High Vacuum Angle Valve, XL Series

The other main residual gases have mass numbers of 28 and 35. (from P/A data) S P1P2 40 Technical Data Series XL Total pressure 13 This is the sum of all partial pressures and is equal to P=nkT, where the pressure is P, the number of gas molecules is n, Boltzmanns constant is k, and the absolute temperature is T.

5 Port Air Operated Valve

position double VFA3230(-P) 01 02 63.5 23 1/8, 1/4 [4 (A), 2 (B) port] 1/8, 1/4 [4(A), 2(B)port] 2 x 4.3 (For mounting) 2 x 4.3 (For mounting) 25.5 10 SYA 10 4A 4A 5 SYJA 1 1 26.4 26.4 20 20 10 1/8 (Pilot port: Upward) 1/8 (Pilot port: Upward) 2B 2B VZA (1.6) 66 23 19 81 VFA VFA 71 (6) 1/8 [Pilot port: Lateral (-P)] VFRA 1/8 [Pilot port: Lateral (-P)] VPA4 (45) (55) 31.5 31.5 36 36 SYJA 35

ARM10/11

(The SI unit type is provided for use in Japan.) 14-4-35 18 Series ARM11A/B Common Supply Block ARM11A 1 S 01 3 Z A 1 2 3 4 5 6 1. IN piping position 4. Option 2.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

A L D VT KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 D VP Color: White VG VP L DIN rail 12.5 (Pitch) 5.25 7.5 AXT100-DR-l VQ Enter suffix the number from DIN rail dimensions table below.

XL

The other main residual gases have mass numbers of 28 and 35. (from SMC data) S P1P2 40 Technical Data Series XL Total pressure 13 This is the sum of all partial pressures and is equal to P=nkT, where the pressure is P, the number of gas molecules is n, Boltzmanns constant is k, and the absolute temperature is T.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) One-touch fitting 4 tube 6 tube 8 tubing 34 35 10 to 16 38 39 20 to 32 134 136 40, 50 Weight by Stroke (g) Pad dia.

76

Features 5 Air Dryer Variations Series IDF E/F/D Standard inlet air temperature type Rated inlet air temperature: 95, 104F (35, 40C) [Max. inlet air temperature: 122F (50C), 140F (60C) (F and FS type only)] Refer to SMC website for details.

reduces flow setting time

Connection thread size Wrench tightening angle after hand-tightening [deg] Proper tightening torque [Nm] G1/8 10 to 20 3 to 4 G1/4 15 to 35 4 to 5 G3/8 15 to 35 8 to 9 G1/2 15 to 35 14 to 15 600 AS-FS Series Specific Product Precautions 3 Be sure to read this before handling the products.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Connection thread size Wrench tightening angle after hand-tightening [deg] Proper tightening torque [Nm] G1/8 10 to 20 3 to 4 G1/4 15 to 35 4 to 5 G3/8 15 to 35 8 to 9 G1/2 15 to 35 14 to 15 600 AS-FS Series Specific Product Precautions 3 Be sure to read this before handling the products.

Solid State Auto Switches

D-B35 Reed switch Contacts protection resistance () () Current limiting resistance DDLight emitting diode (LED) Diode 1649 Series D-B3 Dimensions (mm) Terminal conduit type D-B3 Terminal conduit type D-B3J 42 42 500 G 1/2 59 38 59 38 6 41.5 41.5 85 69 35 35 42 8 8 59 1 2 85 Recommended minimum bending radius for lead wire RT : 25 mm or more 120C : 50 mm or more Terminal part Dimensions for

Refrigerated Air Dryer

Model Applicable transformer Model Dimension Total weight (kg) A Weight (kg) B C D 171 217 30 40 43 50 31 35 44 51 35 39 48 55 IDF-TR500-1 IDF-TR500-2 IDF-TR500-3 IDF-TR500-4 IDF-TR500-1 IDF-TR500-2 IDF-TR500-3 IDF-TR500-4 IDF-TR500-1 IDF-TR500-2 IDF-TR500-3 IDF-TR500-4 IDF4E-10 284 573 345 315 171 217 IDF6E-10 IDU3E-10 IDF-TB403 6 284 171 217 IDF8E-10 IDU4E-10 643 370 340 284 Note) Weight

