Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3.5 16.5 14 13 20 6 F 6 6 5 Piping port 2-M4 x 0.7 13.5 Bottom hole diameter 3.3 2-M3 x 0.5 17 0.05 (Plug: M-3P) Mounting base side B D M Stroke: S 1 5 J Z 2.4 Piping port 2-M3 x 0.5 (mm) Z S M J H F Model MXPJ6-5 44 5 37 27 38 25 MXPJ6-10 59 10 47 42

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Size End width L: 2.0 to 2.4 [mm] End thickness W: 0.5 to 0.6 [mm] W Magnified view of the end of the screwdriver L 48 Series LECP2 Dimensions Screw mounting (LEC2-) 38 36.2 85 4.5 For body mounting 18.1 1.2 4.5 110 101 86 4.5 For body mounting CN4 I/O connector CN3 Encoder connector CN2 Motor connector CN1 Power supply connector DIN rail mounting (LEC2D-) 38 36.2 85 (11.5) SL 24.2 35 127.3

LJ1H

B A C D 37 38 Standard Motor 100W Series LJ1H20 High Rigidity Direct Acting Guide Motor Output Rolled Ball Screw 15mm/10mm lead Vertical Mount How to Order Stroke LJ1H202 NA 1 K F 2 Cable entry direction Top entry Cable entry direction Cable length Power supply voltage Left entry Actuator cable Axial Right Left Top Bottom 100VAC (50/60Hz) 200VAC (50/60Hz) 1 2 Brake cable Left Axial Axial

04-rs2h-e

Double acting spring type Double acting Single acting Contents Bore size (mm) #7 38 #9 $0 Piston seal Rod seal RS2H50T-PS RS2H50D-PS NBR 50 63 80 RS2H50T-PS RS2H63T-PS RS2H80T-PS RS2H50D-PS RS2H63D-PS RS2H80D-PS Set of left nos. #7, #9, $0 Tube gasket RS2H63T-PS RS2H63D-PS O-ring RS2H80T-PS RS2H80D-PS 38 is a non-replaceable part, so it is not included in the seal kit.

04-rsh-e

Grease pack part no.: GR-S-010 (10 g) O-ring 38 is a non-replaceable part, so it is not included in the seal kit. Replacement Parts: Shock Absorber Order no. Bore size (mm) RSH-R20 RSH-R20 RSH-R32 20 32 RSH-R32 190

IN20267

A new IP Address will take effect in the Ethernet MPC immediately when you 38 - IN20267 press Submit or the keyboard Enter key. Control of the Ethernet MPC and communication between the Ethernet MPC and the PC (or master device) will be lost. To reconnect the PC to the Ethernet MPC web page.

Compact Cylinder

43 48 12 21 25 30 35 39 44 16 32 37 43 48 53 58 16 28 33 38 43 49 54 20 53 61 68 75 83 90 98 105 112 120 20 40 47 55 62 69 77 84 91 99 106 25 73 82 91 100 109 119 128 137 146 155 25 55 64 73 83 92 101 110 119 128 138 32 122 135 149 162 176 189 203 216 230 243 32 94 108 121 135 148 162 175 189 202 215 40 184 201 217 233 250 266 282 299 315 331 40 145 161 177 194 210 226 243 259 275 292 50

Floating Joint

Floating Joint RoHS Compact Model Connection thread Shortened dimensions Overall length JT20 M8 x 1.25 12.3 mm 27.2 mm JT32 M10 x 1.25 13.0 mm 33.0 mm Overall length JT40 M14 x 1.5 19 mm 43.0 mm Reduced by19 mm 29 mm New New JT Series Workpiece Cylinder (JCM) JA Series Workpiece Cylinder (CM2) Max. 56% lighter 50 ga22 g (Compared to JA20) Size JA Series New NewJT Series 20 50 g 22 g 32 70 g 38

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 KPQL04-M5 KPQL04-01 KPQL04-02 KPQL06-M5 KPQL06-01 KPQL06-02 KPQL08-01 KPQL08-02 KPQL10-02 KPQL10-03 KPQL12-03 KPQL12-04 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 8 15.3 21.1 25.5 15.8 22.3 26.7 23.5 27.9 29.4 30.8 32 36.2 8 10 14 8 10 14 12 14 4 10 19 6 12 20 13 21 26 36 38

One-touch Fittings

32.1 M L1 D 10 1/4 KQ2D10-02GS 17 15.9 15.6 21.2 33.1 36.3 15.6 9.6 8 4.2 40.8 29 9 24.9 3/8 KQ2D10-03GS 17 15.9 15.6 21.2 34.5 37.3 15.6 9.6 8 4.2 40.8 29 9.4 32.7 1/2 KQ2D10-04GS 22 15.9 15.6 21.2 38.7 40.2 15.6 9.6 8 4.2 40.8 29 9.4 60.6 12 1/4 KQ2D12-02GS 19 18.5 18.2 23.6 35.5 40 17 10.7 8 4.2 57.2 45.2 9 35 3/8 KQ2D12-03GS 19 18.5 18.2 23.6 36.9 41 17 10.7 8 4.2 57.2 45.2 11 38

Multi-connector with One-touch Fittings DMK Series No. of Connecting Tubes: 6, 12

34 11 4 12 5 7 11 43 55 38 Click here for applicable color caps. 250 B

HRL

4 Common Run/Stop To run/stop the product Alarm This unit displays 38 types of alarms. Alarm code Indication Explanation Alarm code Indication Explanation AL23 CH2 High Press. CH2 circulating fluid discharge pressure rise AL01 CH1 Low Level FLT CH1 abnormal low tank fluid level AL24 CH2 Low Press.

