CC

M6 x 1 10.5 to 12.5 CCVL2-G-S 66 107 116 50 24 40 28 1 40 27 115 100 80 3/4 135 180.5 124.9 135 CC CCVL3-G-S 66 66 107 107 116 116 50 50 24 40 28 28 1 40 40 27 27 115 115 100 100 80 80 3/4 135 135 180.5 124.9 135 CCVL0-S 3/4 RB Pitch of mounting on the wall is CA and CL.

HRX-OM-W032

Description Size 1 Valve Rc1/2 2 Valve Rc1 3 Y-strainer (#40) Rc1 4 Flow metter Prepare a flow metter with an appropriate flow range. 5 Valve (Part of thermo-chiller) Rc3/4 6 Y-strainer (#40) Rc1/2 3.4 Piping HRS Series 3-28 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.5 Circulating Fluid Supply 3.5.1 Automatic water fill function When clear water is used, refer to 7.1 Quality Control

Rotary Clamp Cylinder: Standard ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 MK Series

MK MK Body option Bore size Nil N Standard (Female thread) 12 16 20 25 32 40 50 63 12 mm Port thread type MK2T With arm 16 mm M thread 12 to 25 Arms are shipped together, (but not assembled). 20 mm Nil CK1 Rc NPT G 25 mm TN TF 32 to 63 32 mm Rotary direction (Unclamp Clamp) CLK2 Port side 40 mm 50 mm Counterclockwise R L Clockwise During unclamping (Extension end) R type (Clockwise) CLKG

LEKF-OMZ0035

Max acceleration/deceleration [mm/s2] Positioning repeatability [mm] 0.01 Lost motion[mm] Note3) 0.05 Lead [mm] 20 12 6 24 16 8 30 20 10 Impact/Vibration resistance [m/s2] Note4) 50/20 Actuation type Ball screw (LEKFS)Ball screw + Belt (LEKFSR/L) Guide type Linear guide Operating temperature [] 5 to 40 Operating humidity [%RH] 90 or less(No condensation) Motor output [W]/size [mm] 100W/40

How to Order MGQ M Cylinder stroke (mm) Refer to “ Standard Stroke ” on page 339. Slide bearing Ball bushing bearing Bearing type M L 12 mm 16 mm 20 mm 25 mm 32 mm Bore size 12 16 20 25 32 40 mm 50 mm 63 mm 80 mm 100 mm 40 50 63 80 100 M9BW 2 pcs. 1 pc. n

Thread type M5 x 0.8 Rc NPT G 12, 16 Nil TN TF 20 to 100 Applicable Auto Switch/Refer to pages 1719 to 1827 for further information on auto switches.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Refer to pages 2-5-40 to 2-5-43 for control unit.

Multistage Ejector (N)ZL Series

switch (N)ZL212-E P V RESETSET Approx. 500 Section A (L: approx. 2900) 2-4.4 Mounting hole MULTISTAGE EJECTOR 76 52 8 27 178.5 5 4.5 Section A with digital vacuum pressure switch (40) (N)ZL212-E (ZSE4) (N)ZL212-EB (ZSE4B) (N)ZL212-EE (ZSE4E) (2) (1.6) 4-M5 x 0.8 Thread depth 6 (mounting hole) 73 87 12

Digital Flow Switch Series PFA For Air Series PFW For Water

PFA7--27(-M) FLOW SWITCH UP 34 54 44 SET Brown OUT1 OUT2 DOWN FOR AIR Main circuit OUT1 Black + 12 to 24VDC LED Green 24 2-Port size OUT2 Load White Load 4-4.5 40 50 LED Red Blue PFA7--67(-M) (41.5) Brown Load Load Black LED Green + OUT1 12 to 24VDC Analog output White LED Red Blue PFA71--28(-M) 42 Brown 4 OUT1 Black + 2-3.4 12 to 24VDC LED Green 43 Analog output Load White Load Flow

RLQ

V 3-wire (NPN) 3-wire (PNP) IC circuit Grommet Solid state switch Reed switch 12 V 2-wire Connector 5 V, 12 V 12 V 5 V, 12 V 12 V 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 4-wire Diagnostic indication (2-color display) Relay PLC IC circuit 24 V Yes Grommet Water resistant (2-color display) IC circuit IC circuit 5 V, 12 V With diagnostic output (2-color display

CC

CCVL2-G-S 66 107 116 50 24 40 28 1 40 27 115 100 3/4 80 135 180.5 124.9 135 CC CCVL3-G-S 66 66 107 107 116 116 50 50 24 40 28 28 1 40 40 27 27 115 115 100 100 3/4 80 80 135 135 180.5 124.9 135 CCVL0-S 3/4 RB Pitch of mounting on the wall is CA and CL.

