Vacuum Pad

10 4 x 20 4 x 30 ( 5 x 10 5 x 20 5 x 30 ( 6 x 10 6 x 20 6 x 30 ( 8 x 20 8 x 30 ( 3.5 x 7 ( W Oval 2 x4 C 3.5 x 7 C 4 x 10 C U H Flat HT Heavy-duty pad HB Bellows HW Oval U ( ( ( ( Mark-free pad H Related pad Sponge pad S ( ( ( ( ( Resin attachment K ( ( ( ( Pad with ball spline buffer U ( ( ( ( H Heavy-duty ball joint pad HB Note) The ZP2 series is blast type.

Vacuum Pad

10 4 x 20 4 x 30 ( 5 x 10 5 x 20 5 x 30 ( 6 x 10 6 x 20 6 x 30 ( 8 x 20 8 x 30 ( 3.5 x 7 ( W Oval 2 x4 C 3.5 x 7 C 4 x 10 C U H Flat HT Heavy-duty pad HB Bellows HW Oval U ( ( ( ( Mark-free pad H Related pad Sponge pad S ( ( ( ( ( Resin attachment K ( ( ( ( Pad with ball spline buffer U ( ( ( ( H Heavy-duty ball joint pad HB Note) The ZP2 series is blast type.

Dual Speed Controller with One-touch Fitting Series ASD

6 w !7 !1 !0 !6 w !7 !1 !0 !5 w !7 !0 o !2 !4 u t t q t u y !3 u e !3 !8 t y e !2 !1 !3 !6 r A A A A !4 i u q i !4 r y t y !2 o !5 r u t q !5 e i o !2 r Component Parts No. Description Material Note No. Description Material Note Body A O-ring PBT NBR q !3 Elbow body O-ring PBT NBR w !4 Body B O-ring Electroless nickel plated Brass NBR e !

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

I = I + I + I kgm Gripper: I m: Lever mass kg m: Cylinder mass kg m: Gripper mass kg Calculation example When L = 0.2m, D = 0.06m, a = 0.06m, b = 0.03m, m = 0.5kg, m = 0.4kg, m = 0.2kg 0.06 + 0.03 12 I = 0.2 x + 0.2 x 0.2-2 = 0.81 x 10-2 kgm 0.2 3 I = 0.5 x = 0.67 x 10-2 kgm I = (0.67 + 1.62 + 0.81) x 10-2= 3.1 x 10-2 kgm I = 0.4 x + 0.4 x 0.2 = 1.62 x 10-2 kgm 0.06 8 Specific Application

2/3 Port Solenoid Valve for Chemicals

3 PBT Return spring 9 Stainless steel o Board assembly 10 Casing 11 PBT r e Plug 12 NBR w O-ring 13 NBR O-ring 14 EPDM/FKM/Kalrez !4 q 4 Series LVM10/100 Dimensions/Body Pored Type LVM11-(N.C.) (2 x R3.2) 9 25.4 19 2 x 3.2 Mounting hole (Lead wire length) 300 UL1007 AWG22 52.5 M5 x 0.8 IN port M5 x 0.8 OUT port 2 5 5 16 13 The broken lines indicate the bracket type. LVM11R-(N.C.)

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

3 PBT Return spring 9 Stainless steel o Board assembly 10 Casing 11 PBT r e Plug 12 NBR w O-ring 13 NBR O-ring 14 EPDM/FKM/Kalrez !4 q 4 Series LVM10/100 Dimensions/Body Pored Type LVM11-(N.C.) (2 x R3.2) 9 25.4 19 2 x 3.2 Mounting hole (Lead wire length) 300 UL1007 AWG22 52.5 M5 x 0.8 IN port M5 x 0.8 OUT port 2 5 5 16 13 The broken lines indicate the bracket type. LVM11R-(N.C.)

MXH Series Compact Slide

A 22 D-A9 D-F9 D-F9 W B W 20 (22) A D-A9 V D-F9 V D-F9 WV W B Dimension inside ( ) is for model D-A9 V.

Digital Flow Switches Series PF2A

10-2 l, ft3 x 10-2 l/min, CFM x 10-1 l, ft3 x 10-1 Display units Real-time flow rate Accumulated flow Note 1, 2) 0 to 9 l, 0 to 9 ft3 x 10-2 0 to 9 l, 0 to 9 ft3 x 10-1 Accumulated flow range Note 1) Power supply voltage Current consumption Power supply voltage for sensor 24 VDC (ripple 10% or less) (With power supply polarity protection) 55 mA or less (Not including the current consumption

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

35L x 40L x 45L x 50L x 55L x 60L CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L CQ-M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L CQ-M3 x 25L x 30L x 35L x 40L x 45L x 50L CQ-M3 x 25L x 30L x 35L x 40L x 45L x 50L CQ-M5 x 25L x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L CQ-M5 x 30L x 35L x 40L x 45L x 50L

