7ND9071en

Description 1 1 Mounting bracket 2 1 Ear 3 4 Washer 4 4 Screw 28 4 Screw 29 1 Screw 36 1 Couplings jacket 47 1 Coupler socket 48 2 Screw 53 1 Plug (BJ actuators only) Item Qty Description 1 1 Mounting bracket 2 1 Draught piece 3 4 Washer 4 4 Screw 13 2 Screw 14 2 Hexagon nut 28 4 Screw 29 1 Screw 47 1 Coupler socket 48 2 Screw 53 1 Plug (BJ actuators only) Note: See 12.7 for old series B

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

C10: One-touch fitting for 10 C8: One-touch fitting for 8 Rc 3/8: Rc 3/8 thread Rc 1/4: Rc 1/4 thread 2n-Rc 1/4, 3/8, C8, C10, C12 {4(A), 2(B)} B A 7 SMC SMC SMC SMC SMC SMC B A 2 4 B A 6 B A B A 4 2 Manual override B A 5 B A B A 6.5 L1 2 4 B A 4 B A B A 2 4 B A B A 3 B A D side 2 4 B A 2 A A 2 4 B A 1 A SMC A 4 2 Indicator light R4.5 Stations 12 X (External pilot port) Rc 1/8 9 9 12 106

Table of Contents

2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

Micro Mechanical Valve Series VM1000

N F.O.F. 2 x 1 8 3 x 1 4 P.T.

Basic type / Direct mount type Series CY3B/CY3R

4 #0 !1 o !2 t r @2 @1 #3 #4 #1 @9 #2 @5 @7 @4 @6 CY1H10 CY1H10-B CY1H10-BS CY1H10@3 @8 #0 t Material Note Component Parts No. 1 2 3 4 No.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

range 2 x 2 x 6 OFF Counterbore depth 2.4 Red Indication Green Red 2 x 3.4 through 5 Proper operating range 6 4 20 2 1 Most sensitive position 16 4 3 Note) D-P79WSE = SE 1 4Connector pin Caution Please be careful of the mounting direction.

JIS Standard Hydraulic Cylinder

), 1 85 100 90 110 15 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 D-A9 Note 2) 85 + 40 15 + 40 100 + 40 90 + 40 110 + 40 n (n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) 2 (Different surfaces and same surface), 1 60 75 65 85 15 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 60 + 30 D-A9V Note 2) 15 + 30

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1.2-72

Step Motor Controller

B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Circuit Cable color Shield Vcc GND A A B B Z Z Brown Black Red Black Orange Black Yellow Black Connector B terminal no.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

B 2 B 2 B 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 PE R 3 R 3 R 3 R 3 P 1 P 1 P 1 P 1 X A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 2-One-touch fitting (X, PE ports) Applicable tube O.D.: 6 2n-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 Applicable connector: 26 pin MIL type with strain relief (L4) L3 (conforms to MIL-C-83503) 7.6 Connector case attachment lever (both sides) (3.2) 101.2

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

Combination Cylinder

2 !3 !4 !5 !6 !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

10

Symbol Size Port size Symbol Voltage Electrical entry A B C D E F H J K L M N 2 Grommet 1 N.C. 3 1/8 Size 1 A 5 24 VDC 4 C37 N.O. 2 1/4 3 5 B Grommet 100 VAC 2 With surge voltage suppressor C 110 VAC 1/8 3 D 200 VAC 5 Stainless steel E 230 VAC 2 1/4 3 F 24 VDC 5 G DIN terminal 24 VDC With surge voltage suppressor A B D E H J L M 4 H 100 VAC Size 2 2 1/4 N.C. 7 J 110 VAC C37 4 5 N.O. 3/8

Air Cylinder

10 15 50 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 50 + 45 (n 2) (n = 2, 3, 4, 5) D-H7l D-H7lW D-H7BA D-H7NF 10 15 60 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 60 + 45 (n 2) (n = 2, 3, 4, 5) CG3 JMB MB D-H7C D-C73C D-C80C 10 15 65 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 65 + 50 (n 2) (n = 2, 3, 4, 5) D-G5NT D-B5l/B64 10 15 75 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 75 + 55 (n 2) (n = 2, 3, 4, 5)

KJ

1 8 10.4 10 18 16 3 5 32 1 4 1 8 1 4 13.2 10 20.5 17 4.6 1 4 3 8 Applicable tubing 1 4 3 8 3 8 17.9 17 25.5 21 7 Connection thread 1 2 3 8 21.7 17 28 22 9.6 1 2 1 2 Reference dimensions after NPT thread installation.

Electric Actuator

4 !5 #0@9 @8 !9 !1 !2 @5 @1 $2$3 @2 !8 !6 @4 @7 o @0 $4$5 !0 !0 !3 u @3 !2 i e !

HRX-OM-X037

HRL Series 3.3 Installation 3-41 HRX-OM-X037 Chapter 3 Transport and Setting Up Recommended piping circuit User's equipment Thermo-chiller 1 2 2 Circulating fluid outlet for CH2 Optical 2 2 systems Circulating fluid return port CH2 1 4 4 Circulating fluid outlet CH1 for Laser 4 4 source Circulating fluid return port CH1 3 For water-cooled type 5 4 6 Facility water inlet Facility 4 5 water

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

ZP

-6 U4 For 4 soft tubing M-5AU-4 U6 For 6 soft tubing M-5AU-6 H Model A B C D 2 E F G H J K Vacuum inlet direction q Pad dia.