Rotary Actuator

V V K* K* K* -XA46 -XA51 Change of long shaft length (Without keyway) V V V V T, J, K* K* T, K* J* K* MSQ MSZ CRQ2X MSQX -XA52 Change of short shaft length (Without keyway) V V K* K* K* -XA53 Change of double shaft length (Both without keyway) V V V K* -XA54 Change of long shaft length (With four chamfers) V V V X, Z* X, Z* -XA55 Change of short shaft length (With four chamfers)

High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 A XLS Series Dimensions XLS/Without control power supply D Lead wire AWG20, O.D.: 2.63 mm E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT

Electric Actuators

24 66 to 400 110 104 LJ1H102NH-K 28 70 to 400 LJ1H202PA-K 34 76 to 500 112 106 LJ1H202NA-K 38 80 to 500 LJ1H102PB-K 26 68 to 600 145 110 104 LJ1H102NB-K 30 72 to 600 LJ1H202PF-K 32 74 to 250 112 106 LJ1H202NF-K 36 78 to 250 LJ1H303PA-K 40 82 to 500 114 108 LJ1H303NA-K 42 84 to 500 Page Standard stroke (mm) and Speed (mm/s) Nonstandard motor Model Standard motor Deflection 100 200 300

Air Cylinder Series CM2

Grease pack part no.: GR-S-010 (10 g) Nickel plated Nickel plated Technical data 151 Series CM2W Basic Style (B) CM2WB Bore size Stroke Effective thread length 2 x FL H1 H2 Width across flats B2 Width across flats B1 2 x P (Rc, NPT, G) 2 x NN G G MM I Width across flats KA Width across flats KA 2 x Eh8 NA D D AL A K AL A K F N H F N MM NA S + Stroke ZZ + 2 x Stroke H + Stroke l 8 8 Width

Rotary Actuator/Vane Type

shaft length XA48 XA49 Change of short shaft length Y* Y* Y* XA49 XA50 Change of double shaft length Y* Y* XA50 XA51 Change of long shaft length K,T* J* K,T* J* K* XA51 XA52 Change of short shaft length K* K* K* K* K* K* K* K* XA52 XA53 Change of double shaft length K* K* K* K* K* K* XA53 XA55 Change of short shaft length J* J* J* J* J* J* XA55 XA57 Change of double shaft length

5-Port Solenoid Valve

K Round head combination screw (Drop prevention type*1) !

Table of Contents

40 MK(2) Angle coefficient (k): k = [up to 45 (= )] = 1, [up to 60] = 0.9, [up to 75] = 0.8, [up to 90] = 0.7 Lo: Distance from mounting surface to load center of gravity (cm) 20 36 2.9 + Lo 10 5.25 2.2 + Lo 15 17.5 2.7 + Lo Bore size (mm) RS Q G Allowable load weight WA (kg) RS H A 5.

Table of Contents

Please consult with SMC for availability. 15-4-43 9 Tubing Series T Variations K Tubing O.D. Tubing O.D.

Table of Contents

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

NCQ2/CQ2

UA C d1 d2 H K L UT Weight (g) Part no.

Compact Cylinder

D D 25 M E 2.5 through-hole 2 x 4 x OA thread depth RA K 4 pcs.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

CLKQ K G P G P Table 2.

Aluminum High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C

CA2

C0.5 file chamfer R sphere TP R sphere H W1 T H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM 30 MM 30 MM 30 H A H A H A MM 30 30 L RD C B A H A L K H W MM DA 30 MM DA 30 MM MM AL H LB K A AL H AL L K H L A H Symbol: A28 Symbol: A29 Symbol: A30 30 DA 30 30 MM L W MM W A L H AL A H A T T MM H 65 Series CA2 Made to Order Specifications

AR20-B to AR60-B

AR20K-B to AR60K-B Series Construction AR10-A AR20(K)-B/AR25(K)-B AC AF+AR+AL AW+AL AF+AR AF+AFM+AR AW+AFM AF Attachment AFM / AFD AR AL AW t e q IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

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(4 locations) (Except 10) E D1 B D2 Model A End boss assembly 0.016 0.043 MHZJ2-10S C K 7 12f8 40 11 15 D2 0.016 0.043 MHZJ2-16S C K 10 16f8 43.5 15 20 0.020 0.053 MHZJ2-20S C K 12 20f8 51.7 19 22 D1 0.020 0.053 MHZJ2-25S C K 15 25f8 61.3 24 25 Other dimensions and specifications correspond to the standard type.

Series KDM Rectangular Multi-connector

D K 8 8 0 P 0 1 M D K 9 0 S 0 1 M D K KDM20 8 / 1 1 0 P 0 2 M D K 1 0 S 0 2 M D K 2 . 3 3 2 P 0 2 M D K 1 0 S 0 2 M D K e u l B 2 3 / 5 3 0 P 0 2 M D K 3 0 S 0 2 M D K 4 4 0 P 0 2 M D K 3 0 S 0 2 M D K 0 2 d e R 4 / 1 7 0 P 0 2 M D K 7 0 S 0 2 M D K 6 6 0 P 0 2 M D K 7 0 S 0 2 M D K 6 1 / 5 9 0 P 0 2 M D K 9 0 S 0 2 M D K 8 8 0 P 0 2 M D K 9 0 S 0 2 M D K Applicable Tube Material

CRBU

Applicable shaft configurations shafts K, T Applicable shaft configurations Shaft J, K, T (mm) L2max W L1max X (mm) (mm) Shaft form 15 20 30 Size J K T J K T J K T J K T Size Size Thread Thread Shaft form 15 20 30 6.5 to 14 8 to 18 9 to 20 11.5 to 22 10 15 20 30 L11 L11 L11 L12 X3 X4 X4.5 X5 0.5 to 2 0.5 to 2.5 0.5 to 3 0.5 to 4 K T K T K T M3 X 0.5 M4 X 0.7 M5 X 0.8 2.5 2.5 3.3 2.5 3.3

Made to Order

FL1 (A) F1 K (mm) (H) A F1 H FL1 16.5 K 3 Bore size Stroke range 24 32 40 51 21 Up to 1000 22 18 54.5 3 22.5 Up to 1000 : Same as the standard model. 1896

Table of Contents

K-F-X60 LJ1H202NAStroke K-F-X60 Without motor Specifications Combinations other than the above cannot be manufactured.