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R LR DD E R F M FL Dimensions Part No.

Parameter is not registered (0-901) E < Details > An alarm is generated when the step data is executed without step data setting. Download the step data to the controller. Turn off the main control and motor control power supplies. Step data is not registered (0-902) E < Details > System error occurred.

ON(SVON ON) (1-193) E <> ONSVON ON <> (1-194) E <> <> (1-195) E <> <> 1-196 E <> <> EEPROM (1-197) E <> EEPROM 10 <> CPU CPU CPU (1-198) E <> 48 No.SFOD-OMT0011CN-A Revision history No.

2 w y r u e ASN !2 t AQ ASV AK VCHC ASR ASQ i q o !0 !1 i q o !0 !

Refer to gauge guide (P.94). r w q w q Sample Order Number Port 2P 4PL 01 S BP10 e r t 0 4 4 4 4 1 MPA e 2P 4PL qIN wOUT erGauge port (Inlet) Specifications BP1030 15 to 300 psig (0.1 to 2.1 MPa) BP1001 0.5 to 10 psig (0.0034 to 0.07 MPa) BP1002 1 to 30 psig (0.007 to 0.2 MPa) BP1006 2 to 60 psig (0.014 to 0.4 MPa) BP1010 5 to 100 psig (0.034 to 0.7 MPa) BP1020 15 to 200 psig (0.1 to 1.4

Welded Connection Series Back Pressure Regulator for Ultra High Purity Series BP1000 For UHP gas delivery Operating pressure: 0.5 to 300 psig (0.0034 to 2.1 MPa) Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e BP10 01 2PW FV4 FV4 S Bonnet option Operating pressure Code Bonnet Standard Panel Installation 3) Code

Current output Load impedance Maximum load impedance: Power supply voltage 12 V: 300 , Power supply voltage 24 V: 600 Minimum load impedance: 50 4-digit, 7-segment, 2-color LCD (Red/Green) 2% F.S. 1 digit (Ambient temperature of 25 3C) Lights up when switch output is turned ON.

Description Housing Outside tube Body Flower fin tube assembly Material Note SGP, SS400 STK FC200 C1220T Flower fin Flower fin q w e r q w e r Water chamber cover FC200 t AFF AM Replacement Parts Replacement Parts Misc. HAW22 HAW55 HAW75 HAW37 HAW110 No. Description HAW2 HAW7 Material No.

Fluid Name and Option Option symbol and body material Fluid (Application) Brass B Stainless steel J J H H Q P M H M M P Ethyl alcohol Caustic soda (25% ) Gas oil Silicon oil Steam system (Steam) (Max. 183C) Steam system (Condensation) (Max. 99C) Medium vacuum (up to 0.1 Pa.abs) Parachloroethylene Helium Non-leak (10 6Pam 3/s) Heated water (Max. 99C) A A S E V A V V E Note 1) The leakage

2V MAX.28V80mA 2V 34 - No.ZB-OM00301 // PV=PD ZB11-K1PVPD ZB0020-K1/ PV ZB11-J1PV ZB0010-J1/ PVPD ZB21-Q1L(O)-P PVPD ZB0020-K1L(O)-P 1 3 1 3 35 - No.ZB-OM00301 // PV=PD ZZBZB31-K1D U / PVPD ZZB-SM5 ZB31-Q1L(O)E F D U / PVPD ZZB-SM5 ZB0030-K1L(O)E F D U 36 - No.ZB-OM00301 ZB1/2-K1 46 ZB3-K11 40 g ZB1-PS-A 5 ZB1-ZS-A Assy 14 1 2 3 4 5 6 7 8 9 10 11 12 g 16 22

32.5 38 49 20 20 23 30 30 35 23 23 25 113 127 162 103 118 152 33 37 28 1 1 1 2 17-3-76 7 The VX series will be revised shortly.

PF-OMK0003CN-E / 1 1.5 *3) 1 1 [] -3No. PF-OMK0003CN-E () () -4No. PF-OMK0003CN-E () * ,UL UL1310 2 UL15852 30[Vrms] (42.4[V ])(2 ) UL JIS B 8392-1 1.1.21.6.2 -5No. PF-OMK0003CN-E * (1 /) FG 49N ) 1 () -6No. PF-OMK0003CN-E *() 6 33 2 () () 10m DC(-)() () -7No. PF-OMK0003CN-E * ( ) () CE 050 -8No. PF-OMK0003CN-E * 523 * -9No. PF-OMK0003CN-E (11 ) -10No.

Brazil EXW1-BMJAAE E EXW1-BMJAAN N EXW1-BMJABE E EXW1-BMJABN N A Base MJ B A B EXW1-RDXNE4AE E EXW1-RDXNE4AN N EXW1-RDXNE4BE E EXW1-RDXNE4BN N EXW1-RDYNE4AE E EXW1-RDYNE4AN N EXW1-RDYNE4BE E EXW1-RDYNE4BN N EXW1-RDMPE3AE E EXW1-RDMPE3AN N EXW1-RDMPE3BE E EXW1-RDMPE3BN N EXW1-RDMNE3AE E EXW1-RDMNE3AN N EXW1-RDMNE3BE E EXW1-RDMNE3BN N A DX N B E4 A EXW1 DY N B Remote R A P B DM E3 A N B -17No.EX-OMZ0016

Spring Return/Double ClevisType (D) r.rclzol e*" "iaF] srotd s Clevis pin included 2A I @sil/tr SERIES NCJ2 Standard Type: Single Acting/ Spring Extend Spring Extend/Basic TYPe (B) r.rcrze [E-" "izel-lst t"l r NCJ2B10, 16 '06 (1i4') e 16 (Y8") Spring Extend/Foot TyPe (L) nc.

Spring Return/Double ClevisType (D) r.rclzol e*" "iaF] srotd s Clevis pin included 2A @sil/tr I SERIES NCJ2 Standard Type: Single Acting/ Spring Extend Spring Extend/Basic TYPe (B) r.rcrze [E-" "izel-lst t"l r NCJ2B10, 16 '06 (1i4') e 16 (Y8") Spring Extend/Foot TyPe (L) nc.

A B C D E F G H J 1.6 M5 2.3 3.2 For other special options, refer to page 462.

'/s stl=0.44 300 (3") ]/s & 1/a st. 1/e &r/l st. 1/e & 1A st. 400 (4) 1/s &1/a st. r/s & 1/a st. 1/e &14 st. Series NCQT Dimensions Spring Extend NCQTBO-OT T Type Bore,, 9t4,F' I 60re ,b,:!

Fluid Electrode Electromotive force (E) The electromotive force (E) is proportional to the fluid velocity (V) multiplied by the magnetic flux density (B). The volume flow is calculated by converting the measured electromotive force (E). An oval fluid passage is used to improve the magnetic flux density generated by small amounts of current.