Series: Guide, Size: 25, Mounting Pitch: S [Ball Screw Drive, Step Motor/Servo Motor (24 VDC)/AC Servo Motor], Stroke, mm: 150

High Vacuum Angle Valve

Specifications Model XLH-16 XLH-25 XLH-40 XLH-50 Valve type Inert gas under vacuum Fluid (C) 5 to 150 Operating pressure (Pa) (abs) 10-6 to atmospheric pressure Conductance (L/s) Note 1) 80 45 14 5 In case of standard material FKM: 1.3 x 10-10 at normal temperature, excluding gas permeation Internal Leakage (Pam3/s) In case of standard material FKM: 1.3 x 10-11 at normal temperature, excluding

C76

100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 57 70 82 95 120 145 170 64 77 89 102 127 152 177 32 12.5 25 37.5 50 75 100 125 40 12.5 25 37.5 50 75 100 125 6-10-11 12 Series C76 Dimensions with Mounting Bracket [First angle projection] Double acting, Single rod Rod foot (Flange): C76F32A, C76F40A LT W TF

C76

10 23.8 58 9 14 30 G 1/8 37.5 12 M30 x 1.5 20 57 45 42.5 M10 x 1 19 42.5 22 8 50 M12 x 1.75 14.2 12 28.3 69 12 16 35 G 1/8 46.5 14 M38 x 1.5 24 40 ZZ S XC Item 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Stroke Bore 32 68 (93) 118 139 143 164 168 189 214 97 (122) 147 172 172 197 197

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Angle Weight (g) Load (kN) Bore size (mm) 32 40 50, 63 80, 100 125 JA30-10-125 JA40-12-125 JA50-16-150 JAH50-20-150 JA125-27-200 M10 x 1.25 49.5 19.5 70 2.5 24 5 8 8 17 9 0.5 M12 x 1.25 60 20 160 4.4 31 6 11 11 22 13 0.75 0.5 M16 x 1.5 71.5 22 300 11 41 7.5 14 13.5 27 15 1 M20 x 1.5 101 28 1080 31 18 59.5 11.5 24 16 32 18 2 M27 x 2 123 34 1500 38 28 66 13 27 20 41 24 2 Black color Rod

JA/JAH/JB/JS

12 16 19 24 29 6.6 6.6 9 9 11 11 18 22 7 8 11 13.5 16 20 22 24 13 17 22 27 32 41 46 55 CV MVGQ CC RB Option Pneumatic: Up to 1 MPa Hydraulic: Up to 3.5 MPa 20 25 32 30, 40 40 30, 40 50 50, 63 80 100 100 125 160 JAF20-8-100 JAF25-10-150 JAF32-10-100 JAF40-12-125 JAF40-12-150 JAF40-12-175 JAF50-16-150 JAF63-16-200 JAF80-20-250 JAF100-24-300 JAF100-27-150 JAF125-27-200 JAF160-33-200 13 17

JA/JAH/JB/JS

46 55 CV MVGQ CC RB Option Pneumatic: Up to 1 MPa Hydraulic: Up to 3.5 MPa 20 25 32 30, 40 40 30, 40 50 50, 63 80 100 100 125 160 JAF20-8-100 JAF25-10-150 JAF32-10-100 JAF40-12-125 JAF40-12-150 JAF40-12-175 JAF50-16-150 JAF63-16-200 JAF80-20-250 JAF100-24-300 JAF100-27-150 JAF125-27-200 JAF160-33-200 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6

REA/REB

speed of 600mm/s.

SMC Pneumatic Clean Series

25 32 40 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CM2R20 10-/21-CM2R25 10-/21-CM2R32 10-/21-CM2R40 11-/22-CM2R20 11-/22-CM2R25 11-/22-CM2R32 11-/22-CM2R40 25, 50, 75, 100, 125, 150 Relief type Vacuum suction type 1/8 25, 50, 75,100, 125, 150, 200 1/4 Not available 25, 50, 75, 100, 125, 150, 200, 250, 300 Non-lube Double acting, single

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) Stroke range (mm) O P AJ AI AH AG AB AA V U T S N M L A K J I B AP AK AL Rc 1/8 20 95 82 125 112 11 12 48 82 12 26 45 25 80 60 55 30 108 99 6.6 25 9 75, 100, 125, 150, 200 M6 x 1 depth 9 Rc 1/8 25 108 92 150 134 13 16 57 100 13 31 54 35 100 70 65 35 130 30 109 9 9 M6 x 1 depth 13 75, 100 125, 150 200, 250 300 Rc 1/8 32 118 102 150 134 16 16 65 114 16 38 60 35 106 80 73 40 135

