0.4

Formula: L1 = 10.5n + 45, L2 = 10.5n + 154.5 n: Stations (Maximum 16 stations) n L 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 L2 L3 L4 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 160.5 171 181.5 192 202.5 213 165 175.5 186 196.5 207 217.5 228 238.5 249 259.5 270 280.5 291 301.5 312 322.5 187.5 200 212.5 225 237.5 237.5 250 262.5 275 287.5 300 300 312.5 325 337.5 350 198 210.5 223 235.5 248

CNG

20 to 300 22 19.5 17 45 104 1/8 57.5 20 12 18 2 97 10 25 6.5 9 7 10 6 38 Up to 300 20 to 300 30 27 19 52 112 1/8 66 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 Up to 300 301 to 500 20 to 300 301 to 500 Bore size (mm) 20 25 32 40 K KA MM NA PG PH PL S CD CZ L RR TE TF TH TZ TT TV TW TX TY XA XB P J 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 8 29 14 11 10 5.5 25 3.2 35.8 42 16 28 43.4 3 12 M4 x 0.7

REA/REB

from cylinder shaft center Lo (cm) RZQ 25 15 40 500 500 MI W S 300 300 200 200 CEP1 Allowable driving force Fn (N) Load weight W (kg) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 CE1 20 30 40 50 20 30 40 50 20 CE2 10 Usable range 10 ML2B 10 Usable range Usable range 5 5 5 C J G5-S CV 1 1 0 2 3 4 5 6 1 1 0 2 3 4 5 6 1 7 8 9 10 11 12 13 7 8 9 10 11 1 0 2 3

REA/REB

: Standard Stroke Standard stroke (mm) Maximum manufacturable stroke (mm) Bore size (mm) 25 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 4000 32 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 40 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 6000 63 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900,

CNG

to 300 22 19.5 17 45 104 1/8 64 20 12 18 2 97 10 25 6.5 9 7 10 6 38 20 to 300 to 300 30 27 19 52 112 1/8 72.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 20 to 300 301 to 500 to 300 301 to 500 (mm) Bore size (mm) 20 25 32 40 P K KA MM NA PG PH PL S TB TDe8 TE TF TH TR TZ TS TT TV TW TX TY XA XB J 0.025 0.047 11 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 8 10 5.5 25 39 28 3.2 42 28 47.6 3 12 16

Cylinder with Lock Series CNG

to 300 22 19.5 17 45 104 1/8 64 20 12 18 2 97 10 25 6.5 9 7 10 6 38 20 to 300 to 300 30 27 19 52 112 1/8 72.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 20 to 300 301 to 500 to 300 301 to 500 (mm) Bore size (mm) 20 25 32 40 P K KA MM NA PG PH PL S TB TDe8 TE TF TH TR TZ TS TT TV TW TX TY XA XB J 0.025 0.047 11 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 8 10 5.5 25 39 28 3.2 42 28 47.6 3 12 16

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

type(R)) 34.5 53 5.5 (Lead wire length) 39.5 7.8 (N1, N3, N7) 300 (M5) Cover diameter 1.4 Cross sectional area 0.2mm2 42.5 (11) R P 15 1 3 8 1/8 NPTF R(EXH) port 16.3 13.4 2-M5 x 0.8 PE port 41.2 46.5 1/8 NPTF P(SUP) port L type plug connector (L) M type plug connector (M) 55.5 300 (Lead wire length) 66 300 (Lead wire length) Cover diameter 1.5 Cross sectional area 0.23mm2 Indicator light

Cylinder with Lock

63 300 80 300 100 300 *1 The maximum rod length of the MWB32-XC68 is 1800 mm.

LEC-OM07605CN

17 11. 11.6 () (1) 11 (1) AC[V] [A] AC[V] LECSS2-T5 30A5A 10 LECSS2-T7 300 S-N10 240 T LECSS2-T8 30A10A 15 LECSS2-T9 30A15A 20 1. ()80ms (2) (L11,L21)(L1L2L3) () (Class T) (Class K5) AC[V] [A] AC[V] [A] AC[V] LECSS2-T5 30 A5 A 240 1 300 1 250 LECSS2-T7 LECSS2-T8 LECSS2-T9 11.7 () (DI-1) () ()G2AMY (DO-1) DC12VDC24V40mA ()MY 11 18 11. 11.8 (1) (a) () SD 1(3.11) (b) () (C

VFR

Refer to How to Order Sub-plate Assembly on page 3-5-11. !3 !4 !

