CY1

, 200 6 500 50, 100, 150, 200, 250, 300 10 50, 100, 150, 200, 250, 300, 350 400, 450, 500 15 1000 20 2000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25 4000 32 5000 40 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 50 6000 63 Note) Contact SMC if the maximum stroke will be exceeded.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

55 25 30 99 75, 100, 125, 150, 200 M5 x 0.8 depth 10 M8 x 1.25 depth 14 9.5 depth 6 25 30 85 16.5 13 16 6.6 54 113 35 65 100 26.5 70 130 65 30 35 109 M10 x 1.5 depth 18 M6 x 1 depth 12 11 depth 8 75, 100 125, 150 200, 250 300 32 35 100 19 16 16 6.6 60 118 35 80 106 29 80 135 73 35 40 129 M10 x 1.5 depth 18 M6 x 1 depth 12 11 depth 8 40 40 120 22 19 19 9 75 150 50 100 134 32 95 170 93 45

HRX-OM-S004

-A-20. 8-1 8.1.2 HRS100/150-A-40. 8-2 8.1.3 HRS100/150-A-46. 8-3 8.1.4 HRS100/150-W-20. 8-4 8.1.5 HRS100/150-W-40. 8-5 8.1.6 HRS100/150-W-46. 8-6 8.1.7 Refrigerant with GWP reference . 8-7 8.1.8 Communication specification . 8-7 8.2 Outline dimensions . 8-8 8.2.1 HRS100/150-A-20/40/46. 8-8 8.2.2 HRS100/150-W-20/40/46. 8-9 8.3 Flow diagram . 8-10 8.3.1 HRS100/150-A-20/40/46. 8-10 8.3.2 HRS100

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

-CG1RN25 11-CG1RN32 11-CG1RN40 11-CG1RN50 11-CG1RN63 50 63 20 25 32 40 50 63 1/4 Non-lube Double acting, 25, 50, 75, 100, 125, 150 Single rod 25, 50, 75, 100, 125, 150, 200 1/8 25, 50, 75, 100, 125, 150, 200, 250, 300 1/4 Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Bore size (mm) Item 20 25 32 40 50 63 Size Suction flow rate L/min (ANR) 20/25/32/40 50/63 1.5

C76

Extended Retract Extended Retract Extended Retract Extended Retract 10, 25 50, 100 150, 200 32 53.9 48.8 53.9 41.2 53.9 28.4 66.7 19.6 66.7 18.1 66.7 19.6 10, 25 50, 100 150, 200 250 78.5 72.6 78.5 63.7 78.5 49.0 76.5 23.5 76.5 23.5 76.5 23.5 76.5 23.5 40 Spring Extended (N) Spring force Bore size (mm) Standard stroke 10 25 50 100 150 200 250 Extended Retract Extended Retract Extended

C76

100 150 200 250 Extended Retract Extended Retract Extended Retract Extended Retract Extended Retract Extended Retract Extended Retract 10, 25 50, 100 150, 200 66.7 56.3 66.7 40.7 66.7 14.7 66.7 19.6 66.7 18.1 66.7 19.6 32 10, 25 50, 100 150, 200 250 76.5 50 76.5 23.5 76.5 23.5 76.5 23.5 76.5 23.5 76.5 23.5 76.5 65.9 40 6-10-20 21 Series C76 Air Cylinder: Standard/Non-rotating Type Single

HRX-OM-Q026

/300-A-20-, HRSH250/300-A-40. 8-9 8.2.4 HRSH100/150/200/250-W-20/40. 8-10 8.3 Flow Diagram . 8-11 8.3.1 HRSH-A-20/40. 8-11 8.3.2 HRSH-W-20/40. 8-12 8.4 Cooling Capacity . 8-13 8.4.1 HRSH100-A-20/40. 8-13 8.4.2 HRSH150-A-20/40. 8-13 8.4.3 HRSH200-A-20/40. 8-14 8.4.4 HRSH250-A-20/40. 8-14 8.4.5 HRSH300-A-20/40. 8-15 8.4.6 HRSH100-W-20/40. 8-16 8.4.7 HRSH150-W-20/40. 8-16 8.4.8 HRSH200-W-20/

MXS Series Air Slide Table

200 160 120 80 40 200 0 0 100 150 200 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 20 20 20 Lr=122mm 0.040 0.05 0.10 0.035 MXS20-125 MXS20-150 MXS20-100 MXS20-150 MXS20-75 MXS20-50 MXS20-40 MXS20-30 MXS20-20 MXS20-10 0.04 0.08 MXS20-125 MXS20-150 MXS20-100 MXS2075 MXS2050 MXS2040 MXS20-125 MXS20-100 0.030 Table deflection mm Table deflection mm Table deflection mm

