HRX-OM-W060

/Japanese 1 pc.) (2) Particle filter set (for CH1) 1 1 set (3) Particle filter set (for CH2) 1 1 set For HRL-AFG thread adapter set 1 set (4) For HRL-ANNPT thread adapter set 1 set (5) Anchor brackets 2 2 pcs. 1 When F or N piping thread type is selected, the particle filter connection is G thread or NPT thread . 2 The anchor brackets are used for fixation with the skid when this product

Speed Controller with Indicator

Also, when the sealant tape is used, leave approx. 1 thread ridge exposed at the end of the threads. Winding direction Port size Knob lifting force M5 10-32/UNF 1 to 1.5 N Sealant tape 1/8, 1/4, 3/8, 1/2 3.5 to 4 N Expose approx. 1 thread 4. Do not rotate the product by the indicator part. Use a wrench for mounting the product.

High Vacuum Angle Valve

None XLFV16-30-1-2 XLFV25-30-1-2 XLFV40-30-1-2 XLFV50-30-1-2 XLFV63-30-1-2 XLFV80-30-1-2 Yes XLFV16A-30-1-2 XLFV25A-30-1-2 XLFV40A-30-1-2 XLFV50A-30-1-2 XLFV63A-30-1-2 XLFV80A-30-1-2 XLG General use None XLG16-30-1-2 XLG25-30-1-2 XLG40-30-1-2 XLG50-30-1-2 XLG63-30-1-2 XLG80-30-1-2 High temperature None XLG16-30-1H-2 XLG25-30-1H-2 XLG40-30-1H-2 XLG50-30-1H-2 XLG63-30-1H-2 XLG80-30-1H-2 *

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

(42) 30 (42) 3/8, 1/2, 3/4 1 port 3/8, 1/2, 3/4 1 port Dimension inside is for rubber seal.

Speed Controller with One-touch Fitting

Meter-out: Gray Meter-in: Light blue 23 3.2 Note 2) 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" ASR ASQ 04 4 06 6 08 8 10 10 12 12 16 16 Thread type Nil R N NPT Note 1) For selecting applicable tubing O.D., refer to the Model on page 554. Note 2) Use 1/8" tube. Port size 01 1/8 02 1/4 03 3/8 04 1/2 Made to Order (For details, refer to page 562.)

AC Servo Motor Driver (SSCNET Type)

8) CN1B 2 1 MR-J3-B (Note 7) LECSS-S (n axis) SW1 CN1A (Note 9) Cap SW2 (Note 8) CN1B 2 1 Refer toLECSS Operation Manual,section 3.2 for wiring details.

NCA1

NY-325 NY-800 NY-1000 CB 1.265 1.515 3.032 CD 0.75 1 1 3/8 CE 2 3/8 3 1/8 4 1/8 CH 1 3/8 1 1/2 2 CW 5/8 3/4 1 F 1 1/4 1 1/2 2 L 1 1/4 1 1/2 2 1/8 A 1 1/8 1 5/8 2 KK 3/4-16 1-14 1 1/4-12 ER 3/4 1 1 3/8 Weight (lbs) 1.50 3.78 9.32 Note: Jam nut, pivot, and cotter pins are included. 12 Alignment Coupler F Shank dia.

Series LC7R Dedicated Regenerative Absorption Unit

Terminal 1 2 3 6 5 4 Vin (P) Regenerative absorption unit power input (positive) 2 Temperature control output terminal Maximum rated voltage: 30V Maximum rated current: 6mA Vin (N) Regenerative absorption unit power input (negative) 3 Vout (P) Extended regenerative resistance output (positive) 1 Vout (N) Extended regenerative resistance output (negative) 4 Regenerative absorption unit Controller

CEx-OMQ0013

N No. 6 7 8 9 1 0 0 0 0 2 1 0 0 0 3 0 1 0 0 4 1 1 0 0 5 0 0 1 0 6 1 0 1 0 7 0 1 1 0 8 1 1 1 0 9 0 0 0 1 10 1 0 0 1 11 0 1 0 1 12 1 1 0 1 13 0 0 1 1 14 1 0 1 1 15 0 1 1 1 16 1 1 1 1 0IN69 COM 1IN69 COM No.1 ON OFF 1 2 50msec 25 7-3-3 INPUT 13 +24V +5V /1 23412 +5V +24V IN 10mA COM 10mA 7-3-4 OUTPUT 4 +5V END DC +30V 50mA050 CEU2 NPN OUT Max DC +30V 50mA CEU2 COM CEU2P PNP OUT

LEH_C

No. 1 1 1 1 I/O (1 ) 1 1 (USB ) 1 -2.