33

HED Polypropylene skid HEA Model Weight [kg] Dimensions [mm] HRSE012-A-10 35 Height 745 x Width 465 x Depth 575 HRSE018-A-10 HRSE012-A-10-T 42 Height 745 x Width 465 x Depth 620 HRSE018-A-10-T HRSE012-A-20 38 Height 745 x Width 465 x Depth 575 HRSE018-A-20 HRSE024-A-20 HRSE012-A-20-T 45 Height 745 x Width 465 x Depth 620 HRSE018-A-20-T HRSE024-A-20-T HRSE012-A-23 41 Height 790 x Width 470

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Weight (g) LEC S LEC SS-T D-M9P(V) D-M9B(V) D-M9N(V) Auto switch model 0.5 m (Nil) 8 7 LEC Y 1 m (M) 14 13 Lead wire length 3 m (L) 41 38 Motorless 5 m (Z) 68 63 LAT Dimensions LZ (mm) D-M9 D-M9V LC3F2 M2.5 x 4 L M2.5 x 4 L Indicator light Slotted set screw Slotted set screw 8 Indicator light 2 3.2 4.6 2.6 4 2.8 2.7 2.7 20 2.8 4 22 3.2 2.6 9.5 Most sensitive position 6 4 6 Most sensitive

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

) port 3 1 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors (R) (P) 7.4 3 (13) M plug connector (M) L plug connector: 10-VQD1151-L-M5 M plug connector: 10-VQD1151-M-M5 5 5 5.5 2(B) 4(A) Direct manual override Lead wire length 300 mm 27 Indicator light 17.6 11.2 3 3(R) 9 0.3 3.8 10.9 3.5 5.5 9.1 2 x mounting hole 33.5 28.5 37 38

Series 11-MXJ Air Slide Table

J I 12 Z ZZ H G 3 +0.03 0 depth 2 GA A 19 3.3 3.5 A 5.8 4 x M4 x 0.7 3 4 3 +0.05 0 depth 2.5 A-A Model G GA H I J K M Z ZZ 11-MXJ8-5 11-MXJ8-10 11-MXJ8-15 11-MXJ8-20 12 18 17 6 17 28.5 44.5 38 45 12 18 17 6 17 28.5 44.5 38 45 19 28 20 8 25 39.5 54.5 48 55 Other dimensions are the same as standard model (Series MXJ). 19 28 20 8 25 39.5 54.5 48 55 829 Air Slide Table 11-MXJ Made to Order Air

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

at Stroke End) Electrical entry direction: Inward Electrical entry direction: Outward D B A C B D-Z7Z8, D-Y7W D-Y5, D-Y7 D-Y6, D-Y7V D-Y7WV D-Y7BA Bore size (mm) A C 16.5 (15) 23.5 (22) 34 (32.5) 46 (44.5) 46 (44.5) 56 (54.5) D 0.5 (1) 3.5 (2) 0.5 (1) 3 (1.5) 5 (3.5) 5 (3.5) C 18 25 35.5 48 48 58 D 2 5 2 4.5 6.5 6.5 C 10.5 17.5 28 40 40 50 D 5.5 2.5 5.5 3 1 1 6 10 15 20 25 32 20.5 27.5 38

Support Guide/11-LEFG Series

50 3.5 3H9 (+0.025 0 ) depth 3 A (Table traveling distance) L 51 (52) 10 10 58 38 48 38.5 (48) 26 24 n x 4.5 Vacuum port Rc1/8 48 120 F D x 120 (= E) B Dimensions [mm] Dimensions [mm] Model L A B n D E F 11-LEFG25-S-50 180 57 160 4 20 11-LEFG25-S-100 230 107 210 Model L A B n D E F 11-LEFG25-S-450 580 457 560 10 4 480 35 11-LEFG25-S-500 630 507 610 11-LEFG25-S-550 680 557 660 12 5 600

Environment

. * If the step motor and servo motors do not meet your specifications, also consider the AC servo specification (Page 46). 38 Model Selection LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication For the LECPA, refer to page 40.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

39.2 40.7 40.7 44.8 53.2 59.8 59 64.4 71.6 76 77.7 82.1 4.5 5.2 6.2 5.2 6.3 6.7 8.1 7.4 8.2 9.8 11 38 39.2 48.7 40.7 40.7 50 52.2 52.2 54.4 59.8 59 64.4 70.8 76.9 83.1 8.4 9.3 11.6 9.3 11.6 12.8 15.2 12.8 15.2 18.5 20.9 18.5 20.9 4.5 5.2 3.2 4 6 4 6 6 8 6 8 10 12 10 12 1/8" 5/32" 3/16" 1/4" 5/32" 3/16" 1/4" 3/16" 1/4" 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" 8.4 9.3 11.4 12 9.3 11.4 13.2 11.4 13.2