KPQU04-M5 KPQU04-01 KPQU04-02 KPQU06-M5 KPQU06-01 KPQU06-02 KPQU08-01 KPQU08-02 KPQU10-02 KPQU10-03 KPQU12-03 KPQU12-04 38 38 42 41.5 41.5 45.5 49.5 54.5 58 55 60.5 63.5 41.7 44.2 48.2 44.9 47.4 51.4 55.5 60.6 63.8 61.3 67 71.4 10 11 20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection
Model Option Code Cv 0.23 0.28 Code Specification Indicator switch 3) 00 02 No code IS 3) Indication of opened/closed status.
mountable number 3 port valve mountable number 00 02 04 00 02 04 No 2 port valves used 2 pcs.
KPGU04-M5 KPGU04-01 KPGU04-02 KPGU06-M5 KPGU06-01 KPGU06-02 KPGU08-01 KPGU08-02 KPGU10-02 KPGU10-03 KPGU12-03 KPGU12-04 41.7 44.2 48.2 44.9 47.4 51.4 55.5 60.6 63.8 61.3 67 71.4 38 38 42 41.5 41.5 45.5 49.5 54.5 58 55 60.5 63.5 10 11 20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection
(-F2) In case with foot bracket 52-SY7120-L-02-(F1) 29.4 20 2 x M4 x 0.7 Threads depth 6.5 (For bracket mounting) 57 24.5 7 46 5.5 19.8 28 38 79.2 Manual override Insulation: Black () 14.7 B 13.6 40 A Insulation: Red (+) 2 x 4.2 (Mounting holes for manifold) 20 2 x 1/4" {A (4), B (2) port} 42 (14) 1.2 (52) (2 x 4.2 Mounting holes) 44 (For E type) (49.5) 0.3 mm2 (42.5) 40 40 14.7 125 (39.4
Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80, 100 R 1/2 AS121F-U10/
Actuator rating Maximum work piece load: 5kg Maximum speed: 600mm/s Maximum stroke: 500mm Maximum work piece load: 8kg Maximum speed: 500mm/s Maximum stroke: 600mm Series LJ1H30 LJ1H3031A-K (10mm lead) 500 When an actuator is operated under conditions that exceed the lines on the graph to the left, be sure to use a regenerative absorption unit. 450 400 8kg 350 Example) A Speed (mm/s) 300
32.5 M5 x 0.8 (Breathing hole) 16 X 40 80 3/8, 1/2 1(P) port 1568 3 Port/Air Operated Valve Manifold Common Exhaust Type 41 / Individual Exhaust Type 42 VPA300/500/700 Series SYA How to Order Manifold SYJA VZA VV3PA 3 1 41 04 02 Type 41/Common exhaust VFA VFRA Series 3 5 7 Thread type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF VPA4 SYJA VZA Port size Stations 02 Symbol Port size Applicable
(C04) C08 (C06) 02 (C06) 02 (C08) Port size w C10 (C08) 02 (C08) C12 (C10) 02 (C10) 02 (C12) Model Port size q C04 (C06) C04 (02) C06 (C08) C06 (02) C08 (02) Model Port size q C08 (C10) C08 (02) C10 (C12) C10 (02) C12 (02) SFD100SFD200326
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Wl00-3-2 (s-sta.) Mounting screws: MT624-26 fincluded with manitold bar) Blank station kit: WFl00-02 Hol'VTO ORDER NVV3F1-30OO1 -01T-F ---T---_ T _ T I loptions | -None To order assembled manifold and valves: Ex.
Valve stations 02 2 stations VK A port size (Base mounted) 20 20 stations VZ Max. 20 01 02 common exhaust/individual exhaust 1 8 individual exhaust 1 4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Please indicate manifold base type, applicable manifold valve
ASS AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 ASR ASQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FG AS331FG AS421FG AS431FG
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SYA 5 1 Base mounted P, R port thread type Series 3 SYA3000 5 SYA5000 Rc Nil G F 40 SYA 7 1 Base mounted N NPT NPTF T P, R port thread type Type of actuation Rc Nil 2 position single G F Port size 1 N NPT Port size Without sub-plate Symbol Applicable series Nil NPTF T 2 position double 1 8 01 SYA3000 Port size With sub-plate 2 1 4 Port size Without sub-plate Symbol Nil With sub-plate 02
~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".
Both ends of the communication connection (the end nodes) need to be connected to the higher level computer. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.
) (52) (5.5) 47.6 VPA4 SYJA (49.5) (42.5) SYA7220-02-(F2) VZA 30 24.5 1/4 (A, B port) 15 VTA 20 Manual override 1/4 (P port) 2 x 1.8 (Breathing hole) 0.9 VGA 2 40 (23.9) VPA 18 30 24.5 EB P EA VPA3 2 x 2.2 die-cast hole (For manifold gasket positioning) 1/8 (EA, EB port) 36 3 position closed center / exhaust center / pressure center SYA7 20-(F2) C8, N9 C10, N11 3 4 5 109.7 48.1 51.6 38.1
KPGU10-02 KPGU10-03 KPGU12-03 KPGU12-04 KPQU04-M5 KPQU04-01 KPQU04-02 KPQU06-M5 KPQU06-01 KPQU06-02 KPQU08-01 KPQU08-02 KPQU10-02 KPQU10-03 KPQU12-03 KPQU12-04 40.7 42.3 46.7 43.9 45.5 49.9 53.6 59.1 62.3 59.2 64.9 69.5 10 11 20 12 11 21 15 23 30 40 40 65 11 37 4 17 4 4 10.4 10.4 KDM 14 41 M 13 40.5 6 18.5 10 10 12.8 12.8 KB 8 A L 14 44.5 48.5 53.5 57 54 59.5 62.5 4.2 8 17 15.2 20.5 26 18
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