Table of Contents

AL-31S JIS B 2401G35 5 pcs. u O-ring NBR JIS B 2401G35 1 pc. JIS B 2401G35 1 pc. JIS B 2401G35 3 pcs.

Aluminum High Vacuum Angle Valve

0 o 102 0.2 2-1 132 q 134 O-ring Part No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

High Power Cylinder:

Q Q Q Connector 5V 12V 24V IC C80C Q Q Q No Q A33 PLC Q 12V Terminal conduit A34 Q 100V 200V 12V Yes DIN terminal Relay PLC A44 Q Grommet Diagnostic indication (2 color) B59W Q Q 3 wire (NPN) 3 wire (PNP) H7A1 Q q Q 5V 12V IC H7A2 Q Grommet q Q H7B Q q Q 2 wire 12V H7C Q Q Connector Q Q Solid state switch 3 wire (NPN) 2 wire 5V 12V G39 IC Q Terminal conduit K39 12V 3 wire (NPN

JIS Standard Hydraulic Cylinder

+ l 2 x Rc P 4 x FD J MM FY BB D E e Air release K F MA l C Width across flats G f Air release 10 NA FT A SS NB B SS + Q + l S + Stroke FX M H ZZ + Stroke ZZ + Q + l + Stroke FZ (mm) With rod boot Stroke range (mm) Bore size (mm) l e J B BB C F GA GB M NA NB P R S FD FT FX FY FZ SS f Q B-rod C-rod B-rod C-rod 32 27 15 M10 x 1.25 25 to 1400 58 16 21 15 11 37 31 3/8 39 130 11 11 88 40 109

Vacuum Unit

Symbol Vacuum (V) port 06 6 08 8 07 1/4" 09 5/16" Symbol Type Note Nil Without option Cannot be selected when q is C, F , or H Bracket B Mounting bracket for single unit (nuts and bolts are included) Cannot be selected when q is A, B, or G Individual supply port L Manifold individual supply specification5 Install the release valve or vacuum breaker in the middle of the vacuum piping.

0.4

w e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

+ l 2-RcP 4-FD R J MM FY BB D E e Air release K F MA l C Width across flats G f Air release 10 NB NA FT A SS B SS + Q + l + Stroke S + Stroke FX H M ZZ + Stroke ZZ + Q + l + Stroke FZ (mm) With rod boot Bore size (mm) Stroke range (mm) l J B BB C F GA GB M NA NB P R S FD FT FX FY FZ SS e f Q 32 M10 x 1.25 58 62 38 16 21 15 11 37 31 3/8 39 130 11 11 88 40 109 30 52 21.5 15 25 to 1400 1/3.5

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

NCQ8

A B A HS 056 HS B A B A 075, 106 HS B A B A 150, 200, 250 Note 1) Figures in the table below are references for auto switch mounting positions in the stroke end detection.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

B dimension is 24.5 mm.

MY1

B 100 124 88.5 Operating range l Note) 9 10 6 B A MY1HT (High rigidity/High precision guide type) (mm) 63 50 Mounting position A 290.5 335.5 B 123.5 138.5 Operating range l Note) 5 5 A B 8-11-106

ZP

C D Flat Model A E K Model F H J F H J Flat with ribs ZPT40 -B-A14 U C ZPT40D10-B-A14 55 121.5 120 18.5 32 6.5 3.3 40 43 ZPT50 -B-A14 U C ZPT40D20-B-A14 127 65 124 50 19.5 33 7.5 3.8 50 53 137 5 10 6.2 13 ZPT40D30-B-A14 75 134 Dimensions by Stroke ZPT40D50-B-A14 182 95 179 75 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 40 50 U C ZPT 20-B-A14 U C ZPT 30-B-A14 U C ZPT 50-B-A14 U

VFR

Thread type Piping port (P, A, B, EA, EB port) Nil Rc G F 06 10 1 3 4 N NPT NPTF T 3-5-95 96 Series VFR6000 Construction 2 position single 2 position double VFR620 VFR610 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 !1 u q t q e i e !1 i u !

Stopper Cylinder

Q D B 20 15 D L M9BW 20 to 50 y !

VFS

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

Step Motor Controller

Shield 12 13 7 6 9 8 3 B-4 A-4 B-5 A-5 B-6 A-6 Brown Black Red Black Orange Black Vcc GND A A B B Connector B terminal no.

EX510

Internal Circuit (Brown) +24 V TD+ TD0 V q w e r DA DB DG SLD FG q w e r t OUTPUT Internal circuit COM A +24 V RD+ RD0 V q w e r INPUT FG DC-DC converter (insulated) +24 V TD+ TD0 V q w e r OUTPUT Power supply for output +24 V 0 V q w COM D +24 V 0 V Power supply for the input and for the control unit of the Gateway +24 V RD+ RD0 V q w q w e r INPUT Flexible I/O Setting Examples The occupying

15

side Model Traveling parallelism [mm] (Every 300 mm) q C side traveling parallelism to A side w D side traveling parallelism to B side q LEJS40 0.05 0.03 w C side D side LEJS63 0.05 0.03 Note) Traveling parallelism does not include the mounting surface accuracy.