Air Slide Table

Metal stopper with bumper Rubber stopper Shock absorber L1 L1 L1 10 5.5 33.5 8 9 6 20 5.5 39.5 11 12 9 30 14 39.5 11 13 10 40 17 39.5 11 13 10 50 22 39.5 11 13 10 75 41 39.5 11 13 10 100 47 39.5 11 13 10 125 72 39.5 11 13 10 Stroke K MZ Low thrust with high rigidity type MXQB Single side-ported type MXQC Height interchangeable type MXQ Auto Switch Mounting Made to Order Model Selection Common

Made to Order

CQ2W series (mm) Bore size A L 50 stroke or less 75, 100 stroke 32 40 50 63 80 100 12 64.5 54.5 (64.5) 12 74 64 (74) 13 76.5 66.5 (76.5) 13 78 68 (78) 5 L 5 L + Stroke 15 91 81 (91) 17 104.5 94.5 (104.5) A + 2 (Stroke) ( ): Denotes the dimensions with auto switch magnet.

5

119 12 12 1/8 12.5 12.5 M5 x 0.8 32 79 11 11 121 12 12 1/8 10.5 10.5 1/8 40 87 12 12 139 13 13 1/8 13 10 1/8 Up to 1500 50 102 13 13 162 14 14 1/4 14 14 1/4 63 102 13 13 162 14 14 1/4 14 14 1/4 80 122 196 20 20 3/8 17.5 17.5 3/8 100 122 196 20 20 1/2 17.5 17.5 1/2 Female Rod End (mm) Bore size A1 H MM ZZ 20 8 13 M4 x 0.7 92 25 8 14 M5 x 0.8 93 32 12 14 M6 x 1 95 40 13 15 M8 x 1.25 104

V100

kPa to 0.6 100 kPa to 0.6 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0.6 100 kPa to 0.6 N.C.

CQ2

53.5 74.5 20 4.5 59 7 13 23.5 118 53.5 80 80 43.5 12 63 98 86 22 6 29 71 7 13 137 53.5 100 100 Double clevis (mm) Bore (mm) Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Y LY LZ X W/o auto switch With auto switch A 88 98 109.5 119.5 132 142 Bore (mm) Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 CD CL CT CU CW CX CZ L 9 91.5 113 16.2 63 B 36 46

Air Cylinder

12 (13) 162 (174) 63 23.5 12 (14) 102 (114) 12 (13) 162 (174) 80 27 16 (20) 124 (138) 198 (212) 100 30 16 (20) 124 (138) 198 (212) ZZ + Stroke S + Stroke DL1 TB ( ): Denotes the dimensions for long stroke.

CM2

37.5 50 75 100 125 141 154 166 179 204 229 254 151 164 176 189 214 239 264 40 12.5 25 37.5 50 75 100 125 170.5 183.5 195.5 208.5 233.5 258.5 283.5 181 194 206 219 244 269 294 With Air Cushion Built-in One-touch Fittings Bore size (mm) Bore size (mm) Q WB P WA N1 G 20 20 21.5 8.5 6 13 8 17.5 25 25 24.5 10.5 6 13 8 17.5 32 32 27 11.5 6 13 8 17.5 40 40 32.5 15 8 16 11 21.5 6-4-19 20 Series

Table of Contents

Possible to use in vacuum to 100 kPa Tubing material Tubing O.D.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Bore size (mm) LT LH L1 LG L LD L L1 B 36 46 43.5 53.5 53 63 LS 10 20 13.5 23.5 19 29 A B LS A 63 8 33.5 63 72.2 46 20 63 3.2 46 5 18 11 43.5 80 10 43.5 80 85 53.5 23.5 74.5 4.5 59 7 20 13 53.5 100 12 100 98 63 29 86 6 71 7 22 13 53.5 Flange bracket material: Carbon steel Foot bracket material: Carbon steel Bore size (mm

CV/MVGQ

Different sides RZQ 2 Same side 100 100 100 D-A3 D-G39 D-K39 35 + 30 (n 2) n = 2, 3, 4 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 Different sides MI W S n 100 + 100 (n 2) n = 2, 4, 6, 8 Same side CEP1 10 35 55 75 80 90 100 100 100 75 80 90 1 Different sides CE1 2 Same side 35 + 30 (n 2) n = 2, 3, 4 75 + 30 (

