11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

3 11-/22-MXP 6 5 11-/22-MXP10, 12, 16 Electrical entry from outside Electrical entry from inside Parallel electrical entry B A B B A A Solid state switch D-M9B, D-M9N Reed switch D-A93 (mm) (mm) Stroke (mm) 20 41 29 47 35 Stroke (mm) 20 45 25 51 31 Auto switch operating range Auto switch operating range 15 40.5 20.5 Model Model 25 50.5 30.5 30 59 39 10 35 15 25 46.5 34.5

High Vacuum Angle Valve

50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 XLG-50-2 70 181 79 31 11 75 52 76 29 9 XLG-63-2 88 206 100 39 11 87 95 70 77 33 9 XLG-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

3.2 D-M9B (2-wire) OUT Black Most sensitive position 6 DC(-) Blue 22 D-M9B OUT(+) Brown OUT(-) Blue 18

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Model Cushion Bore size (mm) 6 10 16 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CDU6 10-/21-CDU10 10-/21-CDU16 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 10-/21-CDU20 20 5, 10, 15, 20, 25, 30, 40, 50 10-/21-CDU25 25 Non-lube Double acting Single rod M5 x 0.8 11-/22-CDU6 11-/22-CDU10 11-/22-CDU16 6 10 16 5, 10, 15, 20, 25, 30

Compact Cylinder with Solenoid Valve/

Minimum Stroke for Auto Switch Mounting (mm) D-M9 10 D-M9V 5 D-M9W 15 D-M9WV 10 D-A9 10 D-A9V 5 Number of auto switches mounted Bore size (mm) 32 1, 40 50 2, 63 1 10 5 15 15 10 10 2 1 The outline dimensions for 5 mm stroke will be the same as those for 10 mm stroke. 2 The outline dimensions for 10 mm stroke will be the same as those for 15 mm stroke. 7 Prior to Use Auto Switches Common Specifications

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Nil S n 2 pcs. 1 pc. n pcs. 10 11 Relief type Vacuum suction type D 12 5 D M9B 10 C Q S B 21 C Q S B D 12 5 D M9B Auto switch (With auto switch) Nil With auto switch No D With auto switch (Built-in magnet) Without auto switch (Built-in magnet cylinder) Nil For auto switch part numbers, refer to the next page.

Environment

10 5 0 15 10 5 20 25 30 0 15 10 5 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 1500 1000 1000 1000 1000 L8 [mm] L8 [mm] L8 [mm] L8 [mm] Z 500 500 500 500 Mep m 0 0 0 0 0 2 1 3 4 5 0 15 10 5 0 15 10 5 20 0 15 10 5 20 25 30 L8 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

Fittings & Tubing Air Cylinders Rotary Actuators How to Order 11 Vacuum suction type Clean series 11 M D HR 2 10 R M9B S 22 M D HR 2 10 R M9B S Number of fingers Copper, fluorine and silicone-free + Low particle generation Number of auto switches 2 2 fingers Nil S 2 pcs. 1 pc. 22 Vacuum suction type Nominal size 10 15 20 30 Auto switch Without auto switch (without magnet) Nil Connecting

2

) Note 11) Note 11) Note 11) Note 11) Note 11) 6C Nylon bowl with bowl guard Note 12) Note 12) Note 12) Note 12) Note 12) Note 12) + Nil With drain cock J Note 14) Drain guide 1/8 Drain guide 1/4 g Air filter drain port Note 13) W Note 15) Drain cock with barb fitting: For 6 x 4 nylon tube 235 Air Combination Series AC20B-B to AC60B-B Modular F.R.L.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Auto Switch Mounting Position (Detection at stroke end) Operating Range Bore size (mm) Auto switch model 6 10 15 20 25 32 40 50 63 D-A9 9 13 8 5 6 4 D-M9, D-F9W 5 (2.5) 7 (4) D-Z7/Z80 9 9 11 11 11 A B D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV 7 6 6 7 6 Some switches cannot be mounted.

