HRX-OM-R016

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 6 Filter Rc1/2 20m Note FQ1011N-04-T020-B-X61 Note) The filter shown above cannot be directly connected to the thermo-chiller.

AMPSeries

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

H B H Material: Carbon steel Material: Carbon steel Part no.

Digital Pressure Switch (Built-in Regulator Type) ISE35 Series ®

Specifications Model ISE35 Rated pressure range 0 to 1 MPa Display/setting pressure range 0.1 to 1 MPa ZSE20 ISE20 Withstand pressure 1.5 MPa ZSE30 ISE30 Minimum display/setting unit 0.01 MPa Applicable fluid Air, Non-corrosive gas, Non-flammable gas ZSE40 ISE40 12 to 24 VDC 10%, Ripple (p-p) 10% or less (With power supply polarity protection) Power supply voltage ZSE10 ISE10 Current consumption

AMR3000 to 6000

211 277 321 B 260 298 366 432 T 9 9 11 11 S 8 7 10 15 R 78 97 98 115 P 50 35 45 46.5 AL 1 4, 3 8 1 4, 3 8 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 103 121 131 161 10 10 70 70 264 302 370 436 100 120 130 160 180 210 246 290 AMR3000 AMR4000 AMR5000 AMR6000 1 4, 3 8, 1 2 1 4, 3 8, 1 2 1 2, 3 4 1 2, 3 4 3 4, 1 3 4, 1 Adapter

D series Pin Clamp Cylinder G G Series CKQ D/CLKQ D P P How to Order Built-in standard magnet D A 50 177 R A L KQG C P4DWSC With magnetic field resistant auto switch Built-in strong magnet D A 50 198 R A L KQP C P79WSE With magnetic field

G P Table 2.

5 Port Solenoid Valve Series SZ3000 Plug-in Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Connector type F: D-sub connector (25 pins) P: Flat ribbon cable (26 pins) SUP/EXH block mounting position Power supply terminals LOCK FREE LOCK FREE U side (2 to 10 stations) U D B M Specifications Symbol P P12 N N12 D side (2 to 10 stations) 24 VDC, Positive common Both sides (2 to 20 stations) 12 VDC, Positive common Special specifications 24 VDC, Negative common For special specifications

3 Port Solenoid Valve

NPP-02-5 3 Port Solenoid Valve 3 Port Solenoid Valve Power Consumption (with power saving circuit) Temperature rise: 1C (with power saving circuit) V100 Specifications V100 Specifications V100 Specifications V100 Specifications Type With power saving circuit Standard Valves of specific power consumption can be manufactured to suit the f f f p f p p Power Consumption 0.1W 0.35W Temperature

E,R.L.

Exr 27N-4O (40pm), 2NB '||oL: O.der ol assembly (Erample) OO' NAF + NAFI + iIAL Port Atlachment modl Air entry Port sire Applicable 0 6 % N P T t o I N P T Description Location s MF +NAq +a +M! NAF +6+ NAR NAC50?

HRX-OM-R005

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 6 Filter Rc1/2 20m Note FQ1011N-04-T020-B-X61 Note) The filter shown above cannot be directly connected to the thermo-chiller.

ASR

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 2 Cuts air consumption by operating the return stroke at a reduced pressure.

Air Cylinder MGQ Series Compact Guide Cylinder

When used in stopper application mounting hole, diameter should be 2d or more = E b o I il Cro.z Compact Guide Cylinder:Series MGQ Permissible lateral load (Ordinary-use load) F + 12 t6 ' i 4 : : : 49 25 51 F t 108 A6 104 176 3 3 206 686 343 80. : . l ' s s i 1070 lN=OlO2kql r(N.m) Bore size Modd to 20 r 3 B ' .50 75 .t( P , 0.29 o.24 o.21 0.18 0.16 0.48 o.39 0.31 o.37 0.33 -^ I McoM 0.51

Air Cylinder NCM Series Stainless Steel Cylinders

S 1 p c . n n p c s . L Long leads uountng B Front Nose Mount C -Rear Pivot E -Double End K -Non-Rotating Rod R -Block Mount W-Double Rod Auto.Switch 853. D-853 Gsg D-G59 B54. D-854 K59 D-K59 864 .

PSxx-OMH0002CN

8370: JIS B 8361: JIS B 9960-1: -() JIS B 8433-1993: 2) : : : 1 2 3 1 2 3 4 -2No.PS-OMH0002CN-D / / / / 1 1.5 3) 3) 1 1 () -3No.PS-OMH0002CN-D () () () () -4No.PS-OMH0002CN-D () * (ISE70 ) SUS630SUS430SUS304 (ISE75(H)) ON/OFF (ISE70 ) (10 10 ) UL1310 UL1585 UL -5No.PS-OMH0002CN-D * (50 N ) , ,ISE70 40 NmISE75(H)80 Nm 1.52 FG *() 6 33 2 () ( etc.) 10 m10 m DC(-)() -

PSxx-OME0003CN

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4

3

Specifications Model PFMC7501 PFMC7102 PFMC7202 Fluid Applicable fluid Dry air, N2 (Air quality grade is JIS B 8392-1 1.1.2 to 1.6.2, ISO 8573-1 1.1.2 to 1.6.2.)

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Dimensions inch (mm) AK3542 & 4542 M5 x 0.8 Actuation port 1.57 (40) 2.24 (57) 2 x Compression 2 x R, NPT male 2 x Rc, NPT female 0.44 (11.2) B B A A A Connections: N, BRN Connections: 4T, 6T Connections: 4, 6, BR 4 6 4 6 4 6 Ports A B Connections inch (mm) inch (mm) 4T 2.56 (65.0) 1.12 sq. (28.4) 1/4 inch compression 4BR 1.70 (43.2) Rc 1/4 4BRN 2.32 (58.9) 1.12 sq. (28.4) R 1/4 4 1.70

1

How to Calculate the Set Value A = Max. pressure value in auto preset mode B = Tentative min. pressure value in auto preset mode P1 = A (A B)/4 P2 = B + (A B)/4 Manual adjustment is possible after finishing in the auto preset mode.

P

Buffer connection thread Symbol Thread dia. 1 A8 Symbol Pad dia. 1 02 to 08 2 A10 B5 3 A14 2 10 to 16 3 20 to 32 B8 4 40, 50 4 ZP U6 B8 Y [qY type adaptor] B 3 ZP K20 [wBuffer] 3.8-63

The multi-pin connectors replace the

(from 2 to 3 and from 4 to 5) C(Sonic conductance) and b(critical pressure ratio) are subject to ISO 6358/JIS B 8390. Cv (Flow coefficient) is subject to ANSI/CNFPA) T3.21.3.