SMC Corporation of America
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Normal output Reversed output P_1(P_2)=A-(A-B)/4 n_1(n_2)=B+(A-B)/4 A = Maximum pressure H_1(H_2)= (A-B)/2 H_1(H_2)= (A-B)/2 B = Minimum pressure If setting is not necessary press the UP and DOWN buttons simultaneously for 1 second or longer. -34No.PS-OMW0002-C [F 6] Fine adjustment of display value This function is to manually perform a fine adjustment of the displayed pressure value.

How to Calculate the Set Value A = Max. pressure value in auto preset mode B = Tentative min. pressure value in auto preset mode P1 = A (A B)/4 P2 = B + (A B)/4 Manual adjustment is possible after finishing in the auto preset mode. Ex.) When an error count (number of the failure predict) (EC) is set to be 3.

Fluid Table (1) Rated Voltage-Electrical Entry-Electrical Option Standard specifications Option (1) Made to Order (2) Water (standard) Turbine oil High temperature water (D, E) Air X500B Vacuum (up to 1.3 x 10 2 Pa) X500B For pure water X500 G C Class B D, T Class H G, C T S Note) S L, Z L, Z S Note) Surge voltage suppressor is attached in the middle of lead wire.

A2 Bracket B (Option unit part no.: ZS-38-A2) 42.5 (A) A3 Bracket C (Option unit part no.: ZS-38-A3) Bracket configuration allows mounting in four orientations. 30 1.6 25 20 20 45 30 5.2 5.5 5.2 9.1 13.6 A B 41.4 16.4 Bracket B B 7.5 7.2 53 28 Bracket C 20 7 Series ZSE30A(F)/ISE30A Dimensions Panel mount Z/ISE30A(F) Option 2 B Panel mount adapter (Option unit part no.: ZS-27-C) 7.2 17.8 8

How to see the manufacturing code R O 001 January 2013 O O 001 Year Symbol Remarks Month Symbol Remarks Serial no. 2013 R Repeated from A to Z in alphabetical order 1 O Repeated from O to Z in alphabetical order, with O for January and Z for December 2014 S 2 P 2015 T 3 Q Fig. 1-3 Position of product label 1.5 Safety Measures 1.5.1 Safety Instructions for Use Follow the instructions below

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

The set values for OUT1 are displayed in auto-preset mode as follows: Normal output Reversed output P_1 = A (A B)/4 n_1 = B + (A B)/4 A = Max. pressure H_1 = (A B)/2 H_1 = (A B)/2 B = Min. pressure The display of set values of OUT2 is changed at the number after "_", i.e. "P_2", "n_2" and "H_2".

A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

Without bracket (Bottom view) Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13(Z) 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14(Z) 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26(Z) 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38(Z) 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13(Z) 48 39 4.6 12 11.5 52 28

Refrigerant type and amount * Example: IDF60-20 Front Structure of the product number W R 0001 (2018 April) W R 0001 Year Symbol Note Month Symbol Note Serial No. 2018 2019 2020 2021 W Repeated from A to Z in alphabetical order 1 2 3 4 o Repeated from A to Z in alphabetical order, with o assigned for January and Z for December.

Front Structure of the product number W R 0001 (2018 April) W R 0001 Year Symbol Note Month Symbol Note Serial No. 2018 2019 2020 2021 W Repeated from A to Z in alphabetical order 1 2 3 4 o P Repeated from A to Z in alphabetical order, with o assigned for January and Z for December.

Endurance 10 G; X, Y, Z directions, 3 times each Impact resistance 350 g or less Weight 1) 90 phase difference input Multi-counter/Dimensions A phase I 24-M3 x 0.5 B phase J A B C D A COM COM COM B 12 VDC GND F.G.

Size: 1, Thread: NPT, Port Size: 1, Accessory: Float Style Auto Drain, N.C., Attachment: Pressure Switch, Option 1: 0.2MPa + Nylon Bowl, Option 2: None, Option 3: Name Plate, Caution Plate for Bowl, and Pressure Gauge: PSI, °F

Auto switch groove positions (mm) B 6.9 8.8 13.7 17.1 A 10 14 19 26 Bore size (mm) 6 10 16 20 4-4.2 Auto switch mounting groove B A 38

B MY CY 22 (20) MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A CX D-A9V D-M9V D-F9WV D-X 20( ): Denotes the values of D-M9V, D-F9WV. 5(7) B W Data D-A9, D-A9V D-F9W, D-M9 D-F9WV, D-M9V Bore size (mm) A A W B W B A W B 6 12.5 3.5 (6) 16.5 7.5 2.5 16.5 5.5 2.5

B Slotted locking type Nil Without valve unit Light/Surge voltage suppressor Nil None With light/surge voltage suppressor (solenoid valve connector type only) Pilot valve specifications Z DC: 1W type (with light: 1.05W) S With surge voltage suppressor Nil AC type Electrical entry DC: 0.45W type (with light: 0.5W) Y Nil Air operated For 24, 12, 6, 5, 3 VDC L Lead wire length 0.3m LN Without

(Female) B O D Y S I Z E P O R T S I Z E 2 1/4 3 3/8 5 3/4 6 1 8 1 1/2 9 2 02 1/4 03 3/8 04 1/2 06 3/4 10 1 14 1 1/2 20 2 T H R E A D T H R E A D 1 Male 2 Female (Only NAMC220, 320, 520 Special Order Only) R(PT)* Remove (N) when ordering N NPT FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE E5G

x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYV15 CYV32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m: Load mass [kg] L: Distance to load center of gravity [mm] A, B: Distance to guide shaft [mm] g: Gravitational acceleration [9.8 m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Central axis of guide Central

x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYV15 CYV32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m: Load mass [kg] L: Distance to load center of gravity [mm] A, B: Distance to guide shaft [mm] g: Gravitational acceleration [9.8 m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Central axis of guide Central