Table of Contents

50 70 93 44.5 84 16 303 11 6.4 115 3.3 277 43 20 191 11 20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

LEC-OM02704CN

AED ( () 150 1. 2. ) 10.5 (A37)(A37) 1 Pos Spd Acc Dec Dwl (DWELL) Aux 10 16 11 11 . 2 11.1 . 2 11.2 . 4 11 1 11 11 11.1 (1) LECSC-S5 LECSC-S7 [mm] 40 6 6 6 135 (80) 4 () CNP1 CN1 CNP2 CNP3 6 (68) (25.5) MR-J3BAT MR-J3BAT 0.8[kg] .

TABLE OF CONTENTS

MODEL EW53 3-Way Normally Closed ATMOSPHERE EXHAUST EW53GG8DCCP EW53HH8DCCP EW53HJ8DCCP EW53JJ8DCCP EW53KK8DCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055 .075 .150 .020 .048 .075 .075 .150 DE-ENERGIZED ENERGIZED MODEL EW53 3-Way Normally Closed WITH PIPED EXHAUST ** EW53GG8XCCP EW53HH8XCCP EW53HJ8XCCP EW53JJ8XCCP EW53KK8XCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055

CXS

CXS15 CXS20 CXS25 CXS32 Model 120 150 200 175 150 125 120 110 200 175 150 125 120 110 200 175 150 125 120 110 125 120 110 150 125 110 100 90 80 Stroke SS ZZ Z 175 210 282 257 232 207 202 192 272 247 222 197 192 182 270 245 220 195 190 180 185 180 170 205 180 165 155 145 135 Symbol Made to Order 192 229 312 287 262 237 232 222 296 271 246 221 216 206 294 269 244 219 214 204 204 199 189 222

MNB

50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 187.5 187.5 701 to 750 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239 501

High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

smcmaintenancepartslist

0 to 150 Outstanding mechanical strength, heat resistance and chemical resistance.

C95

A B C D E F G H P U Load (kN) Weight (g) Angle Bore size (mm) JA30-10-125 32 70 2.5 0.5 9 8 5 8 24 19.5 49.5 M10 x 1.25 17 JA40-12-125 40 160 4.4 0.75 13 11 6 11 31 20 60 M12 x 1.25 22 5 27 JA50-16-150 50, 63 300 11 1.0 15 13.5 7.5 14 41 22 71.5 M16 x 1.5 JAH50-20-150 80, 100 1080 18 2.0 18 16 32 24 59.5 11.5 28 31 101 M20 x 1.5 CJ1 CJP CJ2 CM2 CG1 Courtesy of Steven Engineering, Inc.

SMC Pneumatic Clean Series

, 200 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 25, 50, 75, 100, 125, 150, 200 Available Available (40 to 63) 11-/22-CG120 11-/22-CG125 11-/22-CG132 11-/22-CG140 11-/22-CG150 11-/22-CG163 11-/22-CG180 11-/22-CG1100 Non-lube Double acting, Available 20 25 32 40 50 63 80 100 single rod 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note

SMC Pneumatic Clean Series

-/22-CM2R20 11-/22-CM2R25 11-/22-CM2R32 11-/22-CM2R40 25, 50, 75, 100, 125, 150 Relief type Vacuum suction type 1/8 25, 50, 75,100, 125, 150, 200 1/4 Not available 25, 50, 75, 100, 125, 150, 200, 250, 300 Non-lube Double acting, single rod Available Available 25, 50, 75, 100, 125, 150 1/8 25,50,75,100,125,150,200 1/4 25,50,75,100,125,150,200,250,300 Specifications Suction flow rate of vacuum

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Model Auto switch mounting Cushion Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Port size Lubrication Model Rubber Air 10-/21-CM2R20 10-/21-CM2R25 10-/21-CM2R32 10-/21-CM2R40 11-/22-CM2R20 11-/22-CM2R25 11-/22-CM2R32 11-/22-CM2R40 25, 50, 75, 100, 125, 150 1/8 Relief type Vacuum suction type 25, 50, 75,100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 1/4 Non-lube

CXWM/CXWL

Bore size/Stroke (mm) Data 10 25, 50, 75, 100 16 25, 50, 75, 100, 125, 150, 175, 200 End lock 20 25, 50, 75, 100, 125, 150, 175, 200 25 25, 50, 75, 100, 125, 150, 175, 200 R End lock 32 (25), 50, 75, 100, 125, 150, 175, 200 Nil None Note 1) For (25) stroke, the shock absorber is mounted on a single side of the plate.