EXxx-OMQ0015CN

Content 0 1 1 1 2 Reserved 3 1 4 1 5 Reserved 6 1 7 1 -67No.EX-OMQ0015CN Unit diagnostic status 0 7 6 5 4 3 2 1 0 Byte 2 Bit No. Content 0 10 1 11 2 12 3 13 4 14 5 15 6 16 7 17 Unit diagnostic status 1 7 6 5 4 3 2 1 0 Byte 3 Bit No.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Body (1) (1) With (1) With (w/o light) Base mounted 5 Note 1) Applicable to VQZ2000 and 3000.

ZQ-OM01301

ZQ-OM01301-A 1.How to Order Vacuum Ejector System (without energy saving function) Model of a single unit ZQ 05 1U A-K15L B-EA M G -3 3-N (1) (2) (3) (4)(5) (6) (7) (8)(9)(10)(11)(12) (7) Vacuum pressure switch unit specifications NilNote 3) With unit selection function (1) Nozzle nominal size M Fixed SI unit (kPa) 05 0.5 P Note 3) With unit selection function 07 0.7 (Initial value psi) 10

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: W (mm) Y L2 L2 max Size (mm) E3 = E1 = Y = 10 3 to 8 5 ( 8 Y) to (Y 1) Y-1 L1 L3 max X Size L2 = L4 = 10 9 (14 X) to (X 1) 15 3 to 9 6 ( 9 Y) to (Y 1.5) Y-1.5 3 to 14 X 1 L1 = 15 10 (18 X) to (X 1.5) 20 3 to 10 7 (10 Y) to (Y 1.5) Y-1.5 3 to 18 X 1.5 L3 = X = 20 10 (20 Xs) to (X 1.5) 30 5 to 13 8 (13 Y) to (Y 2) Y-2 3 to 20 X 1.5 30 12 (22 X) to (X 2) 40 7 to 15 9 (

Guide Cylinder Series MGG

7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A #2 !0 !9 @0 @1 #1 A' Ball bushing bearing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 Slide bearing y Long stroke 100 @7 80, 100 View A-A Component Parts Component Parts Description No. Description No.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.

CLQ

8 unlocking port (unlocks when pressurized) 7.5 42.5 22.5 Rc 1/8 Front cylinder port Rc 1/8 Rear cylinder port 2-5.4 through 2 x 2-9 counter bore depth 7 9 7.5 60 6.5 16 22 11 34 45 27 Minimum lead wire bending radius 10 Auto switch D-A7, A8 48.1 Dust cover (manual unlocking unit) 7 32 B + Stroke A + Stroke 14 34 45 4.5 61.7 Retraction locking LOCK Rc 1/8 unlocking port (unlocks when pressurized

Wireless System

0 1 0 A 14 A B A 14 A B A B A 14 A B A 14 A B 3 2 3 2 A 14 U side D side D side U side 0 1 0 1 5 4 5 4 2 3 2 3 B 12 B 12 B 12 B 12 B 12 7 8 7 8 1 2 3 4 5 Valve stations EX600-ED4 1 set EX600-DXPD 1 set EX600-DYPB 1 set EX600-WSV1 1 set EX600-EU1 1 set SS5Y3-10S6WS72-05B-C6 (Type 10 5-station manifold base, Wireless slave) Negative common, M12 connector IN/OUT pin arrangement 1, I/O unit:

VP300/500/700

Sub-plate gasket VP300-2-1P (Rc 1/8) VP300-2-2P (Rc 1/4) VP500-2-1P (Rc 1/4) VP500-2-2P (Rc 3/8) VP700-2-1P (Rc 3/8) VP700-2-2P (Rc 1/2) Mounting Screw Tightening Torques M3: 0.6 Nm M4: 1.4 Nm M5: 2.9 Nm VP300-17-1 VP344 SF4--50 VP500-17-1 VP544 VP700-17-1 VP744 How to Order Sub-plate VP 00 2 1 Series Port size Thread type VP744 3/8 1/2 VP544 1/4 3/8 VP344 1/8 1/4 3 5 7 P F N T VP344 VP544

HRX-OM-Z015

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 5 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low tank fluid level 1 CH1 abnormal high circulating fluid temp. 2 Reservation

IDX-OM-W011

-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-3 2-2-5 . 2-3 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 () . 4-1 1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-3 6-4 . 6-4 6-5 . 6-7 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 7-5 . 7-2 8 C 8-1 . 8-1 8-2 . 8-1 9 K 9-

Membrane Air Dryer

8, 1/4 56 195 10 89 66.5 35 20 209 195 1/4 7 12 6 6 10 66 209 14 99 78 40 24 223 209 1/4, 3/8 56 80 56 195 241 195 10 18 10 89 70 95 70 35 50 35 20 28 20 209 255 209 195 241 195 1/4 3/8 1/4 7.5 14 12 7 6 127 7 6 12 10 7 89 35 Made to Order Series IDG

SI Unit for Vacuum Manifold

Table 7-1.

Regulator

Recommended tightening torque for the port Unit: N m Thread size 1/8 1/4 3/8 1/2 3/4 1 Torque 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 Recommended tightening torque for the pressure gauge port Unit: N m Thread size 1/8 Torque 3 to 5 *Please refer to "10-7.

C95

0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

7 !8 !2 !6 !9 !5 @1 !3 !0 !1 80, 100 80, 100 @2 Component Parts Replacement Parts/Seal Kit (Single rod) Bore size [mm] Kit no. Contents 32 CK95-32 No.

Slider Type Ball Screw Drive/11-LEFS Series

How to Order 11 LEFS 16 100 B 1 1 S 6N H w e r t u y i o !0 !1 !

IDX-OM-V024

of the ventilation grille . 5-2 5.2.2 Auto drain maintenance . 5-2 Chapter 6 Troubleshooting . 6-1 6.1 TROUBLESHOOTING . 6-1 6.2 RESET THE THERMAL RELAY AND HIGH PRESSURE SWITCH. 6-4 IDFB60/70/80/90 Series IDX-OM-V024 Contents Chapter 7 Documents . 7-1 7.1 SPECIFICATIONS . 7-1 7.2 REFRIGERANT AND GWP VALUE . 7-2 7.3 DIMENSIONS . 7-3 7.4 ELECTRIC CIRCUIT . 7-4 7.5 AIR/ REFRIGERANT CIRCUIT

MB1

7 i o A A' Cylinder tube sectional view A-A' !0 !1 Parts list No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !

VZ5000

12 00F 12 stations 00N NPTF 00T 1(P) port Rc 1/4 3/5(R) port Rc 1/4 For How to order applicable connector assemblies, refer to page 3-3-7.