CL

Stroke range Bore size (mm) H1 WA WW WB WH H PG PH PL PW S TA TB P TC W 30 30 25 20 20 25 32 40 178 193 196 221 198 215 218 241 55 62 62 70 16 17 17 17 30 30 35 35 35 40 40 50 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 23 25 28.5 33 11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25

KJ

11 !2 !33 !4 !5 !

High Vacuum Angle Valve

Heater: Indicator: 12 XLF/XLFV Series Dimensions XLF: Air operated (b) C E E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11

Fluoropolymer Piping Equipment

LQ3U11-R1 4 3 10 9 10 9 11 11 46.5 44.5 14 14 2 10 LQ3U21-R1 6 4 17 16 10 9 16 11 51 48.5 20 14 2.5 14 LQ3U21-R2 3 2 LQ3U31-R1 10 8 22.5 19.5 22.5 19.5 21 21 79 73 25 25 6.4 18 LQ3U31-R2 6 17 16 16 66.5 62 20 4 LQ3U32-R1 8 6 22.5 19.5 17 16 21 16 66.5 62 25 20 18 LQ3U32-R2 4 10 9 11 62 58 14 2.5 LQ3U41-R1 12 10 24 22 22.5 19.5 24 21 82.5 77 29 25 7.5 22 LQ3U41-R2 8 6.4 LQ3U51-R1 19 12 26.5

SMC Pneumatic Clean Series

25 32 40 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CM2R20 10-/21-CM2R25 10-/21-CM2R32 10-/21-CM2R40 11-/22-CM2R20 11-/22-CM2R25 11-/22-CM2R32 11-/22-CM2R40 25, 50, 75, 100, 125, 150 Relief type Vacuum suction type 1/8 25, 50, 75,100, 125, 150, 200 1/4 Not available 25, 50, 75, 100, 125, 150, 200, 250, 300 Non-lube Double acting, single

Table of Contents

12 11 12 10 11 11 12 11 11 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 VFR 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 VP4 Closed center Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

SY

Gasket Round head combination screw 7 8 SY9000-11-2 SY9000-18-2 (M3 x 42) SY5000-11-13 SY7000-11-7 SY3000-11-25 NBR For mounting valves (Flat nickel plated) M3 x 26 M4 x 31 SY3000-23-4 (M2 x 21) 22 Base Mounted Type How to Order Pilot Valve Assemblies How to Order Connector Assemblies 5 G SY114 30 4A SY100 DC: 30 1A SY100 100VAC: Indicator light/Surge voltage suppressor Rated voltage Nil

Table of Contents

View A Data Terminal block number 4 3 2 1 1 2 3 4 5 6 7 8 8 7 6 5 16-11-25 22 For details about certified products conforming to international standards, visit us at www.smcworld.com.

SQ1000/2000

COM COM 25 26 COM COM 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM 1 2 1 2 1 2 COM COM P kit Flat ribbon cable connector (for 26P) J kit Flat ribbon cable connector (20P) PC Wiring System compatible P kit Flat ribbon

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Model Auto switch mounting Cushion Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Port size Lubrication Model Rubber Air 10-/21-CM2R20 10-/21-CM2R25 10-/21-CM2R32 10-/21-CM2R40 11-/22-CM2R20 11-/22-CM2R25 11-/22-CM2R32 11-/22-CM2R40 25, 50, 75, 100, 125, 150 1/8 Relief type Vacuum suction type 25, 50, 75,100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 1/4 Non-lube

MY1

For MY1M50, 63 Work piece EY SMC EC a FH a 5 4.5 6 4 9 9.5 W 58 70 88 104 128 152 TT 5 (max. 11) 5 (max. 16.5) 8 (max. 20) 9 (max. 25) 13 (max. 33) 13 (max. 38) T 7 12 15 15 25 25 S 46.7 67.3 73.2 73.2 99 99 h 3.5 4.5 5.5 5.5 11 11 FW 66 82 95 FH 16 22 22 FC 14 17 22 22 30 35 FB 52 67 78 F 5 6 8 8 8 8 EY 50 57.5 73 87 115 138.5 EC 7.7 9 11.5 12 18.5 19 EB 32 38 50 57 66 77 E 20 24

15

Motor flange Body side hub [Built-in parts] Spider [Built-in parts] Size: 25 Hub Mounting Dimensions [mm] Size: 32 Hub Mounting Dimensions [mm] Size: 40 Hub Mounting Dimensions [mm] Motor type MM TT PD FP NZ M2.5 x 10 1.00 8 11 NY M2.5 x 10 1.00 8 11 NX M2.5 x 10 1.00 8 5.5 NM1 M3 x 4 0.63 5 11 NM2 M2.5 x 10 1.00 6 11 Motor type MM TT PD FP NZ M3 x 12 1.5 14 17.5 NY M4 x 12 2.5 11 17.5 NX

