Bearing Style: L (Ball Bush Bearing), Bore Size: 10mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 50mm, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)

Bearing Style: L (Ball Bush Bearing), Bore Size: 10mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 50mm, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Bearing Style: L (Ball Bush Bearing), Bore Size: 10mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 50mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: M (1m)

Bearing Style: L (Ball Bush Bearing), Bore Size: 10mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 50mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: M (1m)

Bearing Style: L (Ball Bush Bearing), Bore Size: 10mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 50mm, Auto Switch: A90--Reed, AC Volt, Horizontal, Lead Wire or Prewired Connector: L (3m)

Bearing Style: L (Ball Bush Bearing), Bore Size: 10mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 50mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Bearing Style: L (Ball Bush Bearing), Bore Size: 10mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 50mm, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: MAPC (1.0m Cord Length, M8-3 Pin Connector)

Bearing Style: L (Ball Bush Bearing), Bore Size: 10mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 50mm, Auto Switch: A96--Reed, DC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Bearing Style: L (Ball Bush Bearing), Bore Size: 10mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 50mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～0.7, Cushion: Rubber cushion, Specification: Clean Series (vacuum type), Port thread type:

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～0.7, Cushion: Rubber cushion, Specification: Clean Series (relief type), Port thread type:

Specification: Copper, Fluorine & Silicon-free+Low Particle Generation, Vacuum Suction Type, Bearing: Ball Bushing Bearing, Bore Size: 10mm, Stroke: 50mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

1

pin) 25 21 Accessories Rod end cap (Flat type) 1 2 Rod end cap (Round type) 1 2 T-bracket 32 50 Mounting nut and rod end nut are included in the basic weight.

CATALOG

80 71 21 38 50 M22x1.5 21 27 18 +0.070 0 28 -0.3 -0.5 I-G10 100 79 21 44 55 M26x1.5 24 31 22 +0.084 0 32 -0.3 -0.5 Courtesy of Steven Engineering, Inc. !

2

54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 AR40(K)-06-B 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AR50(K)-B 70 66 65.8 11 13 90 3.2 AR60(K)-B 70 66 65.8 11 13 90 3.2 Note 1) The dimension of B is the length when the filter regulator knob is unlocked.

A

80 71 21 38 50 M22x1.5 21 27 18 +0.070 0 28 -0.3 -0.5 I-G10 100 79 21 44 55 M26x1.5 24 31 22 +0.084 0 32 -0.3 -0.5 Courtesy of Steven Engineering, Inc. !

Table of Contents

8 47 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 M6 x 1.0 50 14 40 Up to 600 35 32 27 32 50 20 21 14 58 11 58 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 M8 x 1.25 RB 63 14 Up to 600 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 130 32 J 100 22 60 Up to 750 40 37 41 60 90

Air Slide Table

50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height interchangeable type MXQ 10 10 10 10 10 10

1

40 50 63 MGPL MGPA 15 19 21 21 26 26 31 36 Over 50 st to 100 st 108 108 124 124 Over 100 st to 200 st 128 128 144 144 Over 50 st to 100 st 38.5 32 42 37 Over 100 st to 200 st 58.5 52 62 57 50 st or less 91 91 103 103 Over 200 st 150 150 171 171 50 st or less 21.5 15 21 16 Over 200 st 80.5 74 89 84 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 63 63.5 69.5 76 82 87 106.5 126 16 16 20 20

Table of Contents

19 21 19 21 21 21.8 21 21.8 21 21.8 18.8 21 18.8 21 21 23 21 23 21 23 23 23.8 23 23.8 23 23.8 22 23 30 31 39 41 47 49 61 63 69 74 73 78 95 100 Dimension with cover Reference dimension of NPT thread after installation. 1/4" 5/16" 1/4" 5/16" 5/16" 3/16" 5/16" 3/16" 5/16" 3/16" 3/16" 1/2" 3/16" 1/2" 3/16" 1/2" 12.7 NPT 1/8 23.4 27.4 39.8 45.8 17.6 14.3 NPT 1/4 25.4 31.4 39.8 45.8 17.6 12.7