Specification: Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type, Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 30mm, Adjuster: w/o Adjuster, Functional Option: Axial Piping Type, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 3m, Number: -

Specification: Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type, Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 10mm, Adjuster: Rubber Stopper, Both Ends, Functional Option: Standard Type, Auto Switch: M9NV--Solid State, Gen. Purpose, 3 Wire NPN, Vertical, Lead Wire: -, Number: -

Specification: Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type, Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 10mm, Adjuster: Rubber Stopper, Both Ends, Functional Option: Standard Type, Auto Switch: M9NV--Solid State, Gen. Purpose, 3 Wire NPN, Vertical, Lead Wire: 3m, Number: -

Specification: Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type, Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 20mm, Adjuster: Rubber Stopper, Both Ends, Functional Option: Standard Type, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 5m, Number: -

Specification: Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type, Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 100mm, Adjuster: Rubber Stopper, Both Ends, Functional Option: Standard Type, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 5m, Number: -

Specification: Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type, Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 75mm, Adjuster: Rubber Stopper, Both Ends, Functional Option: Standard Type, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: -, Number: -

Specification: Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type, Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 100mm, Adjuster: Metal Stopper, Extension End, Functional Option: Standard Type, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 5m, Number: -

Specification: Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type, Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 100mm, Adjuster: Rubber Stopper, Both Ends, Functional Option: Standard Type, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire: 3m, Number: -

2

Note 3) 5 to 50 5 to 55 Note 3) Ambient temperature (C) 5 to 50 Note 3) 5 to 50 5 to 55 Note 3) Outlet air atmospheric pressure dew point (C) performance Standard 15 Inlet air flow rate (L/min [ANR]) Note 5) 329 550 1100 665 818 28 56 111 222 Outlet air flow rate (L/min [ANR]) 300 500 1000 600 750 25 50 100 200 Purge air flow rate (L/min [ANR]) Note 6) 29 50 100 65 68 3 6 11 22 Inlet air

Table of Contents

40 38.4 29 4 70.5 56 40 0.050 0.093 IY-G04SUS 50, 63 40 CG-E050SUS 10 14 Type C 10 for axis 9.6 41.6 36.2 1.55 1.15 40 12 15 5 25 50 59.6 35 6 106.5 84 50 0.065 0.117 IY-G05SUS 80, 100 50, 63 CG-E080SUS 14 22 Type C 14 for axis 13.4 50.6 44.2 2.05 1.15 60 14 23 6 40 80 87.2 57 9 144.5 120 80 IY-G08SUS 80 18 Type C 18 for axis 17 64 56.2 2.55 1.35 IY-G10SUS 100 22 Type C 22 for axis 21 72

Hydraulic

1/4 37 15 106 50 9 25 73 53 14 23 19 20 50 28 17 17 13 M10 x 1.5 20 35 22 M16 x 1.5 30 26 3/8 43 18 112 63 8 28 80 60 16 27 21 22.4 55 30 17 17 13 M10 x 1.5 22 40 25 M18 x 1.5 30 26 3/8 47 20 116 80 8 32 100 75 18 31 26 28 65 32 22 20 15 M12 x 1.75 26 45 29 M22 x 1.5 35 30 1/2 57 22 127 100 6.5 38 118 90 20 35 34 35.5 80 35 27 19 16 M12 x 1.75 27 50 34 M27 x 2 35 32 1/2 66 24 137 125 6.5

Smooth Cylinder/Low Speed Cylinder

100 10 to 50 75, 100 32 CD hole H10 14 80 43 10 5 70 Axis d9 40 14 88.5 49.5 78.5 10 6 CU RR CW L CX B + Stroke 50 20 100.5 50.5 86.5 14 7 +0.4 +0.2 100.5 CZ 0.1 0.3 Bore size (mm) Stroke range (mm) CL + Stroke CX CZ N RR CW L L1 A + Stroke 5 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 32 18 36 28.5 M6 x 1.0 10 20 7 40 18 36 28.5 M6 x 1.0 10 22 7 50 22 44 33.5 M8 x 1.25 14 28 8 L1 Double

Table of Contents

40 50, 63 10 10 32, 40 5 20 25 25 26 26 50 76 75 100 200 5 20 50 76 75 100 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 40 40 100 100 30 30 80 Load weight m (kg) Load weight m (kg) 80 20 20 10 10 5 20 50 100 200 5 20 50 100 200 Stroke (mm) Stroke (mm) 8-19-33 Series MGP Horizontal Mounting (Ball bushing bearing) (21) l = 50 mm, V = 400 m/s (22) l = 100 mm, V = 400 m/s MGPL16

