CL

35 35 40 40 50 50 56 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1400 30 to 1400 30 to 1400 69 16 20 20 25 30 36 36 40 14 14 14 27 32 32 37 37 47 47 53 40 50 55 65 80 90 90 90 15 17 17 21 21 16 16 18.5 60 70 86 102 116 145 161 182 32 40 40 52 52 15 17 17 21 21 16 16 18.5 22 27 27 32 41 11 11 11 11 11 16 16 18.5 8 11 11 13 16 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 9 9 11.5

Tie-rod Type Hydraulic Cylinder

22 1/4 37 106 11 15 50 19 50 25 9 73 53 20 28 17 17 13 M10 x 1.5 20 10 22 M16 x 1.5 30 26 3/8 43 112 11 15 63 21 55 28 8 80 60 22.4 30 17 17 13 M10 x 1.5 22 10 25 M18 x 1.5 30 26 3/8 47 116 11 15 80 26 65 M12 x 1.75 32 8 100 75 28 32 22 20 15 26 13 29 M22 x 1.5 35 30 1/2 57 127 11 25 100 34 80 M27 x 2 M12 x 1.75 38 6.5 118 90 35.5 35 27 19 16 27 13 34 35 32 1/2 66 137 12 32 125 34 80 M14

Cylinder with Lock

R1 S5 32 E5032 32 10 11 260.2 0.6 21 18 31 8 38 51 7 10 10 6.6 40 E5040 36 12 11 280.2 0.6 24 22 35 10 41 54 9 10 11 6.6 50 E5050 45 12 15 320.2 0.6 33 30 45 12 50 65 11 12 12 9 63 E5063 50 16 15 400.2 0.6 37 35 50 12 52 67 11 14 15 9 80 E5080 63 16 18 500.2 0.6 47 40 60 14 66 86 12.5 18 15 11 100 E5100 71 20 18 600.2 0.6 55 50 70 15 76 96 13.5 20 19 11 l3 l1 Single clevis with ball joint

AC

17 25 35 37.5 40.5 48 48 25 40 48 53 70 70 90 95 26 56.8 60.8 60.8 65.5 69.5 75.5 78 25 30 30 41 50 50 70 70 28 34 34 40 54 54 66 66 30 44 44 46 54 56 65.8 65.8 4.5 5.4 5.4 6.5 8.5 8.5 11 11 6.5 15.4 15.4 8 10.5 10.5 13 13 40 55 55 53 70 70 90 90 2 2.3 2.3 2.3 2.3 2.3 3.2 3.2 20.5 33.5 33.5 42.5 52.5 52.5 52.5 19 25 25 32.5 36 38 44 AR1000 AR2000 AR2500 AR3000 AR4000 AR4000-06 AR5000 AR6000

C85

62 126 6 13 115 11 8.5 95 20 44 24 8 16 12 22 17 8 8 11.5(13) 15(17) 15(17) 20 28 8 25 M22 x 1.5 G 1/8 M10 x 1.25 30 32 11 65 137 8 126 17 11 104 22 50 28 10 16 12 22 20 8 8 11.5(13) 15(17) 15(17) 10.5 10.2 22 33.5 ( ): In the case of air cushion.

Table of Contents

(Refer to page 14-19-11.)

Modular F.R.L. Units

33.8 3 50 40 9 18 5 48 AC50B-B 3/4, 1 1/8 186.2 220.1 43 93.1 30 43.3 3.2 70 50 11 20 6 60 AC55B-B 1 1/8 191.2 234.1 43 98.1 30 43.3 3.2 70 50 11 20 6 60 AC60B-B 1 1/8 196.2 234.1 46 98.1 30 43.3 3.2 70 50 11 20 6 60 Optional specifications Semi-standard specifications Metal bowl with level gauge With drain guide Metal bowl with drain guide With barb fitting With auto drain Metal

Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

XL

30-1 XLF25-30-1 XLF25-30-1H XLFV25-30-1 XLG25-30-1 XLG25-30-1H XLGV25-30-1 XLD25-30-1 XLD25-30-1H XLDV25-30-1 XLH25-30-1 XL -40 XLA40-30-1 XLA40-30-1H XLAV40-30-1 XLC40-30-1 XLC40-30-1H XLCV40-30-1 XLF40-30-1 XLF40-30-1H XLFV40-30-1 XLG40-30-1 XLG40-30-1H XLGV40-30-1 XLD40-30-1 XLD40-30-1H XLDV40-30-1 XLH40-30-1 XL -16 XLA16-30-1 XLA16-30-1H XLAV16-30-1 XLC16-30-1 XLC16-30-1H XLCV16-30-1

Fluoropolymer Piping Equipment

LQ3T11-R1 4 3 4 3.5 10 9 10 9 10 9 4.8 9.5 11 11 11 28.5 27.5 28.5 27.5 28.5 27.5 14 14 14 2 LQ3T11-R5 4 3 LQ3T21-R1 4 6 4 17 16 10 9 17 16 6 12 16 11 16 34.5 33.5 30.5 29.5 34.5 33.5 20 14 20 2.5 LQ3T21-R2 3 6 2 LQ3T21-R5 6 4 17 16 10 9 16 11 34.5 33.5 30.5 29.5 20 14 2.5 LQ3T21-R6 6 3 2 LQ3T31-R1 6 8 10 25 25 6.4 LQ3T31-R2 6 10 17 16 16 38 37 20 4 LQ3T31-R5 10 8 22.5 19.5 21 21 47.5 44.5

