M10 x 1.25 M14 x 1.5 M16 x 1.5 12 M4 10 10 7 5.5 5.5 6.5 M4 set screw (1 pc.) 30 10 16 22 60 46 30 12 M4 10 10 7 5.5 5.5 6.5 36 12 16 30 80 56 40 12 M5 12 13 7 9 7 10 M5 set screw (1 pc.) 44 12 24 30 88 64 43 16 M5 12 13 9 9 10 10 Y-type double knuckle joint Bracket pin 20: Y-020B 25: Y-032B 32: Y-04D 40: Y-04B 2 x D drill through RR1 RR1 C1 Chamfer NDH10 NDH10 MM C E1 E1 C1 Chamfer NZ NZ
axis) REBH 10-2-73 10-2-13 Direct mount type REAR Data Slider type (Slide bearing) REAS 10-2-14 10-2-73 High precision guide type (Double axis) REBHT Slider type (Ball bushing bearing) REAL 10-2-36 High precision guide type (Single axis) REAH 10-2-48 REAHT 10-2-48 High precision guide type (Double axis) 10-2-1 2 Semiconductor wafers Liquid crystal substrates Magnetic disks Ceramic products
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 20 Usable range 10 RHC 10 10 Usable range Usable range 5 5 MK(2) 5 RS Q G 1 0 1 2 3 4 5 6 1 1 2 3 4 5 6 1 0 0 1 2 3 4 5 6 7 8 9 10 11 12 13 7 8 9 10 11 7 8 9 10 1112 13 14 15 RS H A Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft
13 18 18 Diamond type Round type 095 9.5 135 13.5 136 13.6 137 13.7 138 13.8 139 13.9 140 14.0 195 19.5 196 19.6 197 19.7 198 19.8 199 19.9 200 20.0 Diamond type 096 9.6 097 9.7 098 9.8 099 9.9 100 10.0 10 10 14 14 20 20 Round type 105 10.5 106 10.6 107 10.7 108 10.8 109 10.9 110 11.0 145 14.5 146 14.6 147 14.7 148 14.8 149 14.9 150 15.0 Diamond type D11 11 15 15 -X 531 C(L)KQG32 Series
32 48 M6 x 1 10 40 52.5 M6 x 1 10 50 54 M8 x 1.25 14 Bore size KA KB KC KD KE MIW MIS O1 thread 16 8 4.5 8 10.5 M4 x 0.7 20 10 5 7 10 M5 x 0.8 32 17 7.5 13 16.5 M8 x 1.25 40 22 9.5 13 16.5 M8 x 1.25 50 22 9.5 13 16.5 M8 x 1.25 Stroke KD KC KE O1 thread B + Stroke R R KA KB KE * Dimensions other than those shown above are the same as the drawings above.
10 ISO Class 8 10 10 0 L/min (ANR) ISO Class 7 ISO Class 7 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] ISO Class 6 ISO Class 6 10 10 0 L/min (ANR) 50 L/min (ANR) ISO Class 5 ISO Class 5 10 10 1000 1000 20 L/min (ANR) ISO Class 4 ISO Class 4 100 100 70 L/min (ANR) 30 L/min (ANR) 10 10 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle diameter
Free CUJ 10 13 + Stroke 17 CU 4 E Pitch Dimensions (Without magnet) Free 15 19 CUJB4-4D CQS E Bore (mm) CQM 4 6 8 10 10 13 13 13.5 13 18 + Stroke 26 CQ2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 RQ Free CDUJB6-8D MU DWith boss in rod side (h9) Easy seal replacement
16.5 10 17 19.5 2 22 14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 12 17 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to 300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 20 27 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 20 27 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up
10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17
Data 10-7-13 14 Rotary Clamp Cylinder: Heavy Duty Type Series MK2 20, 25, 32, 40, 50, 63 How to Order MK2 B S F9BW 20 10 R F Number of auto switches Nil S 2 pcs. 1 pc.
8 15 13 3.5 1.5 5.5 200 200 10 107.0 108.0 107.5 108.0 154 164 12.5 10.5 17.5 15.5 6 4 8
MHK2-12S 120 12 9 4 9 13 76 Normally open Normally closed MHK2-16S 16 23 6 14.6 20.6 114 DL1 MHK2-20S 20 34 10 16 26 237 L2 MHK2-25S 25 58 14 19 33 443 20MHK2-12C 12 12 4 9 13 76 MHK2-16C 16 25 6 14.6 20.6 115 MHK2-20C 20 44 10 16 26 237 MHK2-25C 25 73 14 19 33 443 Series MHKL2/Long Stroke Type Note) Width at opening (mm) L2 Width at closing (mm) L1 Effective gripping force per finger (N)
10 MHW 0.3 MPa 0 0 MRHQ 10 20 30 40 50 10 20 30 40 50 60 60 Gripping point L (mm) Gripping point L (mm) Misc.
15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction flow rate of vacuum suction type (Reference
17 17 26 31 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 Model MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 W 5.8 5.8 6.5 8.5 10 14 14 39.5 45.5 53.5 67 83 106 129 14.6 20 24 29 35 40 52 7 10 12 14 17 20 26 58 58 70 88 104 128 152 -X 20Data With low load shock absorber + Adjusting bolt MY1W Bore size Stroke
. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 Model MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 W 5.8 5.8 6.5 8.5 10 14 14 39.5 45.5 53.5 67 83 106 129 14.6 20 24 29 35 40 52 7 10 12 14 17 20 26 58 58 70 88 104 128 152 -X 20Data With low load shock absorber + Adjusting bolt MY1W Bore size Stroke L TT h h E F EA h EB W F Stroke adjustment unit
Standard Strokes Bore size (mm) Standard strokes (mm) 20 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 80 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility
Description Qty. 4 Seal 1 4 Seal 1 4 Seal 1 12 Gasket 4 12 Gasket 4 12 Gasket 4 Parts included 13 O-ring 4 13 O-ring 4 13 O-ring 4 in seal kit 17 Wear ring 4 17 Wear ring 4 17 Wear ring 4 18 Piston seal 4 18 Piston seal 4 18 Piston seal 4 27 Seal washer 2 27 Seal washer 2 27 Seal washer 2 < External shock absorber type > Description Size 10 20 30 50 P523010-6 P523020-6 P523030-6 P523040-6
12 10 D-A79W 16 14 14 13 13 13 D-A9/A9V 11.5 9.5 9.5 9.5 D-F7/J79 D-F7V/J79C D-F7W/F7WV D-J79W/F7NTL D-F7BAL/F7BAVL/F79F 6.5 6 6 6 5.5 5.5 D-M9/M9V D-F9W/F9WV D-F9BAL 4.5 4.5 4.5 4.5 6 5.5 5.5 5.5 Since this is a guideline including hysteresis, not meant to be guaranteed.
12 10 D-A79W 16 14 14 13 13 13 D-A9/A9V 11.5 9.5 9.5 9.5 D-F7/J79 D-F7V/J79C D-F7W/F7WV D-J79W/F7NTL D-F7BAL/F7BAVL/F79F 6.5 6 6 6 5.5 5.5 D-M9/M9V D-F9W/F9WV D-F9BAL 4.5 4.5 4.5 4.5 6 5.5 5.5 5.5 Since this is a guideline including hysteresis, not meant to be guaranteed.