MXQ

P FR (2) 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 FP Note 2) W/ end lock is not available in Series MXQ6.

53

Facility water temperature 32C 12 Cooling capacity [kW] 10 8 Facility water temperature 40C 6 4 2 0 5 10 15 20 25 30 35 40 Circulating fluid temperature [C] Pump Capacity HRSH090--20/400.6 60 Circulating fluid pressure [MPa] 0.5 50 Outlet Pump head [m] 0.4 40 0.3 Usable flow rate range 30 0.2 20 Return port 0.1 10 0 0 20 10 40 30 50 60 70 Circulating fluid flow rate [L/min] 0 140 Thermo-chiller

High Vacuum L Type Valve

Dimensions Unit: mm Model A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 11 XL*-OMI0011-E 7.

Remodeled

Refer to How to Order for the standard model numbers. 12, 16 1 to 249 12, 16 11 to 249 Applicable stroke 20, 25, 32 1 to 399 20, 25, 32 21 to 399 mm) 40 to 100 5 to 395 40 to 100 26 to 395 Part no.: MGPM20-39Z Part no.: MGPM20-39Z-XB10 A spacer 1 mm in width is installed in the MGPM20-40. Special body manufactured for 39 stroke. Example C dimension is 77 mm.

PSxx-OMP0001E

Load voltage 12 to 24 VDC10%, Ripple(p-p) 10% or less If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system Check the product regularly for proper operation Otherwise malfunction can result, causing an accident. 5 to 40 mA Load current Leakage current 1 mA or less Int. voltage drop 5 V or less The following instructions must

Air-hydro Unit

12.5 CCVL2-G-S 66 107 116 50 24 40 28 1 40 27 115 100 80 3/4 135 180.5 124.9 135 CCVL3-G-S 66 66 107 107 116 116 50 50 24 40 28 28 1 40 40 27 27 115 115 100 100 80 80 3/4 135 135 180.5 124.9 135 CCVL0-S 3/4 Pitch of mounting on the wall is CA and CL.

Digital Flow Switch

to 24 VDC 10% 12 to 24 VDC 10% 24 VDC 10% 12 to 24 VDC 10% 12 to 24 VDC 10% Temperature characteristics 2% F.S. 2% F.S. (15 to 35C) 2% F.S. (15 to 35C) (25C standard) Monitor unit Monitor unit Monitor unit Monitor unit 3% F.S. (15 to 35C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 2% F.S. (15 to 35C) 5% F.S. (0 to 50C) (15 to 35C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C)

VQZ Series

Compatible cable Cord O.D.:3.5 to 7 (Reference) 0.5mm2, 2-core or 3-core, equivalent to JIS C 3306 Part no. for One-fitting for 1(P) port and Silencer for 3(R2,R), 5(R1) port. (2) Silencer for 3(R2,R), 5(R1) port Series (1) One-touch fitting for 1(P) port Silencer One-touch fitting VQZ100/1000 KQ2H06-M5 AN120-M5 KJS04-M5 VQZ200/2000 KQ2S06-01S INA-25-46 IN-457-32for 6 VQZ300/3000 KQ2H08-02S

Process Pump

From the graph it is approx. 40%. 2Next, convert it to discharge rate of clean water. 40% of the discharge of clean water corresponds to 200mL/min. of required specification.

XMD/XYD Series

L1 L2 XMD-25 50 123 48 1 40 26 41 16 7.5 XMD-40 65 170 66 2 55 70 41 63 20 15 P.C.D 58.7 6x6.6 XMD-50 70 183 79 2 75 52 68 20 17.5 XMD-63 88 217 100 3 87 95 114 70 72 20 19.5 P.C.D 92.1 8x 8.4 XMD-80 90 256 117 3 114 110 83 98 20 26.5 D G C C K J H B Fd (K Flange) 45 Fn (KF Flange) A E Unit: mm Model A B C D E Fn Fd G H J K XYD-25 100.2 86.7 48 1 23.5 40 26 66 16 7.5 XYD-40 130 114 66 2 38