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

30 30 35 A Data Clevis Pin 2-d Dd9 d Note) Cotter pin Bore size (mm) Model l m Dd9 L (Drill through) 3 x 18 l 4 x 25 l 4 x 35 l 4 x 36 l 0.040 0.076 CD-M03 CD-M05 CD-M08 CDP-7A 10 14 22 25 20, 25 32, 40 50, 63 80 3 4 4 4 4 4.5 5 5 36 51 72 78 44 60 82 88 0.050 0.093 0.065 0.117 0.065 0.117 l m L Note) When using cotter pins, flat washers are used together.

Multi-Axis Step Motor Controller

Refer to the dimension drawings on pages 7 and 10 for the mounting dimensions. (35) (25) 5.5 8 (1.5) L Dimension No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 L 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 398 410.5 423

33

V as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V (400 V as standard, 200 V as an option) HRSH090 Inverter type 0.1 5 to 40 V Indoor use (Only 200 V as an option) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (Only 200 V as an option) 195 Thermo-chiller Basic Type HRSE Series

Intrinsically Safe Valve

to 100 psi (0.25 to 0.7 MPa) Pilot pressure range 2-position double 35 to 100 psi (0.25 to 0.7 MPa) 3-position Based on IEC 60529 Note)Impact resistance: No malfunction occurred when tested in the axial direction and at the right angles to the main valve and armature in both energized and de-energized states.

HRX-OM-O021

40 5 10 15 20 25 30 35 40 Circulating fluid temperature[] Circulating fluid temperature[] 60Hz 50Hz Fig. 9-5 Heating capacity(HRS050-A-20-(BJM)) 9.5.2 HRS050-W-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 5 20 25 32 40 1500 1500 5 20 25 32 40 Heating capacity [W] Heating capacity [W] 1000 1000 500 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature

HRX-OM-R005

40 5 10 15 20 25 30 35 40 Circulating fluid temperature Circulating fluid temperature 60Hz 50Hz Fig. 9-5 Heating capacity(HRS060-A-20-(BJM)) 9.5.2 HRS060-W-20-(BJM) 2000 2000 Ambient Ambient temperatur temperatur Heating capacityW Heating capacityW 1500 e e 1500 40 32 25 20 5 40 32 25 20 5 1000 1000 500 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature Circulating

HEC_W-E

(The unit is not explosion proof.) 5) The installations with ambient temp. range of 10 to 35C and humidity range of 35 to 80%. No dew condensation is allowed on the unit.

CEx-OMG0106

Inputs Wiring 35 9-3-4. Outputs Wiring 35 9-3-5. Solenoid Valve Wiring 36 Chapter 10: Timing Chart 3744 Chapter 11: Data Setting 11-1. Data Presetting 11-1-1. Data Classification & Content 45 11-1-2. Input Method 4548 11-1-3. Confirmation of Set Data 48 11-2. Program Setting 11-2-1. Input Method 4952 11-2-2. Confirmation of Input Data 52 11-3.

1.63

x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 13 15 20 20 22 22 44.5 47 52 56 60.5 67.5 MGT 25, 50, 75, 100, 125, 150, 175, 200 Nil TN TF P Bore size (mm) PW Q R S T U V X YY YL Z NN OA OB OL 20 25 32 40 50 63 Rc1/8 Rc1/8 Rc1/8 Rc1/8 Rc1/4 Rc1/4 17 18 26 27 28.5 30 64 68 78 92 132 160 24 26 35 35 44 48 123 146 178 193 247 274 108 128 156 172 220 248 126 146 176 192 240 266 76 92 112 128 168 196 9