Table of Contents

59 44 50 99 50 66 83 VCB21 18 36 67.5 1/4 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 22 40 81.5 1/4, 3/8 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 VCB31 30 50 86 1/2 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101 71 68 104 22 45 90 1/4, 3/8 41 11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 VCB41 30 50 94 1/2 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 35

Made to Order

) 3.5 42.5 17 22 S1 S2 5 to 30 16 (27) (52.5) (22) 3.5 42.5 17 22 20 (36) (70) (29.5) 4.5 50 19.5 26 5 to 50 25 (39) (76.5) (32.5) 5 56.5 22.5 29 Note 1) ( ): Denotes the dimensions with auto switch.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

174 116 174 20 53.5 199.5 120.5 177.5 12 43.5 25, 50 113 170 192 CU CX +0.4 +0.2 22 13 31 100 214.5 22 53.5 75, 100 125.5 192.5 214.5 125.5 192.5 RR CW L B + Stroke CZ -0.1 -0.3 CL + Stroke Bore size (mm) Standard stroke CW CX CZ N RR A + Stroke 32 20 18 36 M6 x 1.0 10 Rod end male thread 40 22 18 36 M6 x 1.0 10 10, 15, 20, 25 50, 75, 100 50 28 22 44 M8 x 1.25 14 63 30 22 44 M10 x 1.5 14

5

Bore size (mm) E1 L1 MM R1 U1 NDH10 NX NZ I-03M 32 40 14 20 30 M10 x 1.25 12 16 10 +0.058 0 14 0.10 0.30 I-04M 40 50 19 22 40 M14 x 1.5 12.5 19 10 +0.058 0 14 0.10 0.30 I-05M 50, 63 64 24 28 50 M18 x 1.5 16.5 24 14 +0.070 0 20 0.10 0.30 I-08M 80 80 26 40 60 M22 x 1.5 23.5 34 22 +0.084 0 30 0.10 0.30 I-10M 100 80 26 40 60 M26 x 1.5 23.5 34 22 +0.084 0 30 0.10 0.30 Y-03M 32 20 30 M10 x 1.25

CQ2

32, 40/5 to 100 50 to 100/10 to 100 Double rod CQ2W 2.3-22 Spring 12, 16, 20 25, 32, 40 50 Single acting 12 to 40/5, 10 50/10, 20 2.3-38 return/extend CQ2 CU Non-rotating rod 12, 16, 20 25, 32, 40 50, 63 12, 16/5 to 30 20, 25/5 to 50 32, 40/5 to 100 50, 63/10 to 100 Single rod CQ2K 2.3-56 CQS Double acting 12, 16, 20 25, 32, 40 50, 63 CQ2 Double rod CQ2KW 12, 16/5 to 30 20, 40/5 to 50 50

ISO Cylinder

16 16 M16 x 1.5 6 M5 x 0.8 17 6 38 14.2 5 M6 x 1 24 8 18.3 16 10 22 20 20 M22 x 1.5 8 G1/8 20 8 44 17 6 M8 x 1.25 32 11 24 22 13 24 25 22 M22 x 1.5 10 G1/8 22 8 50 20 8 M10 x 1.25 32 11 30 22 17 28 Bore size S Z 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 8 46 (52) 74 (80) 10 46 (50) 74 (78) 12 50 (53.5) 88 (91.5) 16 50 (53.5) 65.5 (69) 81 (84.5) 88 (91.5) 103.5

Stability of suction position,

213.5 487 485 497 ZP3E-TF100UMJB ZP3E-TF80UMJB Width across flats 17 Rc1/8 Width across flats 17 Rc1/8 Bushing Bushing 50 21.5 30.5 A B 50 8 8 Bushing Bushing ZP3 Width across flats 30 B Width across flats 30 M22 x 1.5 M22 x 1.5 Width across flats 22 Width across flats 22 ZP3E ZP3E A 32 61 32 50 ZP2 33 24 ZP2V 4 4 25.11) 5 22.61) 7 30 (Rotating angle) 30 (Rotating angle) ZP 83 80 103 100