MNB

65 120.5 46.5 20 14 38.5 9 2 12 100 52 120 104.5 1/4 50 15.5 77 75 18 32 to 1000 35 27 11 75 134.5 56.5 20 14 39.5 9 2 12 115 62 135 119.5 1/4 63 16.5 92 90 18 32 to 1000 40 32 13 95 169 72 25 20 45.5 12 4 16 126 63 153 150 1/4 80 19 100 102 22 37 to 1000 40 41 16 114 189 89 30 20 54 14 4 16 150 75 178 170 1/4 100 19 120 116 26 37 Bore size (mm) T N S V GL MM P GF K Q H VA W ZZ GD J GL1

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Model Auto switch mounting Cushion Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Port size Lubrication Model Rubber Air 10-/21-CM2R20 10-/21-CM2R25 10-/21-CM2R32 10-/21-CM2R40 11-/22-CM2R20 11-/22-CM2R25 11-/22-CM2R32 11-/22-CM2R40 25, 50, 75, 100, 125, 150 1/8 Relief type Vacuum suction type 25, 50, 75,100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 1/4 Non-lube

LEY-OM007

25LA [mm] 30 50 100 150 200 30 50 100 150 200 250 300 (kg) 0.84 0.97 1.14 1.43 1.58 1.64 1.85 2.09 2.52 2.78 3.10 3.34 [kg] 0.12 0.19 1 2 3000[mm/s 2] 320%(F.S.) 450%~95% 7.2[]P41 LEY 5 6() 452000Hz 1 () 7 8 9 10 11 -14- 3.2.

C95

A B C D E F G H P U Load (kN) Weight (g) Angle Bore size (mm) JA30-10-125 32 70 2.5 0.5 9 8 5 8 24 19.5 49.5 M10 x 1.25 17 JA40-12-125 40 160 4.4 0.75 13 11 6 11 31 20 60 M12 x 1.25 22 5 27 JA50-16-150 50, 63 300 11 1.0 15 13.5 7.5 14 41 22 71.5 M16 x 1.5 JAH50-20-150 80, 100 1080 18 2.0 18 16 32 24 59.5 11.5 28 31 101 M20 x 1.5 CJ1 CJP CJ2 CM2 CG1 Courtesy of Steven Engineering, Inc.

Booster Regulator/Air Tank

VBAT10A1 S Note) A safety valve port is provided only when option R or S is selected.

TABLE OF CONTENTS

Body Brass Body S. S.

LEC-OM02904

TAISEI 5. 10mUL 11 23 11 11.6 () 1 (2) (1) AC AC LECSS-S5 30A5A 30A5A 10A LECSS2-S7 30A5A 30A5A 10A 300V S-N10 240V T LECSS1-S7 30A10A 30A10A 15A LECSS2-S8 30A10A 30A5A 15A 1. UL/C-ULK5 2. 80ms 11 24 11 11.7 (1) (a) () SD 1 (3.12) (b) ( ) (c) () 11 25 11 M 1. 2. 3. () 4. 5. 1. 2. 3. () 4. 1.()(FR-BIF-(H)) 2.

MXS Series Air Slide Table

The absorbing stroke for both of these models is reduced to 10mm from 11 or 12, respectively. End Lock Specifications Model MXS8 MXS12 MXS16 MXS20 MXS25 8 12 16 20 25 Bore size (mm) 2-20 in/s (50~500m/s) Operating speed range 5.62 13.5 24.7 36.0 56.2 Holding force (lbf) 1 lbf = 4.4482 N Note) Refer to P. 14 for cautions on end lock.

MXS

, 125, 150 S n Auto switch Without auto switch * Refer to below table for parts No. of auto switch.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

-CG1RN25 11-CG1RN32 11-CG1RN40 11-CG1RN50 11-CG1RN63 50 63 20 25 32 40 50 63 1/4 Non-lube Double acting, 25, 50, 75, 100, 125, 150 Single rod 25, 50, 75, 100, 125, 150, 200 1/8 25, 50, 75, 100, 125, 150, 200, 250, 300 1/4 Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Bore size (mm) Item 20 25 32 40 50 63 Size Suction flow rate L/min (ANR) 20/25/32/40 50/63 1.5