Direct Operated Precision Regulator Modular Style Series ARP3000 1

w t y q SUP OUT Component Parts Replacement Parts Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com No. q w No.

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

Electroless nickel plated q w e r t y u i o !0 !1 !2 !3 !4 !5 !

Silencer 40 dB (A): High Noise Reduction Type Series ANA1

P 1 Silencer VEX Solenoid Tightening Torques for Silencers Applicable tightening torque (N.m) 12 to 14 Connection thread AN 1 4 22 to 24 3 8 28 to 30 1 2 28 to 30 3 4 36 to 38 40 to 42 1 4 1 2 48 to 50 48 to 50 R R R R R 1 R 1 R 1 R 2 Inlet pressure for silencer AMC 4.

Compact and Lightweight

r e u y SUP.

VEX-OMY0001

11.5Nm 2) RNPT 23 R,NPT Nm EXH.

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 Symbol Specifications -X12 Lubricant: Vaseline -X21 Grease-free (Seal: Fluorine-coated) + Throttle valve (Without check valve) -X214 Throttle valve (Without check valve) Note) M5 size: S (with seal) is not necessary. 611 A AS Series Construction AS1201-M5 AS2201/3201/4201 AS3201-02 o !1 w r u y e t !5 !2 !4 q !0 !3 i Component Parts No.

5 Port Solenoid Valve Series SQ1000/2000

How to Order Manifolds SS5Q J 2 3 08 D0 N ( 00T) D For P, R port inch sizes Kit designation Plug-in Series VQ2000 1 2 4 3 Option 4 Nil Electrical entry/Cable length Stations 1 2 Note 2) 01 Kit designation Entry direction Standard stations Kit, Cable length 1 station None Specifies DIN rail length Note 2) 02 to 24 B K N R S With back pressure check valve on all stations Special wiring specifications

Conforms to ISO 15407-2 Standard 5 Port Solenoid Valve/Plug-in Type Series VS 8-2/VS 8-4 S R S R

01 02 03 01B 02B Port size Side ported 1/8" Side ported 1/4" Side ported 3/8" Bottom ported 1/8" Bottom ported 1/4" Size 26 mm Size 18 mm R M Note) External pilot 18 mm and 26 mm sizes mixed Note) Refer to pages 27 and 28 for details of option M.

Compact Vacuum Unit Ejector/ Vacuum Pump System

ZB-OM00201-B Model Indication of the Replacement Parts (7) Supply valve, (8) Release valve Rated voltage 5 24 VDC 6 12 VDC Electrical entry Note 1) L L plug connector with lead wire LO L plug connector without lead wire M M plug connector with lead wire Note 2) MO M plug connector without lead wire Note 2) Note 1) All with light and surge suppressor.

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: 01 (Rc1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: A (w/Calibration Certificate), Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-M)

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: B (Panel Mount Adapter), Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

Series: 25A-PFM7, Flow Rate Range: 50 [1 to 50 (25) L/min], Port Size: 01 (Rc1/8), Piping Entry Direction: Straight, Output Specification: A (2 NPN Outputs), Unit Specification: M (Fixed SI Unit), Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber), Option: R (Bracket for w/o Flow Adjustment

Model: 3 (10-SY3000), Actuation: 1 (2 Position Single), Pilot System: R (External Pilot), Coil Specification: Standard, Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Connector, w/Lead Wire Length 300mm), Light/Surge Voltage Suppressor: Z (w/ Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Port Size: 01 (1/8 w/Sub-plate)

Model: 3 (10-SY3000), Actuation: 1 (2 Position Single), Pilot System: R (External Pilot), Coil Specification: Standard, Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Connector, w/Lead Wire Length 300mm), Light/Surge Voltage Suppressor: Z (w/ Light/Surge Voltage Suppressor), Manual Override: D (Push-turn Locking Slotted Type), Port Size: 01 (1/8 w/Sub-plate)

Function: 1 (Normally Closed), Piping: 2 (Body Ported), Body Option: M (Common EXH), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: M (M Plug Connector w/Lead Wire 0.3m), Surge Suppressor: R (Surge Suppressor Non-polar), Manual Override: D (Push-turn Locking Slotted Style), Port Size: 01 (Base Mounted w/Sub-plate 1/8, Body Ported 1/8), Thread: N (NPT), Bracket: F (Bracket)

ZB-OM00301

FA 3m 27 (M230) 2 O 1 No.ZB-OM00301 Assy ZB1ZS A M G A E 0.0~-101.0KPa G (2m) F -100.0~100KPa ZS-39-5G A NPN2 B PNP2 1) M SI2) P (psi)1) 1) (M230) 2 2)kPa O 1 V Assy 45 2 V Assy 45 (V Assy ) A ) 28 - No.ZB-OM00301 A R R Nm 0.0540.08 R R ON OFF R 29 - No.ZB-OM00301 3 P911 Nm 0.075~0.096 M2 / 3 Assy Assy / / O (/) O 30 - No.ZB-OM00301 [L/min(ANR)] V

VEX-OMT0003

Screw tightening torque VO307K: 1.35 to 1.45 Nm V11 : 0.14 to 0.17 Nm Parts for manifold 02 03 04 02 03 04 04 06 10 01 02 10 12 01 02 14 20 Description VEX312VEX322VEX332VEX342VEX350VEX370VEX390Bracket (with bolt and washer) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A Foot bracket (with bolt and washer) VEX1-18-2A VEX3-32-2A Silencer for pilot exhaust port (PE) AN120-M5 AN103-01 AN210-02 Note 1

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Note 5) For ZSE40F (compound pressure) with "psi" indication, zero clear is in the range of 0.01 psi. 100.0 to 100.0kPa 100.0 to 100.0kPa 101.3 to 101.3kPa 10.0 to 101.3kPa 0.1 to 1.000MPa 1.000 to 1.000MPa Internal circuits and wiring examples ZSE40 (F) ISE40-m-22 (L)-(M) ZSE40 (F) ISE40-m-62 (L)-(M) DC (+) (Brown) DC (+) (Brown) Analog output (Gray) Analog output (Gray) OUT1 (Black) OUT2

KK/KK13

Series 13 Connection type M F B Male thread Female thread With barb fitting Port size variation Socket/Plug designation Male/Female thread type Barb fitting type S P Symbol 07 09 11 13 Symbol 01 02 03 04 G02 Socket Plug Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 G1/4 Hose I.D. 1/4" 5/16" 3/8" 1/2" Construction No. 1 Description Material Plug Description Material Socket Note Nickel

S Couplers Series KK/KK13

Series 13 Connection type M F B Male thread Female thread With barb fitting Port size variation Socket/Plug designation Male/Female thread type Barb fitting type S P Symbol 07 09 11 13 Symbol 01 02 03 04 G02 Socket Plug Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 G1/4 Hose I.D. 1/4" 5/16" 3/8" 1/2" Construction No. 1 Description Material Plug Description Material Socket Note Nickel