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K With air supply valve, Vacuum release valve Thread type Nil Rc T F NPTF G Table (1) Combination of Nozzle Diameter and Standard Supply Pressure Standard supply pressure (MPa) Nozzle diameter M (0.35) S (0.45) H (0.5) 0.5 0.7 1.0 1.3 1.5 Table (2) Lead wire with 4-wire connector P5022-6-1 (0.6 m) P5022-6-2 (3 m) 13-4-23 4 Series ZMA Model H M Standard supply pressure Nozzle diameter (mm)

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MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.

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Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 VVFS2000-30A-5 VVFS2000-30A-6 VVFS2000-30A-7 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 VVZS3000-21A-5 VVZS3000-21A-6 VVZS3000-21A-7 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

SY

.SS5Y71, #1 + #4 + #10 M type plug connector .

Metal Seal/Rubber Seal Series VQ Body Ported

Y 7 1 1 0 5 MO C6 VQ Series VQ1000 D-sub connector kit with 3 m cable 1 set Manifold base part no. 4 sets Valve part no. (Stations 1 to 4) 4 sets Valve part no.

AC Servo Motor Driver (Network card type ）

[m]/ 10(STM-4) [inch]/ 10-3 [degree]/ PT16 LMPH 0h [pulse] PT17 LMNL Software limit 0h 10STM [m]/ 10(STM-4) [inch]/ 10-3 [degree]/ PT18 LMNH 0h [pulse] PT19 *LPPL Position range output address + 0h 10STM [m]/ 10(STM-4) [inch]/ 10-3 [degree]/ PT20 *LPPH 0h [pulse] 5 13 5.

Hydraulic

(M) x 135l x 135l 135 30 (M) 135 75 (M) 26.5 x 160l x 140l 140 35 (M) 160 100 (M) x 145l 145 40 (M) x 150l 150 45 (M) x 155l 155 50 (M) x 180l 180 75 (M) x 205l 205 100 (M) 4 Series CHKDB Water Resistant Type A special scraper is installed on the basic cylinder to prevent liquid in the surrounding area from entering the cylinder.

Air Slide Table

m [kg] 5 5 4 4 3 3 V = 200 V = 200 2 2 1 1 0 0 20 40 60 80 100 120 0 0 20 40 60 80 100 120 140 160 180 200 L3: Overhang Allowable range: 120 mm L3: Overhang Allowable range: 200 mm Allowable overhang L [mm] Allowable overhang L [mm] MXQ20B-100Z MXQ20B-125, 150Z 7 7 V = mm/s V = mm/s V = 100 V = 100 Max. operating pressure: 200 mm/s 6 6 Load mass m [kg] Load mass m [kg] 5 5 4 4 3 3 V = 200

NCQ2/CQ2

Standard (Through hole): (N)C Q2B Auto switch Minimum lead wire bending radius 10 H thread effective depth C 2 x P (Rc, NPT, G) (Port size) 2 x 4 x OB counterbore depth RB Q Q (Also back cover) 4 x N through D 25 M E 2.5 Note) K With flat washer 4 pcs. 2 x 4 x OA thread depth RA M L E J W Rod end male thread Width across flat B1 MM H1 CQ2 Rod End Male Thread Bore size (mm) C1 A C1 1 H1 L1

V

(300mm) LN L Type Connector without Lead Wire LO L Type Plug without Connector M M Type Plug with Lead Wire MN M Type Plug without Connector MO M Type Plug without Connector Internal Pilot R External Pilot V O LTA G E *1 100VAC *2 200VAC 3 110VAC *4 220VAC (D, DO Only) 5 24 VDC 6 12 VDC *2 200VAC (L M Only) *4 220VAC (L, M Only) * Special Order Courtesy of Steven Engineering, Inc. !

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Detection nozzle: 1.5 Supply pressure: 100 kPa Set distance: 0.15 mm Detection side piping: 6 x 4 Detection nozzle: 2.0 Supply pressure: 100 kPa Set distance: 0.3 mm IF Data 3 1.5 Piping tubing length Piping tubing length 10 m 2.5 10 m 1.2 Response time (sec) Response time (sec) 8 m 2 0.9 5 m 8 m 1.5 0.6 5 m 1 3 m 3 m 0.3 0.5 1 m 0 0.02 0.04 0.06 0.08 0.1 0.12 0.14 0.16 1 m 0 0 0 0.05 0.1

