EX500 Gateway System Serial Transmission System Series SV ® How to Order Manifold Mounting Direct mounting Nil D DIN rail mounting (With DIN rail) Series D0 DIN rail mounting (Without DIN rail) 1 SV1000 D3 When a longer DIN rail is For 3 stations

Tie-rod base SS5V W 1 A2W D 05 U 10S Cassette base U SS5V W D 05 16S 1 A2W Enclosure IP67 specifications DIN rail length specified Series Standard length Nil 3 SI unit 1 2 SV1000 SV2000 Specify a longer rail than the standard length.

 MICRO MIST SEPARATOR REGULATOR 

AW*-OMF0053-A PRODUCT NAME MICRO MIST SEPARATOR REGULATOR MODEL/ Series AWD20-(F,N)01(F,N)02(B,C,E,G,H)(-1,2,6,C,J,N,R,Z) AWD30-(F,N)02(F,N)03(B,C,D,E,G,H)(-1,2,6,8,J,N,R,W,Z) AWD40-(F,N)02(F,N)04(B,C,D,E,G,H)(1,2,6,8,J,N,R,W,Z) Contents PAGE 1. SAFETY INSTRUCTIONS 15 2. APPLICATION 6 3. SPECIFICATIONS 6 4. HOW TO ORDER 6 5. MAXIMUM APPLICABLE FLOW RATE 7 6.

One-touch Fittings

1 4, 6 (Oval type release button) Oval type release button KQ2 8 to 16 H 08 01 G S (Round type release button) Male thread seal method Symbol Seal method Nil Without sealant S With sealant Model Thread material: Stainless steel 303 One-touch fittings Port size/Applicable tubing O.D.

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

Wl00-3-2 (s-sta.) Mounting screws: MT624-26 fincluded with manitold bar) Blank station kit: WFl00-02 Hol'VTO ORDER NVV3F1-30OO1 -01T-F ---T---_ T _ T I loptions | -None To order assembled manifold and valves: Ex.

ASP

Model D3 T2 L5 11.6 15.2 12.8 15.2 15.2 18.5 18.5 20.9 14 15.8 18 19.7 20.3 23.1 13.7 18.7 16.8 18.7 18.7 20.8 20.8 21.8 38.4 44.7 43.4 46.4 51.3 54.1 64.2 66 32 35 65 68 107 110 212 215 22.9 28.2 25.2 28.2 28.2 32.6 32.6 34.4 34.6 33.9 11.8 39.6 38.9 6 8 6 8 8 10 10 12 ASP330F-01-06S ASP330F-01-08S ASP430F-02-06S ASP430F-02-08S ASP530F-03-08S ASP530F-03-10S ASP630F-04-10S ASP630F-04-12S

NVKF

(AC24V) Bdy potted vKF300.11A.1 (With bracket) M5) (Manifold only) ,_Without subplate 01T 1/s NPTF subplate Indicator light / Surge voltage suppressor 'S With surge voltage supprdssor 7 With indicalor light and surge voltage suppressor (D type only) " Special order * Z oplion is not available wilh grommel. ' Special ofcler Construction / Parts List Symbol . .rf--rF t / V \ I ] \ N L I T I

BP1000

Welded Connection Series Back Pressure Regulator for Ultra High Purity Series BP1000 For UHP gas delivery Operating pressure: 0.5 to 300 psig (0.0034 to 2.1 MPa) Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e BP10 01 2PW FV4 FV4 S Bonnet option Operating pressure Code Bonnet Standard Panel Installation 3) Code

3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Nil Without port (For manifold) (8A) 1 4 02 Electrical entry Light/Surge voltage suppressor CE-compliant CE-compliant G Grommet, 300 mm lead wire H Grommet, 600 mm lead wire Electrical entry D T C H G Only"D" Symbol Nil S Z C Conduit Note) Note) T Conduit terminal Note) D DIN terminal Symbol S: With surge voltage suppressor Note) Refer to the figure below.

