supply. Stop the air supply, exhaust the residual pressure and verify that the air is released before performing maintenance. Otherwise an injury can result.

Description No.1 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 0 HW Set the address and speed in a local with switch on the SI unit Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 -10 to 50 oC (Max. surrounding air temperature rating: 50 oC) Operating temperature range The status display LED displays the power supply and communication status. -20 to 60 oC Storage temperature range 24 VDC Class2, 2 A Power supply 24 VDC Class2, 2 A Output DeviceNetTM status

URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2010 SMC Corporation All Rights Reserved

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 -10 to 50 oC (Max. surrounding air temperature rating: 50 oC) Operating temperature range The status display LED displays the power supply and communication status. -20 to 60 oC Storage temperature range 24 VDC Class2, 2 A Power supply SI unit common status PROFIBUS DP status

No.4 SI L ERR LED SI L RUN LED SI SI No.5 SI L ERR LED SI L RUN LED SI SI No.6 SI SI SI SI L ERR LED SI L RUN LED -23No.EX-OMP0004CN-I No.7 SI SY/SV/S0700 32 VQC 24 No.8 SI ( 0.6 Nm) SI SI LED SI COM SI COM SI No.9 LED SI COM SI COM SI -24No.EX-OMP0004CN-I SI SI (0.6 Nm) (1) (2) (3) (4) SI M3 0.6Nm M330 SI -25No.EX-OMP0004CN-I -10+50 3585%RH 20

Ambient temperature for operation: -10 to 50 oC Ambient temperature for storage: -20 to 60 oC Pollution degree 3: (UL508) Provide grounding to assure the safety and noise resistance of the Fieldbus system. Individual grounding should be provided close to the product with a short cable.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 -10 to 50 oC (Max. surrounding air temperature rating: 50 oC) Operating temperature range The status display LED displays the power supply and communication status. -20 to 60 oC Storage temperature range 24 VDC Class2, 2 A Power supply 24 VDC Class2, 2 A Output CC-Link status

Series CRB2-Z, single or double vane, rotary actuator is availbable in 10, 15, 20, 30 and 40 bore.  The single vane style use specially designed seals and stoppers which enable this compact type actuator to rotate up to 270 degrees. 

Rated Pressure Range: 20 (0 to -101 kPa), Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m), Option 2: None, Option 3: K (Operation Manual, Calibration Certificate)

General purpose remote vacuum sensor for liquid or gas; Power supply requirement: 12 to 24 VDC; 1 to 5V or 4 to 20 mA analog output; Accuracy: ±1% of F.S.; Repeatability: ±0.2% of F.S.; Port sizes: 1/8 or 1/4 Rc or NPT (incl. M5 female); 1/4 URJ; 14 TSJ

General purpose remote vacuum sensor for liquid or gas; Power supply requirement: 12 to 24 VDC; 1 to 5V or 4 to 20 mA analog output; Accuracy: ±1% of F.S.; Repeatability: ±0.2% of F.S.; Port sizes: 1/8 or 1/4 Rc or NPT (incl. M5 female); 1/4 URJ; 14 TSJ

Spring extend or spring return, Bore sizes in mm: 12, 16, 20, 25, Strokes: 5mm and 10mm, Mounts: through hole, both ends tapped, foot, front or rear flanges, Variety of switches and a variety of lead wire lengths, Cyl, Microspeed, Dbl Act, Clean Room, COMPACT CYLINDER, 503, 101 lb

Rated Pressure Range: 20 (0 to -101 kPa), Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m), Option 2: B (Panel Mount Adapter)

Rated Pressure Range: 20 (0 to -101 kPa), Output Specification: N (NPN Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m), Option 2: B (Panel Mount Adapter)

Rated Pressure Range: 20 (0 to -101 kPa), Output Specification: N (NPN Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: M5 (M5 Female Thread)