Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

MRQ

Linear Motion/Standard Motion Size Standard stroke (mm) 32/40 5, 10, 15, 20, 25, 30, 40, 50, 75, 100 Refer to p.1.5-18 for other intermediate strokes.

Refrigerated Air dryer Series IDU/IDF

(C) 55 50 60 70 80 IDU3D to 6D 45 50 55 65 75 IDU8D to 15C 45 50 55 65 70 IDU22C1, 37C1 40 45 50 55 60 IDU55C, 75C Ambient temperature (C) Outlet air pressure dew point (C) 15 10 5 15 10 5 15 10 5 15 5 10 5 15 10 1.35 1.35 0.60 1.35 1.35 0.60 1.35 1.35 0.60 1.35 0.60 1.35 0.60 1.35 1.35 25 1.35 1.05 0.50 1.35 1.05 0.50 1.35 1.10 0.50 1.35 0.60 1.20 0.55 1.35 1.25 30 1.25 0.95 0.45 1.25 0.95

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Type Pneumatic 1 MPa Max. operating pressure 0.1 MPa Min. operating pressure Specifications Mountable Auto switch Pneumatic Type Refer to pages 11-7-10 to 11-7-12 for dimensions.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Type Pneumatic 1 MPa Max. operating pressure 0.1 MPa Min. operating pressure Specifications Mountable Auto switch Pneumatic Type Refer to pages 11-7-10 to 11-7-12 for dimensions.

LC6D/LC6C

CW CW 10 10 2 R 330 CCW input 330 CCW input 2 2 9 1 CCW CCW 8 9 9 5 4 14 13 12 R 330 PD input 1 PD 8 11 F Functions Function change-over switch Input signal terminal CW pulse input terminal By applying the pulse input, the actuator moves from the motor side to the end side.

Self-seal Fittings Series KC

Nylon Urethane Effective orifice(mm 2) Weight (g) T (M) L Mounting hole M1 M2 KCE04-00 KCE06-00 KCE08-00 KCE10-00 KCE12-00 4 6 8 10 12 M12 1 M14 1 M16 1 M20 1 M22 1 14 42 13 15 17 21 23 18 19 21.5 24 25.5 16 17 18.5 21 22 21 30 39 84 115 2.6 6.8 13.1 20.4 30.4 2.6 6.8 16.2 25.6 35.4 17 19 24 27 45.5 52.5 59.5 63.2 Bulkhead female union: KCE Thread Rc (PT) 4 6 8 10 12 Effective orifice(mm

ZSE F/ISE

ZSE50F / ISE50 1 x 10 -5 Pam3/s ZSE60F / ISE60 1 x 10 -10 Pam3/s IP65 Enclosure Panel mount With bracket Option Panel mount + Front side protection cover To confirm working pressure of hydraulic cylinder Application examples To confirm adsorption of workpieces containing water To confirm primary pressure of cleaning line 16-2-26 3 High precision and high resolution 1/2000 (0.1 kPa) Positive

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

While the test function operates at manual mode, only the output is valid. 53

Series 12-REA Sine rodless cylinder

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2201F-02-06-X214 10-AS2301F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 Although speed adjustment is possible with

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

AS321FE AS331FE AS421FE AS431FE Model 8 10 6 8 10 12 12 10 6 8 10 Tubing O.D.

Clean Regulator

Model XT13-394-06 XT13-394-10 INA-48-1-06 INA-48-1-10 INA-48-16-10 INA-48-16-06 INA-48-58-10-H INA-48-58-06-H Port size Rc3/4 Rc1 Rc3/4 Rc1 Rc3/4 Rc1 Rc3/4 Rc1 Relief mechanism Non-relief Relief Non-relief Fluid Deionized water (Pure water) Air, N2 Proof pressure 1.9 MPa 1.5 MPa Max. operating pressure 1.3 MPa 1.0 MPa Set pressure 0.1 to 1.0 MPa 0.05 to 0.5 MPa 5 to 60C Ambient and fluid

PSE530/200

Internal data error. 16-3-10 10 Series PSE530/200 Multi-channel Controller/Pressure Sensor Operation 1: Initial Setting 1 Channel selection MPa kPa OUT1 OUT2 CH 1 2 3 4 CH2 CH3 CH4 CH1 PRESSURE ZSE ISE SET PSE SET button and hold for 2 seconds or longer.

