Compact manifold regulator ARM5 Series

Centralized Supply (IN) Piping Position AR425 to 935 Piping position 1 Bottom 2 Symbol Top ARX IN AMR Appearance ARM ARM 33 IN ARP 2. IN Fitting Type 15 IR-A Inch size Metric size Straight IN side IN side Symbol Symbol IR Elbow Elbow Straight 1/4 5/16 5/16 1/4 6 8 8 6 IRV 51 52 63 64 01 02 13 14 VEX SRH 3.

Compact Cylinder with Air Cushion

50 6.6 mm OB P Q RB S U Z Bore size (mm) 32 40 50 9 Rc 1/8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 11 for details on rod end nut and accessories.

Stroke Reading Cylinder and Counter

0 u @8 @4 !2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y CEP1 CE1 CE1 r @9 @2 CE2 !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

RLQ

Rod side cylinder port Rc, NPT, G 1/8 Rear cylinder port Rc, NPT, G 1/8 Approx. 55.4 Approx. 40.4 Rear cylinder port Rc, NPT, G 1/8 Rod side cylinder port Rc, NPT, G 1/8 Approx. 55.4 Approx. 40.4 w e r t q u i y w e r t q u i y Approx. Max. 77.4 Approx. Max. 77.4 Approx. 53.8 Approx. Max. 59.4 Approx.

AC Servo Motor Driver (SSCNET Type)

8) SW2 CN1B 2 1 MR-J3-B (Note 7) LECSS-S (3 axis) (Note 6 ) SSCNET cable (option) SW1 CN1A SW2 (Note 8) CN1B 2 1 MR-J3-B (Note 7) LECSS-S (n axis) SW1 CN1A (Note 9) Cap SW2 (Note 8) CN1B 2 1 Refer toLECSS Operation Manual,section 3.2 for wiring details.

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1 1 3 06 08 1 0 1 2 1 6 ;il H,r ,u x,N 1 2 m m Double universal male elbow 10 32 UNF Thread 1/16" NPT 1/8' NPT l+ trtpr H L' w' T' Y U' E Hex. socket head universalelbow 33 34 Extended Different dia. branch "Y" Double branch "Y" M5 M6 01 02 03 04 M5 x 0.8 N46 x 1.0 PT1/8 PI1/4 PT3/8 Pr1/2 a a a a a a a a a a a a a a a a a a a a a a r ) a a a a a a a a The use of compact spacer with bracket

Compact Cylinder with Air Cushion and Lock Series RLQ

Rod side cylinder port Rc, NPT, G 1/8 Head side cylinder port Rc, NPT, G 1/8 Approx. 55.4 Approx. 40.4 Head side cylinder port Rc, NPT, G 1/8 Rod side cylinder port Rc, NPT, G 1/8 Approx. 55.4 Approx. 40.4 w e r t q u i y w e r t q u i y Approx. Max. 77.4 Approx. Max. 77.4 Approx. 53.8 Approx. Max. 59.4 Approx.

Compact Cylinder

Mass Unit: g D-M9N(V) D-M9P(V) D-M9B(V) Auto switch model Caution 0.5 8 8 7 Precautions 1 14 14 13 Lead wire length (m) Fix the auto switch with the set screw attached to the auto switch body.

SI Unit for Vacuum Manifold

Pressure parameter setting error 1 1 0...15 Valve protection 1 1 0...15 Valve protection is operating on the applicable ejector. -32No.EX-OMY0014-A 8. Specification 8.1. Dimensions Fig.8-1 Dimensions of the SI Unit -33No.EX-OMY0014-A 8.2.

DOC1003626

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY

HRX-OM-W069

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure Alarm flag 1 6 Reservation 7 Reservation 8 CH1 abnormal rise of circulating fluid temperature 9

Series AP3500

Connections (Inlet, Outlet) Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 1/4 inch tube weld 1) 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld Code Ports FV4 MV4 TW4 FV6 MV6 TW6 Ports 2 ports Code 2PW Optional portings and porting configurations available.

Series PF2W Digital Flow Switch For Water Refer to www. poweraire .com for details of products compatible with overseas standards.

g 1,100 g Port size (Rc, NPT, G) 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Note 1) The system accuracy when combined with PF2W2/3.

ChemicalThermo-con

Circulating fluid HRG HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products Wetted parts material PFA Operating pressure Note 3) 0 (atmospheric pressure) to 0.35 MPa Tube size (PFA tube) 1/2" x 3/8" 1/2" x 3/8" 1/2" x 3/8" 3/4" x 5/8" 3/4" x 5/8" 3/4" x 5/8" 50 to 95 F (10 to 35C) (no condensation) Temperature Wetted parts material FEP , Stainless steel 304, Stainless steel 316 Facility

Series 10-, 21- AW-B Filter Regulator

10.5 10.5 13 5.4 6.5 8.5 8.5 11 43.9 45.8 54 55.5 65.8 34 40 54 54 66 30 41 50 50 70 30 38.4 38.4 47.5 63 66.4 74.3 74.3 80.3 26 29.4 37.3 37.3 43.3 44 44 44 44 44 72.4 85.6 91.7 93.2 175.5 11 10.5 10.5 8 6.5 91.4 121.9 153.9 155.9 242.6 25.5 24.8 28.9 30.4 42.2 40 53 70 75 95 5 3.5 1.5 1.2 3.2 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1/8 1/8 1/8 1/8 1/8 M28 x 1 M38 x 1.5 M42 x 1.5 M42

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.8 4 1 o / .

VP4

size 3/8, 1/2 With Surge Voltage Suppressor/-X23 Model no.

3M/SMseries

5 1 28 PSI (1 9kgf/cm'?

SMC Basic Pneumatics

.8 4 1 o / .

MLU

6.5 9 12 9 6.5 8 10 17 19 22 27 MLUB25 MLUB32 MLUB40 MLUB50 M5 x 0.8 73 87 87 102.5 M5 x 0.8 depth 7.5 M6 x 1 depth 12 7 8 9 9 12 14 16 20 M5 x 0.8 depth 11 M6 x 1 depth 11 45 50.5 53 62 45 51.5 53 62 10 8.5 9 11.5 15.5 17.5 18.5 23 32.5 37 38.5 43 2.5 0 0 6 5 5.5 7 8 36 40 45 53 6 7 8 11 54 68 86 104 26 42 54 64 5 to 300 5 to 300 5 to 300 5 to 300 Rc, NPT, 1/8 Rc, NPT, 1/8 M8 x 1.25 depth