Compact Cylinder

3 mm or more 5 mm or less M: 5 mm or less 16 M: 3 mm or more 7 mm or less M: 7 mm or less XA1 20 M: 4 mm or more 8 mm or less M: 8 mm or less 25 M: 4 mm or more 10 mm or less M: 10 mm or less J: 3 mm or more, W1: 6 mm or less For 12 J: 4 mm or more, W1: 6 mm or less 16 J: 4 mm or more, W1: 6 mm or less J: 4 mm or more, W1: 6 mm or less XA2 20 J: 5 mm or more, W1: 11 mm or less J: 5 mm or

Battery-less

Model (L) B D E F G J K LES25DEm-30mm-m 214 48 4 133.5 81 4 19 121.5 LES25DEm-30Bmm-m 254.5 LES25DEm-50mm-m 240 42 6 159.5 87 4 39 147.5 LES25DEm-50Bmm-m 280.5 LES25DEm-75mm-m 274 55 6 193.5 96 4 64 181.5 LES25DEm-75Bmm-m 314.5 LES25DEm-100mm-m 347 50 8 266.5 144 4 89 254.5 LES25DEm-100Bmm-m 387.5 LES25DEm-125mm-m 372 55 8 291.5 144 6 57 279.5 LES25DEm-125Bmm-m 412.5 LES25DEm-150mm-m 397

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

hole) 64.2 2-One-touch fitting (A, B ports) Applicable tube O.D.: 8 10 12 2-Rc 3/8, 1/4 (A, B port) M type plug connector (M): SY9 20-M-Q DIN terminal (D): SY9 20-D-Q 3 4 5 L type plug connector (L): SY9 20-L-Q C8 C10 C12 C8 C10 C12 3 4 5 C8 C10 C12 3 4 5 Applicable cable O.D. 3.5~7 73 65.5 28.5 202.5 Max. 10 54.2 Approx. 300 (lead wire length) 52 Approx. 300 Pg.1.2-16 (lead wire length)

MY1

H unit 500 400 300 L unit Air cushion 200 100 1 2 3 4 5 10 20 30 40 50 Adjusting bolt m, m, m max.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

One-touch fitting (Metric size) One-touch fitting (Inch size) Symbol Port size Applicable series C4 C6 M C4 C6 C8 M Symbol Port size Applicable series N3 N7 M N3 N7 N9 M 5 32" 1 4" 4 One-touch fitting One-touch fitting One-touch fitting Mixed 10-SY3000 10-SY3000 6 One-touch fitting Mixed 5 32" 1 4" 4 One-touch fitting One-touch fitting One-touch fitting One-touch fitting Mixed 6 One-touch

0.4

2 B 2 B 2 B 2 B 2 M12 communication connector (PROFIBUS DP) D-sub communication connector (PROFIBUS DP) 4 4 4 4 A 4 A 4 A 4 A 4 A SI unit Fieldbus Features 1 Series SY3000/5000 Pressure switch Valve piping direction variations M Piping is possible from 3 directions.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(Values at the initial period) JIS Symbol (A) 4 (B) 2 1 (P) 3 (R) 2-8-4 5 4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Valve model Port size C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv L M L M L M L M Body ported VQD1121-M5 0.05 0.31 0.19 0.05 0.16 0.22 U W VQD1121 -M5 0.07 0.28 0.28 0.07 0.24 0.27

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Connection threads R/NPT A B E E F G H L1 L1 L2 M Model LQ3B1A-M LQ3B2A-M LQ3B2B-M LQ3B3A-M LQ3B3B-M LQ3B3C-M LQ3B4A-M LQ3B4B-M LQ3B4C-M LQ3B5A-M LQ3B5B-M LQ3B5C-M LQ3B6A-M LQ3B6B-M LQ3B6C-M 1/8" 15 3.5 10 9 4.8 9.5 11 28.5 27.5 19 14 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/4" 3/8" 1/2" 3/8" 1/2" 3/4" 1/2" 3/4" 1" 19.5 23.5 1/4" 4 17 16 6 12 16 34.5 33.5 20 20.5 26.5 22.5 26.5 3/8" 5 22.5 19.5 9

Base Mounted Metal Seal/Rubber Seal Series VQ

cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) 2 to 16 2 to24 2 to16 2 to 24 stations stations stations G stations 2-4-124 Base Mounted Series VQ2000 Plug-in Unit How to Order Valves How to Order Manifold Assembly Example VQ 2 5 1 0 0 Y Double solenoid