CV/MVGQ

110 + 50 (n 2) n = 2, 4, 6, 8 Same side 15 90 100 110 35 100 100 110 100 1 Different sides 2 Same side 100 100 110 D-A3 D-G39 D-K39 35 + 30 (n 2) n = 2, 3, 4 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 110 + 30 (n 2) n = 2, 4, 6, 8 Different sides n 100 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 Same side 100 100 110 90 100

Table of Contents

to 100 kPa 100 kPa 100 kPa Positive pressure 0 to 1 MPa 0 1 MPa Low pressure 0 to 101 kPa 101 kPa 0 For general purpose fluids Compound pressure 100 to 100 kPa 100 kPa 100 kPa Positive pressure 0 to 500 kPa 0 500 kPa 16-3-24 3 Compact Pressure Sensor For General Air Series PSE540 How to Order ZSE ISE Pressure sensing range PSE 1 3 Vacuum (0 to 101 kPa) Compound pressure (100 to 100 kPa)

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 A AL B1 C D E F GA GB H H1 I J K KA MM NA P S TA TB ZZ 5 6 6 8 11 11 13 16 M4 x 0.7 depth 7 5 M8 x 1.25 24 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 114 119 121 139 162 162 196 196 12 12 12 13 14 14 20 20 35 40 40 50 58 58 71 71 77 77 79 87 102 102 122 122 26 31 38 47 58 72 89 110 11 11 11 12 13 13 12 12 12 13 14 14 20 20 11 11 11 12 13 13

Table of Contents

0 AXT510-13 VQ7060-13-2 VQ7080-13-1 VQ7080-13-3 37 x 1.6 Gasket Gasket A Gasket B Gasket C O-ring Mini Y seal Mini Y seal Pilot valve assembly Double check spacer DIN terminal MYN-8 MYN-16 MYN-14 VQZ110QVV72-FPG UKL-S1 : FHG, FJG, FIG 3-10-26 27 Series VQ7-8 Manifold Specifications How to Order Manifold VV72 6 04D 03R VK Air release valve coil rating Stations 1 1 station VZ None 100 VAC

LEC-OM02704CN

30 100 LECSC-S8 10 30 100 (2) (2) PA02 PA02 0 0 00 100W 200W / 400W 02 LEC-MR-RB-032 03 LEC-MR-RB-12 13 10 13 (3) 13.4 100 5m (a) LECSCP-DP-CG3G4 G3-G4 P-D P-D 1 P P C C G3 D (2) 1) G4 5m (1) 1.

CL

4 Stroke 207 222 250 296 312 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 M30 X 1.5 M30 X 1.5 M36 X 1.5 244 16.5 252 3.2 3.2 3.2 4.5 6.0 8 9 9 70 80 93 27 30 31 37 40 35 35 39 8 0 0 0 0 42 50 59 76 92 84 90 98 27 27 34 44 43 45 45 50 13 13 16 16 17 20 30 25 13 13 16 21 22 20 30 25 266 16.0 274 290 16.0 298 116 116 339 18.0 348 133 126 98 98 358 18.0 40 40 40 367 329.5 338 373 100 157.5

Electric Actuators

T-slot 2 dimensions Compatible Motors Switch Internal Circuit D-Y7GL Motor output (W) Motor model Brake Manufacturer Power supply voltage (VAC) Motor specification symbol Controller driver model + Brown lead wire 100/110 200/220 100 200 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 LC1-1B1H1Without brake (Horizontal specification) Main circuit

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Refer to page 3-13-4.) 15 or less 15 Refer to the table below.

1

Bore size (mm) 12 16 20 25 32 40 50 63 80 100 C A B (Reference) R D Bore size (mm) 11 41 11 36 8 8 C76 6 1 13 13 46 13 38 10 10 10 2.5 21 15 54 15 46 12 12 Connecting port side C85 15 3 27 21 64 21 56 14 14 20 3 32 25 78 25 80 25 25 Dimensional Range Not Possible to Machine Additionally C95 25 4 39 25 86 25 90 25 25 32 A B Model MGF40 MGF63 MGF100 5 50 30 110 30 100 30 30 CP95 40 90 120

Compact 5-Port Solenoid Valve

to 100 N Without pressure switch for vacuum/pressure sensor 100 to 100 i Option4 (For details on the Function/Application, refer to page 121.)