XL

10 -6 Port A pressure Pa 1.3 x 10 -9 {1 x 10 -8} at ordinary temperatures, excluding gas permeation Internal External 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Leakage Pa m 3/s {Torr l/s} VCR 1.3 x 10 -11 {1 x 10 -10} Fitting Swagelok 1.3 x 10 -10 {1 x 10 -9} VCR/SWJ (Swagelok) Piping connection system 3/8B Connection size 1/4B 5 to 40C (41 to 104F) Operating

ML1C

Payload W (kg) 1112 Hy-rodless Cylinder ML1C Series Basic Type AA depth BB +0.06 +0.01 CLJ2 4 x V depth W CLM2 4 x S through, counterbore T, depth U CLG1 CL1 MLGC CNG +0.06 +0.01 CC depth DD B + Stroke MNB CNA2 Manual override rod CNS CLS CLQ 4 x Rc FF Actuating port RLQ A + Stroke 3 x Rc FF Actuating port MLU 2 x Rc FF Actuating port 3 x Rc FF Brake releasing port 5 depth 5 +0.06 +0.01 5

Clean Regulator/Fluororesin Type

ARM 2 2 3 3 3 4 4 5 5 6 6 2 2 2 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 A B C A B A B A B A B 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC SMC SMC ARP P U Panel mount union Union IR-A IR SMC IRV : Basic size : With reducer

Heavy Duty Stopper Cylinder

(Roller center position) Conveyor lower limit position V Y U CD T R Stroke A H B FT GA 2 x P D QA Head side pressure port (When piping on flange side) Rod side pressure port (When piping on flange side) 2 x P QB W WB E GB A (mm) Circumscribed circle O QA Stroke A B CD CT CZ D E FT FX FZ GA GB H L N 212.5 LANote 5) Model RS2H50 RS2H63 RS2H80 30 84.5 20 8 36 32 64 20 73 93 16 16 128 85 44

Plate Cylinder with Lock Series MLU

1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M6 x 1 depth 12 49 57.5 60 72 5.5 5.5 6 7 14 14 15 18 14 15.5 16 21.5 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 4.3 5.1 6.9 8.7 6 6.5 8 10 30 35.5 37.5 44 19 22 22.5 28 3.5 3.5 3.5 3.5 6 6 9 9 76 87 87 102.5 26 28 36 42 M5 x 0.8 90 100 104 124.5 126 140 149 177.5 104 114 119 142.5 8 6.5 9 12 MLUB25 MLUB32

180° Angular Style Air Gripper Series MHY2/MHW2

= 9.0 x 10-6 (kgm2) Moment of inertia around Z axis = Z1 m1r12 X 10-6 z r2 z2 B part r2 = 47(mm) Calculation of weight m2 = d x e x f x Specific gravity m2 = 5 x 10 x 12 x 2.7 x 10-6 = 0.002 (kg) Moment of inertia around Z2 axis Z2 = {m2 (d2 + e2)/12} x 10-6 Z2 = {0.002 x (52 + 102)/12} x 10-6 = 0.02 x 10-6 (kgm2) B = 0.02 x 10-6 + 0.002 x 472 x 10-6 = 4.4 x 10-6 (kgm2) = 9.0 x 10-6

For post-stoppage positioning and locking

74 Proximity switch (Option) 158 65 2 x Rc3/8 14 12 25 220 25 140 60 60 R5 50 118 160 270 210 60 2 x M8 x 1.25 thread depth 13 (External cover mounting screw) 4 x 11 10.5 (Clamp block mounting hole) 4 x 13 through 18 4 x 26 counterbore depth 9 2 x 8H7 +0.015 0 118 14 (Mounting hole) 500.03 32 25 15 44 140 20 35 10 18 18 82 10.5 (Fully open) 46 204 211 19 118 480 2 W-R1/W-R3 Series Specific

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

40 90 59 43 18.5 M16 x 1.5 17 36 30.5 M36 x 1.5 39 6-9-34

Modular Type Air Filter Series AF

1 Drain q r e w t i u y o !0 !

KQ2

KQ2E12-00 KQ2E16-00 44 51 90 115 23 29 M22 x 1 M28 x 1.5 Note) ( ): Values for soft nylon.

Microspeed Cylinder

1.25 M14 x 1.5 JIS class 2 Standard stroke: mm M5 x 0.8 (10-32 nominal), Rc 1/8 M5 x 0.8 (10-32 nominal) 6 M3 x 0.5 M5 x 0.8 8 M4 x 0.7 M6 x 1.0 10 M5 x 0.8 M8 x 1.25 12 M6 x 1.0 M10 x 1.25 Female threads Rod end threads Female threads Rod end threads Male threads Male threads Rod end thread tolerance Stroke tolerance Port size Vacuum port, relief port JIS class 2 Rod end thread tolerance