Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

4-J Depth JK Thread depth PC (from counterbore surface) 2-P 2-Counterbore dia.

Fluoropolymer Piping Equipment

Body Needle V seal Lock nut Adjustment handle Insert bushing Nut Collar A 1 2 3 4 5 6 7 8 PFA PCTFE PTFE PVDF PVDF PFA PFA PFA Body class 2 y u y u B Dimensions A (B) (max.S) D H Port A 2 x G SMC (J) SMC C E F K Port B E A B C D E F G H J K S Model 48 60 72 LVN20 LVN30 LVN40 24 30 36 12 18 22 88 110 124 34.5 43 52 6 9 11 4 5 6 14 25 25 20 26 33 18 24 30 2.4 7.5 8.0 940 LQ1/LQ3/LVN/LQHB Series

IDX-OM-W094

(REFRIGERANT) IDFA60-23 W R 0001 (2018 4 ) W R 0001 o 1 Z 12 o P Q R A Z 1 2 3 4 W X y Z 2018 2019 2020 2021 IDFA60/70/80/90 Series 1-4 IDX-OM-W094 1.3 HFC 1-4 IDFA60/70/80/90 Series 1-5 IDX-OM-W094 1.4 / 1 1.5 () IDFA60/70/80/90 Series 1-6 IDX-OM-W094 2 2.1 IN OUT (ONOFF ) 6-4 6-4 L N PE 3-5 IDFA60/70/80/90 Series 2-1 IDX-OM-W094 () IDFA60/70/80/90 Series 2-2 IDX-OM-W094 3

Compact End Lock Cylinder Series CBQ2

Y LX LZ 4-LD Bore size (mm) LS + Stroke A + Stroke LG LH LZ X Y LT LX LY 32 4 30 3.2 57 57 71 11.2 5.8 Rod end male threads 40 4 33 3.2 64 64 78 11.2 7 50 5 39 3.2 79 78 95 14.7 8 63 5 46 3.2 95 91.5 113 16.2 9 L1 Rod end nut Front flange type/CBQ2F, CDBQ2F (mm) Front flange type With rear lock With front lock Bore size (mm) FD FT FV FX FZ A B A B FV M 82.5 65.5 75 58 5.5 8 48 56 65 32 92

3 Position Cylinder Series RZQ

X Y X Y LS Full stroke LG LZ LX 4-LD 57 57 71 11.2 5.8 32 A + Full stroke 64 64 78 11.2 7 40 79 78 95 14.7 8 50 95 91.5 113 16.2 9 63 Front flange type/RZQF Flange (mm) FV M Bore size (mm) AR AH B FD FT FV FX 100.5 108.5 82.5 5.5 56 8 50 32 110 118 92 5.5 62 8 56 40 L B + Full stroke FX FZ AR + Full stroke 118.5 127.5 96.5 6.6 76 9 67 50 130 139 102 9 92 9 90 63 Bore size (mm) Rear flange

IDX-OM-U010

Front Structure of the product number W R 0001 (2018 April) W R 0001 Year Symbol Note Month Symbol Note Serial No. 2018 2019 2020 2021 W X y Z Repeated from A to Z in alphabetical order 1 2 3 4 o P Q R Repeated from A to Z in alphabetical order, with o assigned for January and Z for December. 1.2 Hazard classifications/ Hazard Warning Labels IDFC60/70/80/90 Series 1-4 IDX-OM-U010 Chapter

IDX-OM-W095

(REFRIGERANT) IDFC60-23 W R 0001 (2018 4 ) W R 0001 2017 2018 2019 2020 V W X Y A Z 1 2 3 4 o P Q R o 1 Z 12 IDFC60/70/80/90 Series 1-4 IDX-OM-W095 1.3 HFC 1-4 IDFC60/70/80/90 Series 1-5 IDX-OM-W095 1.4 / 1 1.5 () IDFC60/70/80/90 Series 1-6 IDX-OM-W095 2 2.1 IN OUT (ONOFF ) 6-4 6-4 L N PE 3-5 IDFC60/70/80/90 Series 2-1 IDX-OM-W095 () IDFC60/70/80/90 Series 2-2 IDX-OM-W095 3

IDX-OM-V020

X y Z Q R 1.2 Hazard classifications/ Hazard Warning Labels IDFA60/70/80/90 Series 1-4 IDX-OM-V020 Chapter 1 Safety Instructions 1.3 Waste Disposal When you dispose of the product, you should collect the refrigerant and the refrigerant oil enclosed in the refrigerant circuit. CAUTION This product uses Fluorocarbon (HFC) as a refrigerant.

Compact

+X +Y X Y End deflection (when extended) + Non-rotating accuracy 5 Compact Cylinder with Linear Guide MXZ Series Mounting Bolt Mounting Bolt for MXZ When using through holes, use the mounting bolts from the CQ series. Refer to the following for ordering procedures. Order the actual number of bolts that will be used. Example) CQ-M3 x 25 L 2 pcs.

High Purity Fluoropolymer Needle Valve Series LVN 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Number of needle rotations Number of needle rotations Number of needle rotations Construction t r w e With reducer q i A y u y u Part lists y Description No.

VXD21/22/23

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VXD2272/2382/2392 VXD2270/2380/2390 Operation When the coil o is energized, the armature assembly u is attracted into the core of the core assembly y and the pilot valve A opens.

MVGQ

G5-S 50 stroke or less CV MVGQ CC RB J DKit no.

MHL2

50 70 Note 1) J dimension is at fully closed.

MHL2

J dimension is different from the value which is subtracted stroke from G dimension.

10

J dimension is different from the value which is subtracted stroke from G dimension. 8 MHL2 Series Dimensions MHL2-16DmZ 8 8 10 2 x M5 x 0.8 thread depth 7 (Mounting thread) D Closed J View K (Fingers closed) The above figure shows the MHL2-16D1Z/16D2Z.

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

Note) Metric size 23 04 06 08 10 12 Inch size 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 Made to Order (For details, refer to page 622.)

Manifold Regulator Modular Type ARM2500/3000 Series

GA33-10-01 Outlet pressure (MPa) ARJ AR425 to 935 ARX Width across flats 10 AMR ARM ARM Note 1) in the gauge part no.

Electro-Pneumatic Positioner Series IP8000/8100

joint M Fork lever joint S For stroke 35 to 100mm with lever unit For stroke 50 to 140mm with lever unit Compensation spring (A) With external scale plate Lever type feedback Rotary type 000 100 B Note 3) Pressure gauge C D E Note 4) Accessory for IP8100 0 1 2 3 None 0.2MPa 0.3MPa 1.0MPa Accessory for IP8000 F Note 4) GNote 5) For IP8000, 8100 Accessory for IP8100 Accessory for IP8100 H J

AS: AS, Size: 2 (1/8, 1/4 Basis), Style 1: 2 (Elbow), Control Type: 0 (Meter-out), Thread: N (NPT), Port Size: 01 (1/8), Tube Size: 01 (1/8"), Option: None, Lock Nut: J (Round)

AS: AS, Size: 2 (1/8, 1/4 Basis), Style 1: 2 (Elbow), Control Type: 0 (Meter-out), Thread: N (NPT), Port Size: 01 (1/8), Tube Size: 01 (1/8"), Option: S (Sealant), Lock Nut: J (Round)