Electric Actuator / Slider Type 《 AC Servo Motor 》

Table4-1.

asilltr

1 .30 1.42 1.54 250 1 . 1 2 1 . 1 6 '1.18 1 . 2 1 1.24 1 . 2 7 1.30 1 .33 '1.40 1.46 1.53 1 .59 '1.72 1.84 2.O9 2.22 300 1 .58 1.63 1 .66 1 . 7 0 1 . 7 4 1 .78 1.82 1.86 r.95 2.03 2 . 1 2 2.2\ 2.38 2.55 2.84 3.01 400 3.10 3.16 3.20 3.26 3.32 3.44 3.50 \r.o I 3.73 3.97 4.20 4.44 4.67 5 . 1 9 Weight sw Dtype {rbs) 056 0.099 0.104 0 . 1 1 0 0.1 17 0.1230.1300.1340.141 0.154 0 . 1 6 3o.172 0.185

Process Pump

(Inch) 1/8" x 0.086" 1/8" 1/8" x 1/16" 3/16" 3/16" x 1/8" 1/2" 1/2" x 3/8" 3/8" 3/8" x 1/4" 1/4" 1/4" x 5/32" Refer to Best Pneumatics No. 7 for further details. 13 Series PB Applicable Fluids Material and Fluid Compatibility Check List for Process Pumps The data below is prepared based on data provided by the material manufacturers.

80

110 VAC 1.6 D 200 VAC K L M N P Q R S T U V W 1.6 E 230 VAC 2.3 M5 Z Other voltages 3.2 Brass 1.6 2.3 1/8 For other special options, refer to page 462.

EXxx-OMV0017-D

software again. 1.

EXxx-OMN0035CN

EX600-DX B M12 (5 )4 8 C M8 (3 )8 8 P PNP C1 M8 (3 )8 8 N NPN D M12 (5 )8 16 E D-sub (25 ) 16 F (32 ) 16 M12 (4 ) EX600-DXB No. 1 LED 2 () 3 4 5 () -17No.EX-OMN0035CN-A EX600-DXC No. 1 LED 2 () 3 4 5 () EX600-DXD No. 1 LED 2 () 3 4 5 () -18No.EX-OMN0035CN-A EX600-DXE No. 1 LED 2 () 3 4 D-sub (No.4-40 UNC) 5 6 () EX600-DXF No. 1 LED

Clean Regulator/Fluororesin Type

Body size 1 3 5 Nil X401 Standard Rotating the mounting hole 90 Pilot port thread type Integrated fittings (LQ2) Nil N Rc 1/8 NPT 1/8 Applicable tubing size (O.D. x I.D.)

Process Valve

2.5 2.6 1 4 1 5.7 5.8 32 Symbol Valve type Type 4.1 4.2 1 2 1 N.C.

Power Valve: Economy Valve Series VEX5

N Port 2 (A),1 (P) Port size A Model E F G H I J L M P R T U B C D K N O Q S Port 3 (R) VEX5510 VEX5511 160 50 25 10 7 25 173 80 60 98 Center 1 2 3 4 , , 1 1 2 3 4 60 150 79 70 53 13 18 100 2 x M6 Thread depth 9 116.5 , ,1 25 VEX5710 VEX5711 177.5 167.5 84.5 90 60 30 15 7 190.5 54.5 100 60 13 105.5 103.5 18 4 x M6 Thread depth 6 136.5 17 82 1 4 1 4 1,1 1 c Bracket mounting dimensions g Grommet

ZSE F/ISE

High Suction Vacuum Work 1 Work 2 Work n Max.A ON point OFF point Min.B Not adsorption Work 1 Work 2 Work n Atmosphere A B 4 A B 4 = A ON point Max.A: Maximum pressure value when workpiece is vacuumed. Min.B: Maximum pressure value when workpiece is not vacuumed.