HRX-OM-W069

Both ends of the communication connection (the end nodes) need to be connected to the higher level computer. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

Assembly of check valve body assembly, check valve cover and 2 screws Please consult SMC for special application specifications. 8 Series ARP20/30/40 Working Principle (Regulator with Backflow Function) ARP20K/30K/40K w A-A A 1 I N 2 OUT C SM A w w Inlet pressure Pressure in diaphragm chamber Inlet pressure Pressure in diaphragm chamber (IN side) (IN side) r r IN (Inlet pressure) OUT (Outlet

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Assembly of check valve body assembly, check valve cover and 2 screws Please consult SMC for special application specifications. 8 Series ARP20/30/40 Working Principle (Regulator with Backflow Function) ARP20K/30K/40K w A-A A 1 I N 2 OUT C SM A w w Inlet pressure Pressure in diaphragm chamber Inlet pressure Pressure in diaphragm chamber (IN side) (IN side) r r IN (Inlet pressure) OUT (Outlet

Valve Size: 4 (Series: 40), Valve Type: 1 (N.C.), Body Material: S (Stainless Steel), Seal Material: T (Fluororesin), Port Size: 25A (1), Thread Type: N (NPT), Head Size: 4 (ø63), Head Material: S (Stainless Steel)

Valve Size: 4 (Series: 40), Valve Type: 1 (N.C.), Body Material: S (Stainless Steel), Seal Material: T (Fluororesin), Port Size: 25A (1), Thread Type: F (G), Head Size: 4 (ø63), Head Material: S (Stainless Steel)

Valve Size: 4 (Series: 40), Valve Type: 1 (N.C.), Body Material: S (Stainless Steel), Seal Material: T (Fluororesin), Port Size: 25A (1), Thread Type: R (Rc), Head Size: 4 (ø63), Head Material: S (Stainless Steel)

Process Valve: 2 Port Valve For Compressed Air and Air-hydro Circuit Control VNA Series VNA 2 1 1 A A 1 0 15A 1 15A T Bracket (Valve size: 1/2/3/4.) Nil B Note) None With bracket Manual override Rated voltage 1 1 1 2 N.C. N.O. C.O. Port size Rc ø15 ø10 ø2

Hydraulic fluid 40 to 100 mm2/s DIN terminal DIN terminal with light/surge voltage suppressor Caution CE-compliant This product cannot be used for water application.

Option Nil B ∗ None With bracket L With indicator (visual verification of operation) BL ∗ With bracket and indicator (visual verification of operation) 1 1 Port size Rc 1 8 1 4 3 8 3 8 1 2 3 4 1 4 1 1 2 1 1 4 B Flange 1 1 2 B Flange 2B Flange Rc G NPT NPT

Steam Valve: 2 Port Valve For Steam VND Series How to Order Body option Thread type Standard (Copper alloy) Stainless steel body Nil S Rc G NPT NPTF Nil F N T Threaded type only VND 15A Air operated 2 D S 0 Option None With bracket Nil B L With indicator (visual verification of operation) BL With bracket and indicator (visual verification of operation) Brackets (for valve size 1/2/3/4 only

Residual Pressure Release Valve

(mm) 0.3 M M L2 L2 Applicable tubing Weight (g) Model Applicable tubing O.D. 6 8 10 12 D L1 L2 Q W M AQ 0.2 KEA06 KEA08 KEA10 KEA12 12.8 15.2 18.5 20.9 24 27 29 31 21 23 26.5 28.5 5.3 6 6.8 7.5 13 15.4 18.7 21.1 17 18.5 21 22 10 15 22.5 29.5 ASV 0.05 MPa 0.1 0.05 AK 10 8 7 6 4 2 0 With One-touch fitting with a push button guard: KEB Release time S Release time of pressure in the cylinder

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

/W valve for vacuum applications.

AK1000

Refer to gauge guide (P.94,95). t t r w w w q q q Sample Order Number Port t r q 4 4 4 4 4 w 4 4 4 4 4 AK1002S e 2P 3P 4P 4PL 5PC 2P 3P 4P Pressure gauge unit 2) MPA MPA MPA MPA V3 V3 V3 V3 t r t 1 Unit psig/bar MPa Code 0 0 No code MPA w w q q 1 2) Pressure gauge unit MPa or psig/bar selectable.

Siiiil"Tivrc

1 I.{ 50 114 139 13 100 10 t 15 5 9 5.5 v 74 4.5 AMG25O 3/8 '152 13 1 1 3 6 10 '| 69 n '12 4 84 a 5 2 n Ai/lc350 1/2 144 16 145 s s '10 198 m 2 14 7 80 100 g 2.3 ANtG450 314 205 19 147 106 106 JO s 10 14 88 1 1 0 3.2 AMG55O 239 200 10 257 100 s 10 't6 102 130 m 10 4.5 AIVG&5O 1 112 291 c 253 r60 160 10 364 150 .10 20 1 1 s 136 180 4.5 2 48 a 348 220 ?