Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -

Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -

Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -

AMPSeries

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Clamp Cylinder Series CK1

(Same surface) Hs 22 B A D-A93 24.5 10.5 16.5 50 50 50 D-M9B D-M9BW D-B54 50 50 75 Auto Switch Mounting Position and Its Height Unit: mm 8.5 Auto switch set value and its height 63 7.5 30.5 47 11.5 34.5 47 2 25 50.5 Auto switch Symbol 40 11 23.5 34.5 15 27.5 34.5 5.5 18 38 50 7.5 30.5 40 11.5 34.5 40 2 25 43.5 A B Hs A B Hs A B Hs D-B54 D-A93 Hs B A 33 D-M9B D-M9BW D-B54 12 Note 1) The

Pilot Operated

Approx. 280 Q L M Approx. 300 G1/2 N f N B OUT IN 1 E C F H 2-P Port size D 2 x 8.5 a b e Conduit terminal: T d K J (Q) L A (Q) L DIN terminal: D 32 (44) N N G 1/2 G1/2 Cable 6 to 12 E R (R) (mm) Grommet Conduit DIN terminal Conduit terminal Electrical entry (DC, AC) Port size P Model N A B C D E F H J K L M Q 19.5 19.5 22.5 N 64 70.5 84.5 Q 40 40 43 N 63.5 70 84 Q 58.5 58.5 61.5 R 46.5 46.5

Quick Exhaust Valve Series AQ 1

30 to 60C) 1 4 8 3 Note) AQ1500 and AQ1510 are not available. 3 4 Type Port size Symbol 0 5 Type Applicable model Diaphragm Lip AQ2 to AQ5 AQ1 Only Port size Applicable series M5 01 02 03 04 06 M5 x 0.8 AQ1500 AQ1510/2000 AQ2000/3000 AQ3000 1 8 Standard 1 4 0 1 M5 x 0.8 8 3 1 8 Note) AQ150 only 1 2 AQ5000 3 4 Thread type Metric thread (M5) Rc NPT G Nil N F Caution Be sure to read before handling

Digital Pressure Switch

cover -80No.PS-OMU0003-D Panel cutout dimensions Mount individually More than 2 pcs.

Booster Regulator/Air Tank

D-DN

Guide Table Series MGF ø40, ø63, ø100 Low-profile compact cylinder utilizes a large concentric guiding sleeve to provide excellent eccentric load resistance.  Mounting height greatly reduced  Built-in non-rotating mechanism Internal guide pin prevents

(mm) Auto switch model Bore size (mm) Bore size (mm) Auto switch model MGJ 40, 63, 100 40 63 100 D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL MGP BMG2-012 6 6.5 6 MGQ D-Z7/Z80 10 10 10 D-M9(V)/M9W(V)/M9A(V)L D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL MGG 6 6 6 MGC BMG2-012 Since this is a guideline including hysteresis, not meant to be guaranteed.

PSE530/200

[101 to 101 kPa] 0 1 2 3 Option Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Nil Without cable Sensor cable (3 m) M5 Port size L M5 x 0.8 Option Sensor cable (3 m) + Connector (1 pc.)

2/3 Port Solenoid Valve for Chemicals

Features 1 Variations Body ported type Chemicals Cv factor Valve type Port Orifice diameter Series LVM11 N.C. 2 port 1.5 mm 0.04 Series L VM10/100 2-M5 x 0.8 Bracket (Optional) Tubing type Valve type Port Orifice diameter Cv factor Series LVM11R N.C. 2 port 1.4 mm 0.03 LVM12R N.O.

ZSE30A(F)/ISE30A

Note 2) Unit: kPa, MPa Panel mount adapter + Front protection cover L Lead wire with connector (Lead wire length 2 m) Note) With connector cover G Connector cover D Note) For output types N and P, the number of core of lead wires will be 3, and for other types, it will be 4. 33 ZSE30A(F)/ISE30A Series Refer to pages 11 and 12 for Pressure Switch Precautions.

VS7-6

ISO Interface Solenoid Valve/SIZEq Metal Seal SeriesVS7-6 Single solenoid (FG-S) Double solenoid (FG-D) Reverse pressure (YZ-S) Reverse pressure (YZ-D) 2 position 3 position SV SY VS7-6-FPG-D Closed centre (FHG-D) Exhaust centre (FJG-D) Double pilot check (FPG-D) Pressure centre (FLG-D) SYJ SX VS7-6-FHG-D Option VK Standard Specifications 5 to 60 oC 0.1 to 1.0MPa Air/lnert gas Fluid Operating

NARM Series

End plate ass'y 1 pc. 2500 3000 A B 146 Return to Menu Specialty Regulators NARM Series Regulator for Manifold NARM2500, 3000 P Dimensions Symbol A B C D E F G H I J K L M N O P Model NARM2500 .24 .67 1.73 2.20 1.65 4.98 2.28 1.77 .67 .83 1.50 1.65 1.14 1.89 2.68 1.32 (6) (17) (44) (56) (42) (126.5) (58) (45) (17) (21) (38) (42) (29) (48) (68) (33.5) NARM3000 .28 .83 2.13 2.68 2.17 6.04

IDX-OM-W011

F4E/6E/8E/11E/15E1 141 I EC 142 AC200V / 2A D C24V / 2A ( 20V / 5m A) 143 O N 3 ( ) 5 /1 ( ) I D F Seri es 141 14 1 I D XO M W 011 14 T 144 PE 1 2 3 LN PE PE: L N: LN PE M 3 6. 5m m 1. 25m m 2 ( ) ( ) I D F Seri es 144 14 2 I D XO M W 011 14 T 145 I D F4E8E10T I D F4E8E20T I D F11E20T AC100/100,110V (50/60Hz) PE N L 1 2 AC200/200,220V (50/60Hz) PE N L 1 2 TB 3 TB 3 TDR