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

N.O. 125 VAC 15 15 4 2 10 10 4 2 250 VAC 15 15 3 1.5 10 10 3 1.5 8 VDC 15 15 3 1.5 15 15 5 2.5 15 15 3 1.5 10 10 5 2.5 14 VDC 30 VDC 3 6 6 1.5 5 5 5 2.5 125 VDC 0.5 0.5 0.3 0.3 0.05 0.05 0.05 0.05 250 VDC 0.25 0.25 0.2 0.2 0.03 0.03 0.03 0.03 16-12-6 2 Paddle Style Flow Switch Series IF3 Fluid and Ambient Temperature Range Enclosure Open type Using indoors away from water drop.

PSxx-OMM0002CN

No.PS-OMM0002CN-F / / ZSE80(F) ISE80(H) 2 9 10 11 14 14 16 17 19 19 21 21 21 F0 23 F1 OUT1 24 F2 OUT2 27 F3 27 F4 / 28 F5 30 F7 31 F8 32 F9 34 F10 35 F98 36 F99 38 39 42 42 43 50 50 52 -1No.PS-OMM0002CN-F (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems.

ISA2

40 42 97 IS ZSM With regulator + 2 port solenoid valve With 2 port solenoid valve PF2 IF Data SUP port on the right 97 Conduit terminal Conduit terminal 82 DIN connector DIN connector 0 0 T E S T E S 9 9 162 0.3 0.3 0.15 0.1 0.05 133 0.4 128 0.4 MPa 0.2 0 103 64.4 SUP port Rc, NPT, G 1/8 SUP port Rc, NPT, G 1/8 Throttle needle 25 40 10 42 With regulator + 2 port solenoid valve With 2 port

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

IDX-OM-Y002

Option R . 10-1 10.1 Safety instructions for use . 10-1 10.2 Specifications. 10-1 10.3 Connection of power supply . 10-2 10.4 Handling Precautions of the Earth Leakage Breaker . 10-2 10.5 Electrical circuit diagram . 10-2 Chapter 11 Inspection record . 11-1 11.1 Inspection record . 11-1 IDF190D/240D Series IDX-OM-Y002 Chapter 1 Safety Chapter 1 Safety 1.1 Before Using the Air Dryer Before

AMF

bracket Model Port size (Nominal size B) A H B C D E F G I 221 J 25 K 10 L 14 N 90 O 55 P 110 Q 50 R 88 S 3.2 AM 1 2 3 4 , 9 36 205 19 100 106 3 106 10 AMF450 212 22 107 106 3 106 10 36 221 21 10 14 9 90 55 110 50 88 3.2 1 Misc. , , , 1 1 4.5 4.5 6 3 4 257 314 406 30 40 30 10 15 15 16 20 24 9 11 13 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 44 66 96 239 291 403 22 32 42 128 167

ZQ-OM01601

DC24V10% DC24V 10% DC(+) DC(-) 8 / / 9 ( ) 10 , 5 m / / 11 1015 10 "-M" (kPaMPa) ( ) "M" 12 SI kPa,MPa 48 - No. 13 14 () 15 () / ( ) () 49 - 80mA 3.5 F.S.1 1F.S. 50 - 100.0-100.0 kPa 105.0-105.0 kPa 500 kPa 0.1 kPa DC24 V 10(p-p)10() 40 mA NPN PNP OUT1OUT2 80 mA DC26.4 V 2 V (80 mA ) 2.5 ms (20,100,500,1000,2000 ms ) 0.2F.S.1 digit 1 0 3 1/2 7 LED () 2% F.S