Soft Start-up Valve AV2000/3000/4000/5000 1

/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 14-3-9 10 Series AV2000/3000/4000/5000 Connecting Spacer for Modular Style F.R.L.

212

Applicable model LVR20 LVR40 LVR50 03 3 x 2 LVR20 LVR40 LVR50 03 1/8" x 0.086" 04 4 x 3 05 3/16" x 1/8" 06 6 x 4 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 12 12 x 10 13 1/2" x 3/8" 19 19 x 16 19 3/4" x 5/8" LQ3 Metric size Inch size Symbol Applicable tubing size Applicable model Symbol Applicable tubing O.D.

AR20-B to AR60-B

Note 6) Pressure can be set higher than the specification pressure in some cases, but Standard Specifications Model AR20-B AR25-B AR30-B AR40-B AR40-06-B AR50-B AR60-B Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Pressure gauge port size Note 1) 1/8 Fluid Air Ambient and fluid temperature Note 2) 5 to 60C (with no freezing) Proof pressure 1.5 MPa Maximum operating pressure

5 Port Air Operated Valve Series SYA3000/5000/7000 1

0.31 0.22 0.27 0.18 0.39 Cv 3.0 4.1 3.0 4.1 3.5 4.2 3.6 4.6 1 2 VSA4140-04 VSA4140-06 VSA4240-04 VSA4240-06 VSA4340-04 VSA4340-06 VSA4440-04 VSA4440-06 1 8 Rc 2 position single SA 1 2 1.31 1 8 Rc 3 4 1 2 1 8 Rc 2 position double 3 position closed center 1 2 1.50 VA 3 4 1 2 3 4 1 2 3 4 1 8 Rc 1 8 Rc 1 2 1.73 VM 1 8 Rc Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco,

Series 10-, 21- AW-B Filter Regulator

Note 9) : For thread type: NPT only Standard Specifications 10-/21-AW20(K)-B 10-/21-AW30(K)-B 10-/21-AW40(K)-B 10-/21-AW40(K)-06-B 10-/21-AW60(K)-B 1/8, 1/4 1/4, 3/8 Model Port size 1/4, 3/8, 1/2 3/4 3/4, 1 Pressure gauge port size 1/8 Fluid Air 5 to 60C (with no freezing) Ambient and fluid temperature Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Set pressure range 0.05 to 0.85

Power Valve: Economy Valve Series VEX5

R) port 1(P), 2(A) Body size Rated voltage (Only with solenoid) 04 06 10 10 12 14 20 1 2 3 4 1 2 100 VAC 50/60 Hz 1 2 3 (Ex.)

A

4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000/3000/4000/5000 Modular F.R.L.

Clean Regulator

Description XT13-394-06, 10 INA-48-1-06, 10 1 Body Stainless steel 316 2 Bonnet ADC12 3 Valve guide Stainless steel 316 Diaphragm Assembly EPDM Stainless steel 316 (Wetted part metal) Fluororubber Stainless steel 316 (Wetted part metal) 4 EPDM (Seals) Stainless steel 316 (Wetted part metal) FPM (Seals) Stainless steel 316 (Wetted part metal) Valve 5 6 O-ring EPDM Fluororubber 866 SRH Series

VHS20/30/40/50

VR VH VHS Construction VHS20/30 VHS40/40-06/50 6 8 7 2 2 5 5 1 4 IN OUT OUT IN 1 9 3 EXH. EXH. Component Parts No.

FQ1

Model symbol (In-line filters) Element size 125mm 65 x 250mm Bore size 04 06 Rc 1/2 Rc 3/4 2.

Ionizer Nozzle type IZN10 Series IZS

Shield sheet Note 2) IZF IZN10 ES ZVB Mounting pitch Mounting stations IZD IZE Symbol Pitch Symbol Stations ES 2 17 mm 2 Hexagon nut 3 IZH 3 4 4 Hexagon socket head cap screw Spacer (5 mm) L1 L2 Part no.

Soft Start-up Valve AV2000/3000/4000/5000

4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000/3000/4000/5000 Modular F.R.L.

VXR21/22/23

Port size 04 06 10 12 14 20 LVH 1 2 3 4 Refer to page 17-3-16 for ordering coil only. 1 1 1 2 LVD 1 4 1 2 Thread type Nil T F N LVQ Rc NPTF G NPT Refer to the table (1) given below for availability.

AN

-04 90 1 2 AN500-06 160 3 4 Note) NPT thread is also available.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Model symbol (In-line filters) Element size 125mm 65 x 250mm Bore size 04 06 Rc 1/2 Rc 3/4 2.

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

A OUT IN A OUT IN 1 2 3 B B EXH. EXH. H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 3

A_HEC-OM-J017

HEC ii CONTENTS CONTENTS Pages 1 Preparation for Communication -1-1 2 Specifications of Communication Method -2-1 3 Communication Format -3-1 3.1 Control code used for communication -3-1 3.2 Command code list -3-1 3.3 Communication procedures and format -3-2 3.4 Calculation of checksum -3-3 4 Details of Communication format -4-1 4.1 Temperature setting (without writing EEPROM) -4-1 4.2 Reading

Soft Start-up Valve

Without light SY100-61-1 With light Rated voltage Voltage symbol Part number 24 VDC 24 V SY100-61-3-05 12 VDC 12 V SY100-61-3-06 100 VAC 100 V SY100-61-2-01 200 VAC 200 V SY100-61-2-02 110 VAC 110 V SY100-61-2-03 220 VAC 220 V SY100-61-2-04 Without light SY100-82-1 Caution With light Rated voltage Voltage symbol Part number 24 VDC 24 VN SY100-82-3-05 12 VDC 12 VN SY100-82-3-06 100

Series AK1000

3) Bonnet port (NPT 1/8 inch) No code P BP 3) Panel mounting hole: dia.39.6 mm.

VXD21/22/23

LVA LVH Connection LVD 03 04 06 10 3 8 1 2 3 4 Refer to the table (2) given below for availability. Thread LVQ 1 Refer to page 17-3-16 for ordering coil only. LQ 32 40 50 For 32A For 40A For 50A Thread type Nil T F N Flange Rc NPTF G NPT LVN Refer to the table (1) given below for availability.