Applicable Auto Switch Model

9 10 10 11 9 9 10 10 11 11 11 11 11 10 10 10 10 OUT() 2nd terminal 9 9 9 10 10 11 8 9 9 Note) Average value at normal temperature including hysteresis.

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(800) 526-7661 Parallel Run LTees 3/8 7/16 1/4 5/16 5/16 1/4 5/16 1/4 8 T1-L1-1 T4-L4-4 T3-L3-3 T2-L2-2 Parallel Run Reducing LTees 3/8 5/16 5/16 5/16 3/4 15/16 5/16 5/16 5/16 5/16 5/16 5/16 1/4 1/4 MEM 27/32 5/8 5/8 3/4 9 RT3-2L-2 RT3-2L-3 RT4-3L-4 RT1-3L-1 RT3-1L-1 RT2-3L-2 1 11/16 Crosses 1/2 15/16 5/16 5/16 11/16 15/16 MEM 1/4 27/32 1 1 33/64 5/8 15/16 3/8 11/16 1 1/8 1/4 5/8 27/32

KJ

5 No. q w e r t y u i o !0 !11 !2 !33 !4 !5 !

CV/MVGQ

5 !6 !7 !8 !

CV/MVGQ

5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No.

Air Cylinder

(0) 1 () 0 () 7 (5) 6 (4) 4 (2) 3 (1) CA2 25 10.5 (8) 9.5 (7) 6.5 (4) 5.5 (3) 0.5 () 0 () 6 (4) 5 (3) 2.5 (0.5) 1.5 (0) 1 () 0 () 7 (5) 6 (4) 4 (2) 3 (1) CS1 32 11.5 (9) 10.5 (8) 7.5 (5) 6.5 (4) 1.5 (0) 0.5 (0) 7 (5) 6 (4) 3.5 (1.5) 2.5 (0.5) 2 (0) 1 (0) 8 (6) 7 (5) 5 (3) 4 (2) 40 17.5 15.5 13.5 11.5 6.5 5.5 12 11 8.5 7.5 7 6 13 12 10 9 CS2 * ( ): Setting position for the auto switch with

Swivels

Port 1 Port 2 B D Port 2 C PS2490210-20-20 5.91" 4.63" 3.43" 1.27" 2.63" 3.36" 1 1/4-11 1/2 1 5/8-12 150.2 mm 117.5 mm 87.0 mm 32.3 mm 66.7 mm 85.2 mm NPTF UN-2B Port 1 PS2490210-24-24 5.91" 4.63" 3.43" 1.27" 2.63" 3.36" 1 1/4-11 1/2 1 5/8-12 150.2 mm 117.5 mm 87.0 mm 32.3 mm 66.7 mm 85.2 mm NPTF UN-2B Dia PS3290210-32-32 6.75" 5.45" 3.93" 1.52" 3.06" 4.19" 2 11-1/2 2-1/2-12 171.5 mm 138.4

High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

Fluoropolymer Piping Equipment

Metric size Inch size Series Appearance Class 1/4" 3/8" None 1/8" 1/2" 3/4" 1" 6 8 10 12 19 1/8" 1/4" 3/8" 1/2" 3/4" 1" 11/4" 25 4 3 11/4" 1 2 3 4 5 6 7 1 2 3 4 5 6 Male Connector LQ3H P.915 Female P.916 1 2 3 4 5 6 1 2 3 4 5 6 Male P.917 Elbow LQ3L Female P.918 1 2 3 4 5 6 1 2 3 4 5 6 Male P.919 Branch tee LQ3B Female P.920 1 2 3 4 5 6 1 2 3 4 5 6 Male P.921 Run tee LQ3R Female P.922 1 2

Vacuum Pad

Adapter part no. 8 8 M5 x 0.8 M5 x 0.8 2 5 5 5 M3 x 0.5 M5 x 0.8 M5 x 0.8 4 M3 x 0.5 16 3.5 16 4 1.8 Buffer Applicable Pad List 2 3 11 5 5 4 4 3 Mounting Adapter Part No. 0.8 1.5 1.8 1.5 0.4 1.8 1.4 3 4 2 5 6 Applicable pad part no. Applicable pad part no. Buffer Assembly Part No.