ZP

11 1.8 6 4.5 4 1.8 1.2 0.8 6.5 Dimensions (per stroke) Dimensions (per stroke) Weight (g) Weight (g) Non-rotating (J) Rotating (K) A B D A B D Model Model Rotating (K) Non-rotating (J) ZP3-Y04UM:3-B5 ZP3-Y04UM:6-B5 ZP3-Y04UM:10-B5 ZP3-Y06UM:3-B5 ZP3-Y06UM:6-B5 ZP3-Y06UM:10-B5 12.2 13.4 15.4 12.2 13.4 15.4 22.5 25 29 40 46 56 11 14.5 20.5 12.8 14.2 16.6 22.5 25 29 40 46 56 11 14.5 20.5 12.8

SMC Pneumatic Clean Series

25, 50, 75, 100, 125, 150, 200 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 25, 50, 75, 100, 125, 150, 200 Available Available (40 to 63) 11-/22-CG120 11-/22-CG125 11-/22-CG132 11-/22-CG140 11-/22-CG150 11-/22-CG163 11-/22-CG180 11-/22-CG1100 Non-lube Double acting, Available 20 25 32 40 50 63 80 100 single rod 1/8 25, 50, 75, 100, 125, 1/4 150

Cylinder with Lock

T TG1 32 DS5032 14 34 3.3 10 30 10.5 6.6 45 22 10 11.5 5 5.5 17 11 3 32.5 40 DS5040 16 40 4.3 12 35 11 6.6 55 25 10 12 5 5.5 20 13 4 38 50 DS5050 21 45 4.3 16 40 15 9 65 27 12 14 5 6.5 22 18 4 46.5 63 DS5063 21 51 4.3 16 45 15 9 75 32 12 14 5 6.5 25 18 4 56.5 80 DS5080 25 65 4.3 20 45 18 11 95 36 16 16 5 10 30 22 4 72 100 DS5100 25 75 6.3 20 55 18 11 115 41 16 16 5 10 32 22 4 89 * Supplied

AC

40 53 53 70 75 90 95 61.5 95 102.5 127.5 149.5 154.5 168 204.5 11 17 25 35 37.5 40.5 48 48 25 40 48 53 70 70 90 95 26 56.8 60.8 60.8 65.5 69.5 75.5 78 25 30 30 41 50 50 70 70 28 34 34 40 54 54 66 66 30 44 44 46 54 56 65.8 65.8 4.5 5.4 5.4 6.5 8.5 8.5 11 11 6.5 15.4 15.4 8 10.5 10.5 13 13 40 55 55 53 70 70 90 90 2 2.3 2.3 2.3 2.3 2.3 3.2 3.2 20.5 33.5 33.5 42.5 52.5 52.5 52.5 19 25 25 32.5

Series SV

SV400 SV300 SV200 SV100 Die-cast aluminium See thread types on page 86 for . 3/8: SY9000-27-1 1/4: SY7000-27-1-Q SY5000-27-1-Q SY3000-27-1-Q Sub-plate 8 1/2: SY9000-27-2 3/8: SY7000-27-2-Q Gasket SY5000-11-18 SY9000-11-2 SY7000-11-14 SY3000-11-25 9 For valve mounting (flat nickel plated) Round head combination screw SV2000-21-1 (M3 x 30) SV2000-21-2 (M3 x 40) SV3000-21-1 (M4 x 35) SX3000-

LEC-OM02704CN

PA12 P A 11 PA12 P A 11 PA12 15 46 15 1.

Table of Contents

40 53 53 70 75 90 95 J 25 30 30 41 50 50 70 70 B 58 94 101 116 128 129 169 176 K 28 34 34 40 54 54 66 66 C 11 26.5 28 31 36 36 43 46 L 30 44 44 46 54 56 65.8 65.8 D 25 57 55 59 68 68 87 87 M 4.5 5.4 5.4 6.5 8.5 8.5 11 11 E 26 65 64 66 74 74 84 84 N 6.5 15.4 15.4 8 10.5 10.5 13 13 F 29.5 28.5 30.5 35 35 44.5 44.5 P 40 55 55 53 70 70 90 90 G 0 2 Note) V 6 6 7 7 7 Q 2 2.3 2.3 2.3 2.3 2.3

CM2

5 28 5 15 24 1/8 133 142 20 -X 0 0.033 25 45 8 13 10 30 22 19 62 9 10 30 M10 x 1.25 M26 x 1.5 9 14 19.5 17 25 6 33.5 5.5 15 30 137 146 1/8 26 0 0.033 32 45 8 13 12 30 22 19 64 9 10 30 M10 x 1.25 M26 x 1.5 9 14 19.5 17 25 6 37.5 5.5 15 34.5 139 148 1/8 26 200 0.039 40 50 11 16 14 38 24 30 88 10 15 39 M14 x 1.5 M32 x 2 11 18 21 22 41.2 8 46.5 7 21.5 42.5 177 188 1/4 32 Clevis pin and snap