Mounting P 11 8. Environment P 11 9. Lubricant oil P 11 10. Air source P 11 -2 - Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.
Table 4 20 25 32 40 Rod seal CM20Z-PS CM25Z-PS CM32Z-PS CM40Z-PS The rod seal is not delivered in sealed packaging for storage independently, so it must be used within 1 year.
VEX312VEX322VEX332VEX342VEX350VEX370VEX390( ) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A ( ) VEX1-18-2A VEX3-32-2A P2 AN120-M5 AN103-01 AN210-02 1) VEX1-9-1P VEX4-2A-P VEX1-11-2 VEX4-4 DXT152-14-1A NXT013-3 VO307K-1 2) 3) VEX322 VEX342 Rc A 1/8 1/4 F G VVEX2 VVEX4 B 1/4 3/8 N NPT ( ) VEX1-17 VEX4-5 C 1/2 T NPTF 11 No.VEX-OMY0001 (2) () 3 2(A) 23(P2) 12(P1) a,b 12(P1),23(P2) (2)
Nil S n G Rubber bumper only Cylinder stroke (mm) Rod end thread Nil F Male rod end Female rod end Model Cushion Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber 10-CM2X20 10-CM2X25 10-CM2X32 10-CM2X40 11-CM2X20 11-CM2X25 11-CM2X32 11-CM2X40 Relief type Vacuum suction type 1/8 25, 50, 75, 100, 125, 1/4 Non-lube Double
mm/s Piston speed mm/s Piston speed mm/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm
Nm Moment Nm Moment Nm 4 4 4 CX CY1F15 3 3 3 DCY1F10 2 2 2 -X CY1F15 CY1F15 20CY1F10 CY1F10 1 1 1 Data 0.5 0.5 0.5 500 100 300 50 500 100 300 50 500 100 300 50 Piston speed mm/s Piston speed mm/s Piston speed mm/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass
ARP No load voltage [V peak] Max. current rating [A] 0 to 20 [V] 5.0 IR-A 100 IR Over 20 [V] to 30 [V] Peak voltage 2) A circuit using max. 30 [Vrms] or less (42.4 [V peak]), which is powered by UL1310 or UL1585 compatible Class-2 power supply. 4.
Filtration accuracy (m) 5 10 20 40 74 105 No.
DCVX2 (2 )VX2 -37No.PS-OMR0001CN-J 3 ISA-19ISA-12ZS-31-B ISA-16ZS-31-C ISA-15 ISA-20 2.6 ISA-14 -38No.PS-OMR0001CN-J 3 () ISA-19ISA-12ZS-31-B ISA-16ZS-31-C ISA-15 ISA-20 ISA-20 E210-U01 2 ISA-17 2.6 2.6 Y200T-A -39No.PS-OMR0001CN-J 3 () 2 2 E210-U01 ZS-31-C ZS-31-C ZS-31-B Y200T-A Y200T-A ISA-18 2.6 ISA-15 ISA-16ISA-17 ISA-12-40No.PS-OMR0001CN-J 4 80 kPa220 kPa
For Deionized Water and Chemicals Digital Flow Switch Series PF2D How to Order Remote Type Sensor Unit C PF2D5 13 20 1 Option (Refer to page 55.) Flow rate range None e-con connector x 1 pc. Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.
AirlLiq' 3-5 6-8 9-11 11-12 NVFM 250 Mech. Actuated/ Pilot Operated Cv 1.0 13-17 NVZM 450 Mech. Actuated/ Pilot Operated Cv 0.55 13; 18-20 Materials Body Aluminum DieCast Spool, Stem, Spring Stainless Steel Seals & Poppets Buna N Weaqhtoz.
94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (mm) Elbow Straight A One-touch fitting size 4, 5/32" 6 1/4" C 18 20 20.5 B 10.4 12.8 13.2 B A 20 22.4 22.8 C B 14.4 11.2 B Straight Elbow With One-touch fitting With bracket 42.5 10 15 4.2 3 22 30 20 25 20 SMC 45 30 1.8 35 35 16-2-10 11 Series ZSE30/ISE30 High Precision, 2-color Display Digital
Applicable blank plate assenbly SY100-77-1A VZ P R 20 stations 20 R port VS A port M5 X 0.8 P port M3 X 0.5 M5 X 0.8 M5 X 0.8 Note 1) SY114 (A) and SY124 (A) cannot be mounted on the same manifold.
AirlLiq' 3-5 6-8 9-11 11-12 NVFM 250 Mech. Actuated/ Pilot Operated Cv 1.0 13-17 NVZM 450 Mech. Actuated/ Pilot Operated Cv 0.55 13; 18-20 Materials Body Aluminum DieCast Spool, Stem, Spring Stainless Steel Seals & Poppets Buna N Weaqhtoz.
20 Suction flow rate Suction flow rate 20 20 20 20 10 10 10 0 0 0 0 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 2 4 6 8 14 12 10 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 5 10 15 20 Suction flow rate [L/min(ANR)] Suction flow rate [L/min(ANR)] Supply pressure [MPa] Supply pressure [MPa] Dimensions 2 x Applicable tubing O.D. 6 10.4 9.7 L1 L2 13.3 12 13.3 2 x Connection thread Rc1/8 13.3 12 L1 One-touch Connection
) 1.57 (40) 0.39 ( 1 0 ) 0.67 ( 1 7 ) MAx1.25 024 l7t M18x1.5 1 . 1 4 (30) 3 5 4 (90) 2 7 6 (70) 0 3 5 ( s 0 ) (.12) 3.54 (90) 1.97 (50) 4.33 ( 1 1 0 ) 2.28 (54) 6 3 0 o60) 205 (52) 11 2l 2.60 (66) s T o 6.61 (168) 1.38 {3s) 3.98 ( 1 0 1 ) 3.35 (85) 2.52 (s) 0 7 9 (20) (40) 0.39 ( 1 0 ) 0.67 ( 1 7 ) 0 2 8 t7l M l a x 1 5 1.22 ( 3 i ) 3.86 (98) 3.39 (86) 0.45 11 5) 0.59 (15) 1105) 2.32 (59
) 1.57 (40) 0.39 ( 1 0 ) 0.67 ( 1 7 ) MAx1.25 024 l7t M18x1.5 1 . 1 4 (30) 3 5 4 (90) 2 7 6 (70) 0 3 5 ( s 0 ) (.12) 3.54 (90) 1.97 (50) 4.33 ( 1 1 0 ) 2.28 (54) 6 3 0 o60) 205 (52) 11 2l 2.60 (66) s T o 6.61 (168) 1.38 {3s) 3.98 ( 1 0 1 ) 3.35 (85) 2.52 (s) 0 7 9 (20) (40) 0.39 ( 1 0 ) 0.67 ( 1 7 ) 0 2 8 t7l M l a x 1 5 1.22 ( 3 i ) 3.86 (98) 3.39 (86) 0.45 11 5) 0.59 (15) 1105) 2.32 (59
pressure: 0.5 MPa 10 20 50 0.15 0.3 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 40 0.6 0.1 0.2 30 0.4 5 10 20 0.05 0.1 0.2 10 0 0 0 0 0 10 20 5 10 5 10 0 Number of needle rotations Number of needle rotations Number of needle rotations 15-9-62 7 Speed Controller for Low Speed Operation Standard Type
N01e} The iMicaled 110w rate values are al a pressure 01 O.5MPa and a temperature 01 20 Q C. 1 Speed Controller 5 .