Battery-less

20 40 60 30 45 60 50 60 80 (2000 [mm/s2]) 10 23 35 30 55 70 40 60 80 60 70 90 Vertical (3000 [mm/s2]) 2 4 8 8 16 30 11 22 43 13 27 53 Pushing force [N]*2 *3 *4 14 to 38 27 to 74 51 to 141 63 to 122 126 to 238 232 to 452 80 to 189 156 to 370 296 to 707 132 to 283 266 to 553 562 to 1058 Actuator specifications Speed [mm/s]*4 15 to 500 8 to 250 4 to 125 18 to 500 9 to 250 5 to 125 24 to 500

ZP

14 18 30.5 37 47 11 14.5 20.5 11 14 18 30.5 37 47 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

LEC-OM07605CN

LEC-CSS-L 11.2 11.2.1 [W] LECLECMR-RB-032 MR-RB-12 [40] [40] LECSS2-T5 30 LECSS2-T7 10 30 100 LECSS2-T8 10 30 100 LECSS2-T9 20 30 100 11 8 11. 11.2.2 [Pr. PA02] [Pr. PA02] 0 0 00: 100W 200W, 400W, 750W 02:LEC-MR-RB-032 03:LEC-MR-RB-12 11.2.3 11.5 100 5m 11 9 11. (1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.

CNA

160 1/4 1/4 92 30 52 14 13.5 18 116 150 92 180 144 21 98 22 25 20 19 16 Up to 750 Bore size (mm) 40 50 63 80 100 K KA M MM N P Q H S T V W ZZ J 6 14 11 M14 x 1.5 27 1/4 37 to 39.5 51 153 37.5 9 8 216 M8 x 1.25 7 18 11 M18 x 1.5 30 3/8 42 to 44.5 58 168 44 11 0 238 M8 x 1.25 7 18 14 M18 x 1.5 31 3/8 50 to 51.5 58 182 52.5 12 0 255 M10 x 1.25 11 22 17 M22 x 1.5 37 1/2 59.5 to 62.5 71 218 59.5

CNA

40 30 30 30 30.5 34 43 33.5 50 D-Z7/Z80 D-A3/A44 D-A3C, D-A44C D-A5/A6 D-B5/B64 D-A59W D-B59W D-Y59/Y69 D-Y7P/Y7V D-Y7W/Y7WV D-Y7BAL D-F5/J5/F59F D-F5W/J59W D-F5BAL/F5NTL D-G5/K59/G59F D-G5W/K59W D-G5NTL/G5BAL D-G39/K39 D-G39C, D-K39C D-P5DWL 40 63 80 100 34 50 34 34 34 35 38.5 47 10.5 9.5 9 7 8 38 MLGP 41 63 41 41 41 42.5 46.5 53 44 11 11 11 10 9 48.5 80 48.5 48.5 49.5 51 55 60 52 RLQ 56

CJ2

6-3-11.

Applicable Auto Switch Model

9 9 10 10 11 11 11 11 11 10 10 10 10 OUT() 2nd terminal 9 9 9 10 10 11 8 9 9 Note) Average value at normal temperature including hysteresis.

7ND9071en

IEC 60079-0: 2007/2011 IEC 60079-11: 2011 IEC 60079-26: 2006 IEC 60079-31: 2008 IEC 60079-0: 2007/2011 IEC 60079-11: 2011 IEC 60079-15: 2010, IEC 60079-31: 2008 Ex nA IIC T6...T4 Gc Ex tc IIIC T90 C Dc Input: Ui 30 V, Ii 152 mA Output: Ui 30 V, Ii 152 mA Ex ic IIC T6...T4 Gc Ex tc IIIC T90 C Dc Input: Ui 30 V, Ii 152 mA, Pmax = device limits itself, Ci 22 nF, Li 53 H Output: Ui 30

Stability of suction position,

ZP3EU-YF4JB10 [Weight: 430 g] ZP3EU-YF4JB30 [Weight: 461 g] ZP3EU-YF4JB50 [Weight: 486 g] Width across flats 17 Width across flats 30 Width across flats 17 Width across flats 30 Bushing Bushing 50 8 8 8 8 50 A B Bushing Bushing M22 x 1.5 M22 x 1.5 B A D-D D-D Rc1/8 Rc1/8 22 22 D D D D 26 26 32 32 11 11 42 42 19 19 4 4 11.11) 11.11) 30 (Rotating angle) 30 (Rotating angle) 50 61 Dimensions

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

For 100 VAC: SY100 30 1A Groove Cover For 200 VAC: SY100 30 2A Pin Cover For other voltages of AC: SY100 30 3A Groove DC polarity display Lever Pin Without lead wire: SY100 30 A Lead wire length -+ Socket (with connector and 2 of sockets only) Lead wire Nil 6 10 15 20 25 30 50 300mm 600mm 1000mm 1500mm 2000mm 2500mm 3000mm 5000mm (For DC) 10-SYJ3123-5LO-M3 SY100-30-4A-20 Connector How to