SMC Pneumatic Clean Series

3/8 1/2 25, 50, 75, 100, 125, 150, 200 Available Available (40 to 63) 11-/22-CG120 11-/22-CG125 11-/22-CG132 11-/22-CG140 11-/22-CG150 11-/22-CG163 11-/22-CG180 11-/22-CG1100 Non-lube Double acting, Available 20 25 32 40 50 63 80 100 single rod 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note) Consult SMC for long stroke.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

-LEJS40A-200 13000 LEC S 100 600 11-LEJS40B-200 10 4 LEC SS-T 63 1200 11-LEJS63A-300 13000 600 11-LEJS63B-300 10 LEC Y * Mounting position: Horizontal Motorless Evaluation Method To obtain the measured values of particle concentration, the accumulated value Note 1) of particles captured every 5 minutes, by the laser dust monitor, is converted into the particle concentration in every 1 m3.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

3 4 5 DIN terminal (D): SYJ5 20-D-M5 3 4 5 M8 connector (W0): SYJ5 20-W0-M5 3 4 5 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 Max. 10 28.1 [35.1] 60.9 53.4 12.7 42.1 M8 x 1 32.6 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 54.1 [56.3] 44.3 [46.5] 64.1 63.2 53.2 45.8 20 20 20 54.1 39.3 20 3 38.1 23.3 3 3 3 103.4 [107.8] 123 [127.4] 11 11 11 141.2 121.2 143 11 2-2.6

C95

11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 7 8 11 10 38 51 10 21 18 26 31 32 10 6.6 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 11 12 15 12 50 65 12 33 30 32 45 45 12 9 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 12.5 14

Series VQ Base Mounted Metal Seal/Rubber Seal

L1=10.5n+72 n: Station (Standrad max. 16) L n 1 82.5 137.5 148 11 187.5 250 260.5 10 177 237.5 248 16 240 300 310.5 15 229.5 287.5 298 14 219 275 285.5 13 208.5 262.5 273 12 198 262.5 273 9 166.5 225 235.5 8 156 212.5 223 7 145.5 200 210.5 6 135 200 210.5 5 124.5 187.5 198 4 114 175 185.5 3 103.5 162.5 173 2 93 150 160.5 L1 L2 L3 Dimensions/Side entry connector [-FS] (mm) L n 11 262.5 273

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

P 13 5 10 10 14 14 5-M5 0.8 (Piping port) 15 [ ] for AC L type plug connector (L) : SYJ3140L -M5 M type plug connector (M) : SYJ3140M -M5 33.5 33.5 23.2 (Mounting holes) 22 4 23.2 (Mounting holes) 22 4 B A B A 11 2.5 17.5 11 2.5 17.5 A B A B (Lead wire length) 50.7 64.3 About 300 52.6 [59.1] About 300 54.7 [56] (Lead wire length) 41.5 [48] 41.5 [48] 33.5 33.5 29.1 22.5 22.5 R2 R1 P R2 R1

MGG

16 54 35 6.6 100 70 130 M10 x 1.5 depth 18 65 30 26.5 35 109 75, 100 125, 150 200, 250 300 M6 x 1 depth 12 19 118 80 11 depth 8 35 100 16 16 60 35 6.6 106 80 73 135 M10 x 1.5 depth 18 35 29 40 129 M8 x 1.25 depth 16 22 150 100 14 depth 10 40 120 19 19 75 50 9 134 95 93 170 M12 x 1.75 depth 21 45 32 50 152 M10 x 1.5 depth 20 22 170 120 17 depth 12 45 150 21 25 90 56 11 152 115 103 194 50

Basic Type/Direct Mount Type

400 50 300 200 100 10 5 Usable range 20 30 40 50 Usable range 1 0 1 2 3 4 5 6 10 0 1 2 3 4 5 6 Distance from cylinder shaft center Lo (cm) 7 8 9 10 11 12 13 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) CY3B25 500 300 200 100 20 30 40 50 10 Usable range 5 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 Distance from cylinder shaft center Lo (cm) 1464 Model Selection CY3B/CY3R Series

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Bore size (mm) 32 40 50 63 80 100 125 l1 d2 CK S5 K1 G1 G2 EM CA H6 R1 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.5 1.5 51 11 10 6.6 38 10 21 7 18 26 31 32 8 10 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 15 12 9 50 65 12 33 11 30 32 45 45 12 12 67 15 16 9 52 14 37 11 35 40 50 50 12 15 86 18 16 11 66 18 47 12.5 40 50 60 63 14 15 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 20 25 14 94

C95

C95-S10 1.11-9 Series C95 Accessories Floating joint JA Steel, zinc chromate plated Bore (mm) Radial deflection M A B C D E F G H P U Weight (g) Load (kn) M10 X 1.25 M12 X 1.25 M16 X 1.5 M20 X 1.5 49.5 60 71.5 101 19.5 20 22 28 31 24 31 41 59.5 5 6 7.5 11.5 8 11 14 24 8 11 13.5 16 17 22 27 32 9 13 15 18 0.5 0.75 1.0 2.0 70 160 300 1080 2.5 4.4 11 18 32 40 50/63 80/100 5 Piston rod clevis