Cylinder with Lock

R1 S5 32 E5032 32 10 11 260.2 0.6 21 18 31 8 38 51 7 10 10 6.6 40 E5040 36 12 11 280.2 0.6 24 22 35 10 41 54 9 10 11 6.6 50 E5050 45 12 15 320.2 0.6 33 30 45 12 50 65 11 12 12 9 63 E5063 50 16 15 400.2 0.6 37 35 50 12 52 67 11 14 15 9 80 E5080 63 16 18 500.2 0.6 47 40 60 14 66 86 12.5 18 15 11 100 E5100 71 20 18 600.2 0.6 55 50 70 15 76 96 13.5 20 19 11 l3 l1 Single clevis with ball joint

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

180 124 21 31 76 25 19 Bore size [mm] H1 J K KA LZ M MM N P PG PH PL PW S Without rod boot With rod boot (One side) (Both sides) H ZZ d* e f h l ZZ ZZ 40 8 M8 x 1.25 6 14 71 11 M14 x 1.5 27 1/4 42 11 20 45 153 51 255 52 43 15 59 1/4 stroke 263 271 50 11 M8 x 1.25 7 18 80 11 M18 x 1.5 30 3/8 46 10 21 50 168 58 284 58 52 15 66 1/4 stroke 292 300 63 11 M10 x 1.25 7 18 99 14 M18 x 1.5 31 3/8

MXQ

26.5 MXQ-AS8(L) 5 19.5 B MXQ8(L) 7 22 7.5 8 14.6 9 3 7 9.8 MXQ-AS8(L)-X11 M3 x 8 M3 x 10 15 29.5 M6 x 1 F MXQ-AS8(L)-X12 25 39.5 E G MXQ-AS12(L) 5 23.5 MXQ12(L) M4 x 12 M4 x 12 M8 x 1 MXQ-AS12(L)-X11 9.5 29 11 12 18.5 14 4 10.5 12.7 15 33.5 C MXQ-AS12(L)-X12 25 43.5 MXQ-AS16(L) 5 24.5 Table mounting section MXQ16(L) M10 x 1 MXQ-AS16(L)-X11 M5 x 16 M5 x 16 11 36 13.5 14 21 17 5 13 15 15 34.5

REA/REB

C in the case of 15.

REA/REB

-X 20Stop Data 10-2-11 11 Series REA Dimensions REA25/32/40 Effective thread depth J L 0 0.1 B NN G 4-MM H G 2-port size X D I NB NB T N K W N S + Stroke F NA F R ZZ + Stroke (mm) B D F G H I K L MM x J N NA NB NN Model Port size REA25 REA32 REA40 Rc 1/8 46 27.8 13 8 20.5 34 10 70 M5 x 0.8 x 8 15 30 13 M26 x 1.5 Rc 1/8 60 35 16 9 22 40 15 80 M6 x 1.0 x 8 17 36 15 M26 x 1.5 Rc 1/4 70 43 16

SMC

15 15 17 15 25 35 N 4 4 4 4 6 6 6 NA 2 2 2 2 2 4 4 GA 15 15 15 42 51 61 111 KA 125.5 179.5 HA 40 40 40 25 36 72 76 13-/22-MXS12L-10 13-/22-MXS12L-20 13-/22-MXS12L-30 13-/22-MXS12L-40 13-/22-MXS12L-50 13-/22-MXS12L-75 13-/22-MXS12L-100 142 MXS Air Slide Table 1322Dimensions / MXS16 1322Basic style Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure

Cylinder with Lock

10.5 D-Z7/Z80 7.5 8.5 7.5 9.5 9.5 10.5 D-A5/A6 9 9 10 11 11 11 D-A59W 13 13 13 14 14 15 D-A3/A44 9 9 10 11 11 11 *1 The switch mounting bolt is supplied with the switch. * Values which include hysteresis are for reference purposes only.

Possible to transfer a workpiece at low-speed.

Description Qty. 4 4 4 4 1 1 1 1 Seal Seal Seal Seal 10 10 10 10 1 1 1 1 Gasket Gasket Gasket Gasket Parts included in seal kit 11 11 11 11 1 1 1 1 Gasket Gasket Gasket Gasket 15 Wear ring 15 Wear ring 15 Wear ring 15 Wear ring 4 4 4 4 16 Piston seal 16 Piston seal 16 Piston seal 16 Piston seal 4 4 4 4 25 Seal washer 25 Seal washer 25 Seal washer 25 Seal washer 2 2 2 2 A set includes all

Specification: Standard Type (Not Clean Room), Bore Size: 6 mm, Symmetric Type: Standard, Stroke: 15mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Specification: Standard Type (Not Clean Room), Bore Size: 6 mm, Symmetric Type: Standard, Stroke: 15mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal