ZPT/ZPX

Y 3.5 80 ZPT80H-A16 82 16.5 28 4.5 B 65 C 14.5 D 26 E 56 58 80 ZPT80H-B12 82 16.5 28 M12 x 1.75 4.5 80 ZPT80H-B16 82 16.5 28 M16 x 1.5 4.5 13-11-73 6 Series ZPT ZPT H-A16 (Male thread) 100 125 ZPT H-B (Female thread) 100 125 Hexagon width across flats 22 Width across flats 60 Width across flats 60 70 Hexagon width across flats 24 10 A B 8 A B Courtesy of Steven Engineering, Inc.-230 Ryan

NAIV

(22) Nclise L.evel Construction/Dimensions (mm) 130 120 1 1 0 1()0 90 80 70 60 N2505 N2506 N?

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, BASE CYLINDER, ACTUATOR, CM2/CM3 ROUND BODY CYLINDER, M6, 40MM CM2 COPPER-FREE, 0.44092 lb

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYLINDER, ACTUATOR, CM2/CM3 ROUND BODY CYLINDER, M6, 40MM CM2 COPPER-FREE, 0.44092 lb

Manifold Base for VX21/22/23 series solenoid valves for air, Base material: aluminum , 1/8 or 1/4 individual port size, 2 - 10 stations available as standard, Options: Rc, G or NPT threads, oil-free 2 PORT VALVE. Manifold Base, VXE Series. 590.00000 lb. K56.

Speed Controller with Indicator

Connection Female Thread: Rc, NPT, NPTF Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 Connection thread size Proper tightening torque [Nm] NPT, R1/8 3 to 5 NPT, R1/4 8 to 12 NPT, R3/8 15 to 20 NPT, R1/2 20 to 25 Connection Female Thread: G Chamfered area for female

Flame Resistant

91 AS421F-G04-10W2D G1/2 24 19.5 28.6 25 12.4 33.6 47.9 26.8 65.3 1.2 56.7 21 150 AS421F-G04-12W2D 20.9 34.6 48.9 22 156 2 These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Air-hydro Unit

.: 0.5 MPa Operating oil: Additive turbine oil Class 1 (ISO VG32) Oil piping length: 1 m Flow control valve Flow control valve Throttle valve Throttle valve Stop valve CCVS10/11/12/13 CCVS20/21/22/23 CCVS02 Piping bore Piping bore Piping bore Piping bore Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) No load No load No load

Pin Clamp Cylinders

-X 545 C(L)KU32 Series Auto Switch Mounting 2 Auto Switch Mounting Height Applicable cylinder: C(L)KU32-X2321 C(L)KU32-X2322 D-P3DWA 44.5 23.5 D-M9V D-M9WV 40 35 D-A7 40 22 546 Auto Switch Mounting C(L)KU32 Series Auto Switch Mounting Bracket Part No.

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A9/A9V Rotating angle Size Operating range ( ) Operating range ( ) Proper mounting position A (mm) Proper mounting position A (mm) 90 13 9 30 42 81 180 22 18 Operating range at proper mounting position /2 90 22.5 18.5 50 30 44 180 39 35 Most sensitive position Operating range of single auto switch Values which include hysteresis are for guideline purposes

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

63: L 0 -0.2 8 x V Effective thread depth Y H A B E G Mounting nut width across flats C G E H B NN Effective thread length T (R) NA Q N F NA I F N CC 0.1 + 12-CY3B50, 63 12-CY3B6 to 15 (mm) B 17 25 35 36 46 60 70 86 100 0.007 0.043 30 32 CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22

VXA31/32

C 9 10 D 22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108

Slit Valve

Bellows protection structure Wiper Detail drawing OPEN 528 Slit Valve XGT Series RoHS How to Order XGT 22 2 46236 1 C Auto switch and the connector (Refer to the table below) High vacuum slit valve Valve size Gate O-ring material Number of axis Two axes bellows One axis bellows Applicable wafer size 200 mm 300 mm Symbol 22 31 Material FKM Kalrez 4079 Symbol 1 2 Opening window size Width Height

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

For polyurethane tubes, 22 colors other than the ones above are available. 1114 Series ZFC100/200 Made to Order Specifications Please contact SMC for detailed specifications, dimensions and delivery. Air Suction Filter with Metal Case 1 Max. operating pressure 0.5 MPa For the standard type, the max. operating pressure is up to 0 kPa.

Refrigerated Air Dryer

Applicable dryer Capacity Model Inlet voltage Outlet voltage A B C D E F Weight (kg) 380, 400, 415 VAC (50 Hz) 380 to 420 VAC (60 Hz) IDF-TR500-3 15 Single phase Single turn 100 VAC (50 Hz) 110 VAC (60 Hz) IDF1E-10 to 8E-10 IDU3E-10, 4E-10 500 VA 230 207 190 210 160 9 420, 440, 480 VAC (50 Hz) 420 to 520 VAC (60 Hz) IDF-TR500-4 22 11 13 Accessory (Option) Base Integrated with a Transformer

IDUS/IDFS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com J K Draft air outlet A B D E Power cord outlet Air outlet Air inlet 22 C Draft air inlet F L 16 M HA AT Model IDUS3E IDUS4E Port size A B C D H K J L M E F G 297 330 315 380 260 470 540 85 130 350 325 440 Rc 1/2 ID 85 130 Rc 1/2 440 260 560 540 297 330

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Since this will make it impossible to satisfy the specifications, operate with adjustment within the range of maximum values. 11-5-22 22 Rotary Table: Basic Type Vane Style Series MSUB These drawings indicate the condition when the B port is pressurized.

CC

.: 0.5 MPa Operating oil: Additive turbine oil Class 1 (ISO VG32) Oil piping length: 1 m RE A B Flow control valve Flow control valve Throttle valve Throttle valve Stop valve REC CX CCVS20/21/22/23 CCVS02 CCVS10/11/12/13 CY Piping bore Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) MQQ M Courtesy of Steven Engineering, Inc

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

Applicable bore A 1.08 B 0.38 C 5/8-18 UNF D 20JM-08 0.94 3/4", 7/8" 1 1/16" JM-10 1.12 1.30 0.42 3/4-16 UNF 1 1/4", 1 1/2" Data JM-14 1.61 1.86 0.43 1 1/4 -12 UNF 2" 6-14-21 22 Series NCM Double Acting/Single Rod/Band Mounting Auto Switch Mounting Position and Mounting Height D-H7/H7W/H7F/H7BAL D-C7/C8 HS HS 0.63 0.63 SMC SMC 1.02 A B A B 1.14 (1.42) ( ): D-H7LF D-G59/K59 D-B5/B6/B59W

Guide Table Series MGF ø40, ø63, ø100 1

If a greater rotational torque is applied, the non-rotating rod (page 8-23-9) bends, exceeding the value of the nonrotating accuracy. 100 13 17 22 30 8-23-4 5 Guide Table Series MGF Operating Conditions Allowable horizontal load Allowable eccentric load The maximum value of load which can be applied at an eccentric position at a distance of l (mm) from the cylinder center. l l m m0 MX MTS