15

46 69.8 61.4 M3 x 12 M5 x 40 14 NY M4 x 0.7 8 70 50 5 46 69.8 61.4 M4 x 12 M5 x 40 11 NX M5 x 0.8 9 63 50 5 49.7 69.8 61.4 M4 x 12 M5 x 40 9 NW M5 x 0.8 9 70 50 5 47.5 69.8 61.4 M4 x 12 M5 x 40 9 NV M4 x 0.7 8 63 50 5 49.7 69.8 61.4 M4 x 12 M5 x 40 9 NU M5 x 0.8 9 70 50 5 47.5 69.8 61.4 M4 x 12 M5 x 40 11 NT M5 x 0.8 9 70 50 5 46 69.8 61.4 M3 x 12 M5 x 40 12 NM2 M4 x 0.7 8 50

Table of Contents

AD37 AD37N(5) AD48 AD48N(5) AD47 AD47N(5) AD48 AD48N(5) Float type auto-drain N.O.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

[I/O cable] LEC CK4 Cable length (L) [m] 1 1.5 3 3 5 5 Controller side PLC side (16) (7.9) (10) (11) (30) (60) (L) Conductor size: AWG26 Weight Terminal no.

CL

11 11 11 11 16 16 18.5 8 11 11 13 16 67 78 73 84 77 92 85 100 112.5 141.5 121 150 133 167 Without rod boot With rod boot Bore size (mm) J K KA MM N S W P H ZZ e f h ZZ l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/5 stroke 1/5 stroke 1/5 stroke 1/4 3/8 3/8 1/2 1/2 1/2 1/2 3/4 40 50 63 80 100 125 140 160 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 M14 x 1.5 M14 x 1.5

MY1

For MY1M50, 63 Work piece EY SMC EC a FH a 5 4.5 6 4 9 9.5 W 58 70 88 104 128 152 TT 5 (max. 11) 5 (max. 16.5) 8 (max. 20) 9 (max. 25) 13 (max. 33) 13 (max. 38) T 7 12 15 15 25 25 S 46.7 67.3 73.2 73.2 99 99 h 3.5 4.5 5.5 5.5 11 11 FW 66 82 95 FH 16 22 22 FC 14 17 22 22 30 35 FB 52 67 78 F 5 6 8 8 8 8 EY 50 57.5 73 87 115 138.5 EC 7.7 9 11.5 12 18.5 19 EB 32 38 50 57 66 77 E 20 24

42

Bottom 1/2 SYJ S kit 12 stations SZ n: Stations VF Flow Rate Characteristics at the Number of Manifold Stations (Operated individually) VP4 Model Passage/Stations Station 1 Station 5 Station 10 C [dm3/(sbar)] 11 11 11 VQ 1/2 1 4/2 (P A/B) b 0.24 0.24 0.24 2-position metal seal VQ51 2 00 Cv 2.7 2.7 2.7 VQ 4/5 VQ 4/5 C [dm3/(sbar)] 12 12 12 b 0.14 0.14 0.14 4/2 5/3 (A/B EA/EB) VQC 1/2 Cv

SMC Pneumatic Clean Series

Hs A 29 B (mm) D-C73 A D-H7A1/H7B B Hs A B Bore size Hs 7 6 22.5 6 5 22.5 7 6 25 6 5 25 8 7 28.5 7 6 28.5 14 12 32.5 13 11 32.5 20 25 32 40 Note) The above values should be used as a guide for detection at stroke end.

AC

5 !6 Block packing !

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

) 3 11 P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 21 L plug connector (L): 10-SYJ5 23-L-M5 3 4 5 M plug connector (M): 10-SYJ5 23-M-M5 3 4 5 DIN Terminal (D): 10-SYJ5 23-D-M5 3 4 5 M8 connector (WO): 10-SYJ5 23-WO-M5 3 4 5 Approx. 300 (Lead wire length) Applicable cable O.D 3.5 to 7 MAX.10 28.1[35.1] 60.9 53.4 12.7 42.1 M8 x 1 32.6 15.1 39.2[46.2] Approx. 300 (Lead wire length) Pg7 54.1[56.3] 44.3

CRQ2

10 13 11.4 40 139 177 5 37 5 M6 x 1 depth 7 0 0.03 17 25 73 32.5 2 20 5 3.5 39.5 5 93 11 20 15 14 AU dimension is not the dimension at the time of shipment, since its dimension is for adjustment parts.